• Journal of the Korean Institute of Intelligent Systems
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• v.24 no.2
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• pp.193-200
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• 2014

Piezoelectric actuators have been widely used in various applications because they have many advantages such as fast response time, repeatable nanometer motion, and high resolution. However Piezoelectric actuators have the strong hysteresis effect. The hysteresis effect can degrade the performance of the system using piezoelectric actuators. In past study, the parameters of the inverse hysteresis model are computed from the identified parameters using the Generalized Prandtl-Ishlinskii(GPI) model to cancel the hysteresis effect, however according to the identified parameters there exist the cases that can't form the inverse hysteresis loop. Thus in this paper the inverse hysteresis modeling mothod is proposed using the Inverse Generalized Prandtl-Ishlinskii(IGPI) model to handle that problem. The modeling results are verified by experimental results using various input signals.

• Journal of Electrical Engineering and Technology
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• v.11 no.5
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• pp.1457-1465
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• 2016

• Transactions of the Korean Society of Mechanical Engineers A
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• v.33 no.10
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• pp.1045-1053
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• 2009

Precision stages for 6-DOF positioning, actuated by PZT stacks, which are fed back by gap sensors and guided by flexure hinges, have enlarged their application territory in micro/nano manufacturing and measurement area. The precision stages inherently have such limitations as the nonlinearity between input and output in piezoelectric stacks, feedback signal noise in precision capacitive gap sensors and low material damping in precision kinematic linkages of mechanical flexures. To surmount these limitations, the precision stage is modeled with physics-based variables, which are identified by transient response correspondence, and a gain margin calculation algorithm using the Prandtl-Ishlinskii model and describing function is newly developed to assess system performance more precisely than linear controller design schemes. Based on such analyses, a precision positioning controller is designed. Excellent positioning accuracy with rapid settlement accomplished by the controller is shown in step responses of the closed-loop system.