• Journal of the Korean Society for Precision Engineering
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• v.26 no.3
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• pp.47-54
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• 2009

In the manufacturing industry, there has been a significant increase in the use of coordinate measuring machines(CMM). In this paper, the sources of CMM measurement performance are discussed. The effects of workpiece position, length and orientation are analyzed by using the design of experiments. Both a fractional factorial design and a factorial design are employed to conduct the experimental study. The analysis of variance is performed to determine the significance of factors in the experiment and regression analysis is applied to make the measurement approximate model. The results show that position along the Z axis, length and orientation affect the CMM measurement performance.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.565-568
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• 2005

We describe a new scheme of dispersive white-light interferometer that is capable of measuring the thickness profile of thin-film layers, for which not only the top surface height profile but also the film thickness of the target surface should be measured at the same time. The interferometer is found useful particularly for in-situ inspection of micro-engineered surfaces such as liquid crystal displays, which requires for high-speed implementation of 3-D surface metrology.

• Bulletin of the Korean Space Science Society
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• 2005.04a
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• pp.36-36
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• 2005

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1659-1662
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• 2003

The mass measurement of solid density standards using weight exchanger is described. KRISS(Korea Research Institute od Standards and Science) has several solid density standards. Their mass have been measured manually only using a mass comparator(Mettler, 1kg - 0.01mg). However, the uncertaity of the manual mass measurement is up to 300 microgarm much more than 32 microgram of advanced NMIS(National Metrology Institutes) for 1 kg silicon sphere which is primary density standards due to an eccentric error and buoyancy correction error. The new system with a weight exchanger is designed and built to improve the measurement accuracy. It comprises a weight exchager, a mass comparator, air density instruments, and application program for automatic measurement. It is evaluated by measuring several elements in an air tight chamber to verify the performance of it.

• The Bulletin of The Korean Astronomical Society
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• v.35 no.1
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• pp.36.1-36.1
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• 2010

OFC (Optical Frequency Comb) is an optical spectrum which consists of equidistant lines in frequency space. OFC can thus be used as an optical ruler. Since it was demonstrated in late 1990s, it is revolutionizing many fields in frequency metrology such as the measurement of absolute optical frequencies, the measure ratios of optical frequencies with extremely high precision. It is also used in high-precision spectroscopy. In astronomy, OFC can be used as a very accurate and stable wavelength standard for a high resolution spectrograph to measure the radial velocity of celestial bodies with extremely high accuracy of about several tens cm/s. In our presentation, we will introduce some basic concepts of OFC and some issues to use it in astronomical spectrograph. We will also present our plan to develop a high resolution spectrograph with OFC.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.23-24
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• 2006

We present a dispersive scheme of white-light interferometry that enables not only to perform tomographical measurements of thin-film layers but also to measure a refractive index without mechanical depth scanning. The interferometry is found useful particularly for in-situ 3-D inspection of micro-engineered surfaces such as liquid crystal displays, semi-conductor and MEMS structure, which requires for high-speed implementation of 3-D surface metrology.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.9
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• pp.12-19
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• 2004

수십 MN(10/sup 6/ N) 이상의 하중을 다루는 건설산업 및 중공업으로부터 수십 kN- 수 MN의 힘을 사용하는 재료시험기, 프레스, 및 공장 자동화설비 그리고 수십 N-수 kN 용량의 상업용 저울까지 힘 측정은 산업의 근간이 되는 기술이며 우리 실생활에 폭 넓게 이용되고 있다. 제품을 생산하고 대형 구조물을 건설하는 공장이나 건축현장에서 힘을 정확히 측정한다는 것은 공정을 일정하게 유지 관리하고 있다는 표시이므로 제품의 품질관리나 건축물의 안전관리의 척도가 된다. (중략)

• Journal of the Korean Society for Precision Engineering
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• v.21 no.6
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• pp.15-21
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• 2004

반도체 제조산업과 나노, 바이오 산업의 비약적 발전에 따라 게이트 산화막(gate oxide)과 같이 반도체 제조공정에서 사용되는 유전체 박막(dielectric film)의 두께는 수 $\mu\textrm{m}$에서 수 nm 에 이르기까지 다양할 뿐 아니라 얇아지고 있으며, 또한 이러한 박막들이 다층으로 복잡하게 적층된 다층 박막의 응용이 높아지는 추세이다. 따라서, 반도체 및 광통신 소자, 발광소자, 바이오 칩 어레이 등과 같은 나노박막을 이용하는 산업에서는 박막의 두께 측정을 더욱 정확하고, 보다 빠르며 효율적으로 측정할 수 있는 박막 두께 측정용 계측기가 요구된다.(중략)

• Journal of the Korean Society for Precision Engineering
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• v.14 no.11
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• pp.154-162
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• 1997

A real time error compensation system was developed to improve the quasistatic volumetric accuracy of a machining center by using sensing, metrology, modeling, and computer control techniques. Including thermal errors, 32 error components are formulated in the time-space domain. Fifteen thermal sensors are used to characterize the temperature field of the machine. A compensation controller based on the IBM/PC has been linked with a CNC controller to compensate for machine errors in real time. The maximum linear displacement error in 4 body diagonals were reduced from 140 ${\mu}m$ to 34.5${\mu}m$ with this compensation system, and the spindle thermal drift in space was reduced from 147.3 ${\mu}m$ to 16.8 ${\mu}m$.

• Imaging Science in Dentistry
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• v.51 no.4
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• pp.399-406
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• 2021

Purpose: This in vitro study measured and compared 3 intraoral scanners' accuracy (trueness and precision) with different span lengths. Materials and Methods: Three master casts were prepared to simulate 3 different span lengths (fixed partial dentures with 3, 4, and 5 units). Each master cast was scanned once with an E3 lab scanner and 10 times with each of the 3 intraoral scanners (Trios 3, Planmeca Emerald, and Primescan AC). Data were stored as Standard Tessellation Language (STL) files. The differences between measurements were compared 3-dimensionally using metrology software. Data were analyzed using 1-way analysis of variance with post hoc analysis by the Tukey honest significant difference test for trueness and precision. Statistical significance was set at P<0.05. Results: A statistically significant difference was found between the 3 intraoral scanners in trueness and precision (P<0.05). Primescan AC showed the lowest trueness and precision values(36.8 ㎛ and 42.0 ㎛;(39.4 ㎛ and 51.2 ㎛; and 54.9 ㎛ and 52.7 ㎛) followed by Trios 3 (38.9 ㎛ and 53.5 ㎛; 49.9 ㎛ and 59.1 ㎛; and 58.1 ㎛ and 64.5 ㎛) and Planmeca Emerald (60.4 ㎛ and 63.6 ㎛; 61.3 ㎛ and 69.0 ㎛; and 70.8 ㎛ and 74.3 ㎛) for the 3-unit, 4-unit, and 5-unit fixed partial dentures, respectively. Conclusion: Primescan AC had the best trueness and precision, followed by Trios 3 and Planmeca Emerald. Increasing span length reduced the trueness and precession of the 3 scanners; however, their values were within the accepted successful ranges.