Electrical characteristics of SiC schottky diodes treated by the various dry etch methods for a damaged surface (변형막 식각 방법에 따른 탄화규소 쇼트키 다이오드의 전기적 특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2008.06a
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- pp.232-233
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- 2008