• International Journal of Precision Engineering and Manufacturing
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• 제9권2호
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• pp.44-49
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• 2008

This paper describes the problem of ultraprecision positioning with a ball screw mechanism in the microdynamic range, along with its solution. We compared the characteristics of two ball screw mechanisms with different table masses. The experimental results showed that the vibration resulting from the low stiffness of the ball screw degraded the positioning performance in the microdynamic range for the heavyweight mechanism. The proposed nominal characteristic trajectory following (NCTF) controller was designed for ultra precision positioning of the ball screw mechanism. The basic NCTF control system achieved ultra precision positioning performance with the lightweight mechanism, but not with the heavyweight mechanism. A conditional notch filter was added to the NCTF controller to overcome this problem. Despite the differences in payload and friction, both mechanisms then showed similar positioning performance, demonstrating the high robustness and effectiveness of the improved NCTF controller with the conditional notch filter. The experimental results demonstrated that the improved NCTF control system with the conditional notch filter achieved ultra precision positioning with a positioning accuracy of better than 10 nm, independent of the reference step input height.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1990년도 한국자동제어학술회의논문집(국제학술편); KOEX, Seoul; 26-27 Oct. 1990
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• pp.1312-1315
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• 1990

Nanometer positioning control with high velocity and long stroke is discussed. A one-axis stage mechanism driven by an AC linear motor and guided by a rolling ball guide has been constructed. Coarse and fine position controls are designed by using nonlinear dynamics of the rolling guide. Switching from coarse positioning to fine positioning is studied.

• International Journal of Precision Engineering and Manufacturing
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• 제8권2호
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• pp.49-53
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• 2007

In this study, we investigated experimentally the potential of a planer positioning mechanism with three degrees of freedom using a flexure guide and an electromagnetic linear motor. The goal was to produce a multi-axis positioning system with nanometric resolution over a 1-mm stroke. An $X-Y-\theta$ stage was designed based on previous results from a single-axis prototype and was constructed with a flexure guide mechanism and voice coil motor type linear actuators. We examined the necessity of a driving method and control system to ensure high resolution for multi-axis positioning. Experiments were conducted to evaluate the performance, and the results confirmed the mechanism's potential; fine point-to-point (PTP) positioning was achieved over a 1-mm stroke, with a resolution of 2 nm for translation in X-Y and 0.01 asec for yaw in $\theta$.

• 한국정밀공학회지
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• 제15권11호
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• pp.76-82
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• 1998

In this study, the Ball screw and Servo motor Mechanism is considered as a High Speed Tool Feed System for the machining of a piston of a reciprocating engine. For the machining of a piston, that shapes oval, high speed servo mechanism is needed as a positioning of a cutting tool, and the stroke of tool is 0.1 mm ~ 1 mm. Ball screw and servo motor Mechanism is available very much because this mechanism is used widely in general machine. This Mechanism has been designed with the use of the decrease in mass and partial wear of the ball screw for high speed positioning of tool. Also the periodic learning control method with the inverse transfer function compensation has been applied to the positioning control for the high accuracy positioning of tool. These applications lead the achievement of the machining of a piston with an accuracy of 5${\mu}{\textrm}{m}$ at 2500 rpm in CNC turning.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2000년도 제15차 학술회의논문집
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• pp.429-429
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• 2000

Micro positioning mechanism is the key technology in many fields, such as scanning electron microscopy (SEM), x-ray lithography, mask alignment and micro-machining. In the paper, a 3DOF parallel-type micro-positioning mechanism is proposed. This mechanism uses piezo-actuators and Flexure hinge to control x, y and $\theta$ motion. It is shown both analytically and numerically that 2 DOF flexure hinge model was better precision than 1 DOF flexure hinge design.

• 한국정밀공학회지
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• 제22권9호
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• pp.130-136
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• 2005

This paper presents an optimal design and the performance evaluation of two-axis nano positioning stage with round notched flexure hinges. A flexure hinge mechanism with round notched flexure hinges is to guide the linear motions of a moving plate in the nano positioning stage. A Min-Max algorithm is applied to the design of the flexure hinge mechanism for nano positioning stage. In the design process, the structure of the flexure hinge mechanism is fixed, then the radius of a round hole and the width of two round holes are chosen as design variables, and finally the do sign variables are calculated by the Min-Max algorithm. The machined flexure hinge mechanism, stack type PZTs for actuation and capacitance type displacement sensors for position measurement are assembled into the nano positioning stage. The experimental results of the manufactured nano positioning stage show the first modal resonance frequency of 197 Hz, the operating range of 40 um, and the resolution of 3 nm.

• 한국정밀공학회지
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• 제21권11호
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• pp.99-109
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• 2004

This paper proposes precision evaluation method for the positioning error of three-DOF translational parallel mechanism. The proposed method uses conventional CMM as metrology equipment to measure the position of end-effector. In order to obtain accurate measurement data from CMM, the transform relationship between the coordinate system of the parallel mechanism and the CMM coordinate system must be identified. For this purpose, a new coordinate referencing (or coordinate system identification) technique is presented. By using this technique accurate coordinate transformation relationships are efficiently established. According to these coordinate transformation relationships, an equation to calculate error components at any arbitrary position of the end-effector is derived. In addition, mathematical fitting models to represent the position error components in the two-dimensional workspace of the parallel mechanism are also constructed based on response surface methodology. The proposed error evaluation method proves its effectiveness through the experimental results and its application to real three-DOF parallel mechanism.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.131-132
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• 2006

This paper presents a micro-positioning platform based on the unique parallel mechanism recently developed by the authors. The platform has a meso-scale rectangular shape whose size is $20{\times}23m$. The stroke is 5 mm for both the x- and y-axis and 100 degrees for the ${\alpha}$-axis(the rotational axis along the x-axis). The platform is actuated by the three sets of two-stage linear actuators: a linear motor for rough positioning and a piezo actuator for fine positioning. The platform is already assembled. Experimental results of the positioning measurements and control performance are presented.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1309-1314
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• 2003

The high precision positioning mechanism is used in various industrial fields. It is used in semiconductor manufacturing line, test instrument, Bioengineering, and MEMS and so on. This paper presents a positioning mechanism with dual servo system. Dual servo system consists of a coarse stage and a fine motion stage. The course stage is driven by VCM and the actuator of fine stage is the PZT. The purposes of dual servo system are stability, higher bandwidth, and robustness. Lead compensator is applied to this control system, and is designed by PQ method. Designed compensator can improve property of positioning mechanism.

• 제어로봇시스템학회논문지
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• 제15권9호
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• pp.881-886
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• 2009

This paper presents a manipulation system consisting of a coarse/fine XY positioning system and an out-of-plane manipulator. The object of the system is to conduct tine positioning and manipulation of micro parts. The fine stage and the out-of-plane manipulator have compliant mechanisms with flexure hinges, which are driven by stack-type piezoelectric elements. In the fine stage, the compliant mechanism plays the roles of motion guide and displacement amplification. The out-of-plane manipulator contains three piezo-driven compliant mechanisms for large working range and fine resolution. For large displacement, the compliant mechanism is implemented by a two-step displacement amplification mechanism. The compliant mechanisms are manufactured by wire electro-discharge machining for flexure hinges. Experiments demonstrate that the developed system is applicable to a fine positioning and fine manipulation of micro parts.