• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.437-441
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• 1995

In this paper, the ultra precision positioning system for servo motor and piezo actuator using dual servo loop control has been developed. For positioning system having long distance with ultra precision, the combination of global stage and micro stage is required. Servo moter and ball screw are used as a master stage and piezo acuator as a fine stage. By using this system, an positional precision witin .+-. 30nm has been achieved at dual servo loop control. When using micro stage, an positional precision within .+-. 10nm has been achieved. This result can be applied to develop semiconductor equipment such as wafer stepper.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.137-140
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• 2003

Recently, as the demand of small-sized precision parts is rising in precision industry such as mobile, automobile, optic. etc. the requirement of small-sized machine tool is increasing. Desktop machine tool define small-sized machine tool that is able to install in table. According to diminishing in size, Desktop machine tool is able to economize production cost by reducing work area and consuming electric power. But Desktop machine tool generates vibration in acceleration and deceleration modes by inertia force of moving part. Also vibration is generated when it move simultaneously two axis or three axis. Such generating vibration situation is reason of declining stiffness of machine tool structure because of smallizing in size. And this vibration has a large effect on precision of machining products. Therefore, evaluating of the control characteristic is necessary for minimizing vibration of machine tool as much as possible to accomplish precision machining of small-sized parts

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.9 s.252
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• pp.1094-1101
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• 2006

Recently, a ultra-precision stage is widely used in the fields of the nano-technology, specially in AFMs(Atomic Force Microscope) and STMs(Scanning Tunneling Microscope). In this paper, the ultra-precision stage which consists of flexure hinges, piezoelectric actuator and ultra-precision linear encoder, is designed and developed. The system transfer function of the ultra-precision stage system was derived from the step responses of the system using system identification tool. A $H_{\infty}$ controller was designed using loop shaping method to have robustness for the system uncertainty and external disturbances. For the designed controller, simulations were performed and it was applied to the ultra-precision stage system. From the experimental results it was found that this stage could be controlled with less than 5nm resolution irrespective of hysteresis and creep.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.22 no.5
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• pp.824-830
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• 2013

In ultra-precision machining, the inside temperature should be controlled precisely. The important factors are environmental conditions (outside temperature, humidity) and temperature conditions (cutting heat, spindle heat). Thus, in this study, an environmental control cell for the ultra-precision machine that could control the inside temperature and minimize effects of the surrounding environment to achieve a thermal deformation of less than 400nm of a specimen was designed and verified through C.F.D. Further, a method that could control the temperature precisely by using a blower, heat exchanger and heater was evaluated. As a result, this study established a C.F.D technic for the environmental control cell, and the specimen temperature was controlled to be within $17.465{\pm}0.055^{\circ}C$.

• Smart Structures and Systems
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• v.1 no.1
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• pp.13-27
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• 2005

Simultaneous precision positioning and vibration suppression of a reciprocating flexible manipulator is investigated in this paper. The flexible manipulator is driven by a multifunctional active strut with fuzzy logic controllers. The multifunctional active strut is a combination of a motor assembly and a piezoelectric stack actuator to simultaneously provide precision positioning and wide frequency bandwidth vibration suppression capabilities. First, the multifunctional active strut and the flexible manipulator are introduced, and their dynamic models are derived. A control strategy is then proposed, which includes a position controller and a vibration controller to achieve simultaneous precision positioning and vibration suppression of the flexible manipulator. Next, fuzzy logic control approach is presented to design a fuzzy logic position controller and a fuzzy logic vibration controller. Finally, experiments are conducted for the fuzzy logic controllers and the experimental results are compared with those from a PID control scheme consisting of a PID position controller and a PID vibration control. The comparison indicates that the fuzzy logic controller can easily handle the non-linearity in the strut and provide higher position accuracy and better vibration reduction with less control power consumption.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.11a
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• pp.163-164
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.11a
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• pp.449-450
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.11a
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• pp.477-478
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.11a
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• pp.25-26
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• 2007

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.11a
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• pp.461-462
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• 2007