• Proceedings of the Korean Society of Precision Engineering Conference
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• 1993.10a
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• pp.243-248
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• 1993

New methodology for fiducial alignment is proposed to improve the alignment accuracy in wafer steppers. The positioning error is detected by PSD(Position Sensitive Detector)when 2-dimensional vernier patterns on a reticle on a reticle are projected on the fiducial marks of wafer stage. The width and period of vernier patterns are deter mined to get the highest S/N ratio for the exposure wavelength 248.4nm of KrF excimer laser. This new method has an advantage of higher accuracy and faster alignment over the conventional one.

• 제어로봇시스템학회:학술대회논문집
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• 2002.10a
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• pp.79.2-79
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• 2002

1. the principal of a PSD(Position Sensitive Detector) 2. the optical system of the proposed method 3. signal processing 4. experimental result A mechanical engineer experiment on the tension test. In this experiment, they use the extensometer which can measure the extended distance of material. A normal extensometer is the contact type which means that the extensometer should attached to the specimen. It is not convenient to the user. The contacting type can also effect the characteristic of the specimen. So a extensometer is changed from contacting type to non-contacting type. Non-contacting type is not necessary to attach the extensometer to the specimen...

• 제어로봇시스템학회:학술대회논문집
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• 2000.10a
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• pp.50-50
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• 2000

In this paper, a new measuring system is :proposed which can measure the fine 6-DOF displacement of rigid bodies. Its measurement principle is based on detection of laser beam reflected from a specially fabricated mirror that looks like a triangular pyramid having an equilateral cross-sectional shape. The mirror has three lateral reflective surfaces inclined 45$^{\circ}$ to its bottom surface. We call this mirror 3-facet mirror. The 3-facet mirror is mounted on the object whose 6-DOF displacement is to be measured. The measurement is operated by a laser-based optical system composed of a 3-facet mirror, a laser source, three position-sensitive detectors(PSD). In the sensor system, three PSDs are located at three corner points of a triangular formation, which is an equilateral triangular formation tying parallel to the reference plane. The sensitive areas of three PSDs are oriented toward the center point of the triangular formation. The object whose 6-DOF displacement is to be measured is situated at the center with the 3-facet mirror on its top surface. A laser beam is emitted from the laser source located at the upright position and vertically incident on the top of the 3-fatcet mirror. Since each reflective facet faces toward each PSD, the laser beam is reflected at the 3-facet mirror and splits into three sub-beams, each of which is reflected from the three facets and finally arrives at three PSDs, respectively. Since each PSD is a 2-dimensional sensor, we can acquire the information on the 6-DOF displacement of the 3-facet mirror. From this principle, we can get 6-DOF displacement of any object simply by mounting the 3-facet mirror on the object. In this paper, we model the relationship between the 6-DOF displacement of the object and the outputs of three PSDs. And, a series of simulations are performed to demonstrate the effectiveness of the proposed method. The simulation results show that the proposed sensing system can be an effective means of obtaining 3-dimensional position and orientation of arbitrary objects.

• Proceedings of the KIEE Conference
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• 2006.10c
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• pp.582-584
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• 2006

This paper describes a monocular PSD-based motion capture sensor to employ with commercial video game systems such as Microsoft's XBOX and Sony's Playstation II. The system compact, low-cost, and only requires a one-time calibration at the factory. The system includes a PSD(Position Sensitive Detector) and active infrared (IR) LED markers that are placed on the object to be tracked. The PSD sensor is placed in the focal plane of a wide-angle lens. The micro-controller calculates the 3D position of the markers using only the measured intensity and 2D position on the PSD. A series of experiments were performed to evaluate the performance of our prototype system. From the experimental results we see that the proposed system's compact size, low-cost, ease of installation, and high frame rates are suitable for high speed motion tracking in games.

