• Journal of the Korea Academia-Industrial cooperation Society
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• v.11 no.6
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• pp.1955-1960
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• 2010

A performance of CNC 3-axis pipe profile-cutting machine we developed was evaluated by measuring and verifying a positioning accuracy of its feeding unit and a cutting shape accuracy of pipe workpiece. The positioning accuracy was verified by comparing moving distance actuated by PLC motion controller with actual one measured by a laser interferometer. The cutting shape accuracy was also verified by comparing a cutting shape obtained through scanning and 3D modeling the pipe workpiece with that through CL data.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.12
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• pp.163-170
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• 2002

The quality of a precision product, in general, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the work piece in the process. Recently the positioning accuracy level has reached to the level of submicron and long range of motion is required. For example, for 1 GDARM lithography, 20nm accuracy and 300mm stroke needs. This paper refers to the lithography stage especially to fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM (Linear DC Motor) is used and for fine one VCM is used. In this study, we propose the new structure of VCM for the fine actuator. It is 3 axis precision positioning stage for an aligner system. After we perform the optimal design of the stage to obtain the maximum force, which is related to the acceleration of the stage to accomplish throughput of product. And we controlled this fine stage with TDC. So we obtained 50nm resolution. So later more works will be done to obtain better accuracy.

• 제어로봇시스템학회:학술대회논문집
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• 1992.10b
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• pp.340-343
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• 1992

Fundamental positioning characteristics of a dual-axis Sawyer linear motor are described. The Sawyer motor is capable of high positional accuracy. An electronic control unit of the motor whose velocity is proportional to the frequency of the electric current was produced in our laboratory. The positioning system was constructed using two Sawyer motors, an air bearings suspension unit and an electronic control unit. The stable motion of the motor was confirmed on the open loop operation. The adjustable operating conditions were the live load of 1 kg, the maximum acceleration of 1.2G and the maximum velocity of 350 mm/s. Absolute positioning accuracy was improved within .+-.5.mu.m, on microstep operating conditions of dividing one pitch of 508.mu.m into 508 steps. The following two conclusions were obtained. An accelerating-cruising-decelerating control is effective for reduction in the travel time required. Also, microstep operation is effective for improving the resolution of position.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.879-882
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• 2005

This paper shows a method for design of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors. In the design of flexure guides, the Castigliano's theorem was used to find the stiffness of the guide. The motion amplifying mechanism was used in the piezoelectric actuator to achieve a large travel range. We found theoretically the travel range of the total system and verified using the commercial FEM(Finite element method) program. The maximum travel range of the planar scanner is above than 140 $\mu$m. The 3 axis positioning capability was verified by the mode analysis using the FEM program. Moreover, we presented the actual AFM(Atomic Force Microscope) imaging results with up to 2Hz imaging scan rate. Experimental results show that the properties of the proposed planar scanner is well enough to be used in SPM applications like AFM.

• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.2524-2528
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• 2003

High-precision position system is widely used in lots of fields such as semiconductor industry, biotechnology, display and other up-to-date industry field. One of the main issues is to have a long traveling range with precision. There are a few solutions. For instance, there are inchworm methods, lever principle. In this study, we use lever principle to amplify output displacement with a new mechanical amplification structure. We designed new type 3DOF stage with PZT actuator and capacitive sensor. Non-monolithic structure is suggested to obtain the convenience of assembly and modification. Driving parts are designed as modules that generate displacement amplification of each axis. Designed motion module consists of 3 flexure hinges and a PZT actuator with double L lever structure.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.347-353
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• 2004

Due to various advantages over the conventional linear motion device such as ball-screw, linear motors have been used in wide variety of industrial applications for years. Driven by increased demand for precision machine tools, the importance of high positioning accuracy, high stiffness and high thrust are greatly increasing. The merits of linear motor are high speed high acceleration and good positioning accuracy. In addiction, Linear motor for high qualify machine tool call for high thrust, high stiffness. In this paper, thrust ripple, detent force and thermal behavior are considered for the development of high performance linear motor whose thrust is up to 1,900N. This paper presents a comprehensive study for an iron core type linear motor characteristics that include the influence of PM position on thrust ripple by detent force and motor dynamics as well.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.445-448
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• 2004

Linear motor is very rapidly substituted for rotary motor and ball screw for precision positioning applications because of its characteristics such as high speed, no backlash and simplicities. A precision positioning system which is composed of linear motion(LM) guide and linear motor is widely used since it has easy controllable property but this system has low accuracy problem caused by friction of the LM guide. In this study, a scanning type XY stage is manufactured and some experiments is performed to improve the accuracy of the stage.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.890-893
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• 2004

The ultra precision machining in industrial field are increased day by day. The diamond turning has been used generally, but now is faced with limitation of use, because of higher requirement of production field. The electron beam lithography is alternative in machining area as semiconductor production. For EB lithography, 5 axis vacuum stage is required to duplicate small and large patterns on wafer. The stage is composed of 2 rotational axis and 3 translational axis with 5 DC servo motors. The positioning repeatability and resolution of Z axis feed unit are 3.21$\mu$m and 0.5 $\mu$m/step enough to apply to lithography.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.37.3-37
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• 2001

The quality of a precision product, in genera, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the workpiece in the process. Recently the positioning accuracy level employed for some of precision product has reached the level of submicron and long range of motion is required. For example, for 1GDRM lithography, 20nm accuracy and 300nm stroke needs. This paper refers to the lithography stage especially fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM(Linear DC Noter) is used and for fine or VCM is used ...

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.32.1-32
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• 2001

Up to now, many studies on human-machine interface with voice systems have been reported. However, in these systems, precise instructions are necessary for a robot to execute given tasks successfully. In order to make a robot friendly, more ambiguous instructions with some kinds of degree adverbs (, e.g., "move it a little", "lift it more" and so on, ) will be preferable. Therefore, we analyze the relationship between ambiguous instructions and the characteristics of instructed human motion in positioning task to design human friendly interface systems. Several experimental results show that adverbial expressions are mainly divided into three clusters corresponding to the displacement, and that instructors and perators have several differences in distance sense each other.