• Proceedings of the IEEK Conference
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• 2008.06a
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• pp.1025-1026
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• 2008

This paper describes a monocular PSD-based motion capture sensor to employ with commercial video game systems such as Microsoft's XBOX and Sony's Playstation II. The system includes a PSD(Position Sensitive Detector) and active infrared (IR) LED markers that are placed on the object to be tracked. The micro-controller calculates the 3D position of the markers using only the measured intensity and the 2D position on the PSD. A series of experiments were performed to evaluate the performance of our prototype system. From the experimental results we see that the proposed system has the advantages of the compact size, the low cost, the easy installation, and the high frame rates to be suitable for high speed motion tracking in games.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.10 no.10
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• pp.1897-1904
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• 2006

Home service robot must recognize and build map for indoor and components of the house such as furniture and chair etc. The previous researcher has developed a indoor map building system by using CCD camera and ultra sonic sensor. %no stems have some problem in such a way that (1) a distun resolution can be changed according to the number of pixel when we use a CCD camera system, (2) a measured distance can be decreased when it transmitted to the rubber because of being absorbed the sound energy. This paper represents an intelligent sensor controller of module has been developed by using optic PSD(Position Sensitive Detector) sensor any at a low price. To deduce the switching noise from beam power module and diffused reflection noise, we proposed a heuristic soft filter. The performance of the developed system was compared with ultra sonic sensor system by detecting the indoor wall environment. Some experiments were illustrated for the validity of the developed system.

• Korean Journal of Optics and Photonics
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• v.22 no.3
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• pp.151-158
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• 2011

This paper reports design and demonstration of optical systems for reflective-type remote optical displacement sensors. Optical systems for light illumination sources and a position sensitive detector (PSD) for the displacement sensor were developed to sense displacement of bridges and instability of skyscrapers in a distance range from 10 m to 250 m to an accuracy better than a few mm. Performance of the optical systems was verified by composing a displacement sensor and by using it in measurement of displacement of a remote target with proper reflective optics depending on distance. The displacement sensor was composed of two LED light sources, each with collimating optics, and a two-dimensional PSD with telescope-type optics. Its displacement resolutions was measured to be 0.1 mm at a distance of 10 m and less than 3 mm at a distance of 250 m.

• Journal of radiological science and technology
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• v.35 no.4
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• pp.315-319
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• 2012

The aim of this study was to develop a signal process circuit for a position sensitive avalanche photodiode detector. The circuit parts consisted of amplification, differential and peak/hold circuit. This research was the baseline to develop highly compact radiation detector. The signal was amplified by an amplification chip and its shape was changed in a differential circuit to minimize the pulse tailing. The peak/hold circuit detect the peak of the signal from the differential circuit and hold the amplitude of the peak for data acquisition. In order to test the intrinsic function of the circuit, the input signal was transmitted from a commercial pulse generator.

• Nuclear Engineering and Technology
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• v.54 no.2
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• pp.601-607
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• 2022

In recent years, monitoring of spent nuclear fuel inside dry cask storage has become an important area of national security. Muon tomography is a useful method for monitoring spent nuclear fuel because it uses high energy muons that penetrate deep into the target material and provides a 3-D structure of the inner materials. We designed a muon tomography system consisting of four 2-D position sensitive detector and characterized and optimized the system parameters. Each detector, measuring 200 × 200 cm², consists of a plastic scintillator, wavelength shifting (WLS) fibers and, SiPMs. The reconstructed image is obtained by extracting the intersection of the incoming and outgoing muon tracks using a Point-of-Closest-Approach (PoCA) algorithm. The Geant4 simulation was used to evaluate the performance of the muon tomography system and to optimize the design parameters including the pixel size of the muon detector, the field of view (FOV), and the distance between detectors. Based on the optimized design parameters, the spent fuel assemblies were modeled and the line profile was analyzed to conduct a feasibility study. Line profile analysis confirmed that muon tomography system can monitor nuclear spent fuel in dry storage container.

• Nuclear Engineering and Technology
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• v.55 no.9
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• pp.3133-3139
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• 2023

Neutron imaging technology as a means of non-destructive detection of materials is complementary to X-ray imaging. Silicon photomultiplier (SiPM), a new type of optical readout device, has overcome some shortcomings of traditional photomultiplier tube (PMT), such as high-power consumption, large volume, high price, uneven gain response, and inability to work in strong magnetic fields. Its application in the field of neutron detection will be an irresistible general trend. In this paper, a thermal neutron imaging detector based on ⁶LiF/ZnS scintillation screen and SiPM array readout was developed. The design of the detector geometry was optimized by geant4 Monte Carlo simulation software. The optimized detector was evaluated with a step wedge sample. The results show that the detector prototype with a 48 mm × 48 mm sensitive area can achieve about 38% detection efficiency and 0.26 mm position resolution when using a 300 ㎛ thick ⁶LiF/ZnS scintillation screen and a 2 mm thick Bk7 optical guide coupled with SiPM array, and has good neutron imaging capability. It provides effective data support for developing high-performance imaging detectors applied to the China Spallation Neutron Source (CSNS).