• Korean Journal of Materials Research
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• v.29 no.11
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• pp.709-714
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• 2019

In order to observe the microstructure and morphology of porous titanium -oxide thin film, deposition is performed under a higher Ar gas pressure than is used in the general titanium thin film production method. Black titanium thin film is deposited on stainless steel wire and Cu thin plate at a pressure of about 12 Pa, but lustrous thin film is deposited at lower pressure. The black titanium thin film has a larger apparent thickness than that of the glossy thin film. As a result of scanning electron microscope observation, it is seen that the black thin film has an extremely porous structure and consists of a separated column with periodic step differences on the sides. In this configuration, due to the shadowing effect, the nuclei formed on the substrate periodically grow to form a step. The surface area of the black thin film on the Cu thin plate changes with the bias potential. It has been found that the bias of the small negative is effective in increasing the surface area of the black titanium thin film. These results suggest that porous titanium-oxide thin film can be fabricated by applying the appropriate oxidation process to black titanium thin film composed of separated columns.

• Journal of Sensor Science and Technology
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• v.26 no.3
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• pp.186-191
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• 2017

In this study, we investigated the simultaneous detection properties of organic vapor, pressure difference, and magnetic field using a single rugate-structured free-standing porous silicon (RFPS) thin film. Both the wavelength and the intensity of the rugate peaks were changed in the reflectivity spectrum measured at the thin film surface while the organic vapor was exposed to the RFPS thin film. However, when the pressure difference and the magnetic field were exposed to the film, only the rugate peak intensity was changed. Therefore, it is possible to distinguish whether or not the organic vapor is detected by simultaneously changing the rugate peak wavelength and intensity. In addition, a method of distinguishing between the pressure difference and the magnetic field detection signal has been derived by rapidly modulating the direction of the magnetic field. This study shows that it is possible to simultaneously detect and distinguish various objects using a single RFPS thin film, and it is found that porous silicon can be utilized as a sensor sufficiently.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.23 no.8
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• pp.651-654
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• 2010

This paper describes the thermal and mechanical properties of doped thin film 3C-SiC and porous 3C-SiC. In this work, the in-situ doped thin film 3C-SiC was deposited by using atmospheric pressure chemical vapor deposition (APCVD) method at $120^{\circ}C$ using single-precursor hexamethyildisilane: $Si_2(CH_3)_6$ (HMDS) as Si and C precursors. 0~40 sccm $N_2$ gas was used as doping source. After growing of doped thin film 3C-SiC, porous structure was achieved by anodization process with 380 nm UV-LED. Anodization time and current density were fixed at 60 sec and 7.1 mA/$cm^2$, respectively. The thermal and mechanical properties of the $N_2$ doped porous 3C-SiC was measured by temperature coefficient of resistance (TCR) and nano-indentation, respectively. In the case of 0 sccm, the variations of TCR of thin film and porous 3C-SiC are similar, but TCR conversely changed with increase of $N_2$ flow rate. Maximum young's modulus and hardness of porous 3C-SiC films were measured to be 276 GPa and 32 Gpa at 0 sccm $N_2$, respectively.

• Journal of Sensor Science and Technology
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• v.18 no.4
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• pp.307-310
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• 2009

This paper describes the formation of porous 3C-SiC by anodization. 3C-SiC thin films were deposited on p-type Si(100) substrates by APCVD using HMDS(Hexamethyildisilane: $Si_2(CH_3)_6$). UV-LED(380 nm) was used as a light source. The surface morphology was observed by SEM and the pore size was increased with increase of current density. Pore diameter of 70 $\sim$ 90 nm was achieved at 7.1 mA/cm$^2$ current density and 90 sec anodization time. FT-IR was conducted for chemical bonding of thin film and porous 3C-SiC. The Si-H bonding was observed in porous 3C-SiC around wavenumber 2100 cm$^{-1}$. PL shows the band gap enegry of thin film(2.5 eV) and porous 3C-SiC(2.7 eV).

• Korean Journal of Materials Research
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• v.22 no.1
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• pp.1-7
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• 2012

Thin film electrode consisting purely of porous anodic tin oxide with well-defined nano-channeled structure was fabricated for the first time and its electrochemical properties were investigated for application to an anode in a rechargeable lithium battery. To prepare the thin film electrode, first, a bi-layer of porous anodic tin oxides with well-defined nano-channels and discrete nano-channels with lots of lateral micro-cracks was prepared by pulsed and continuous anodization processes, respectively. Subsequent to the Cu coating on the layer, well-defined nano-channeled tin oxide was mechanically separated from the specimen, leading to an electrode comprised of porous tin oxide and a Cu current collector. The porous tin oxide nearly maintained its initial nano-structured character in spite of there being a series of fabrication steps. The resulting tin oxide film electrode reacted reversibly with lithium as an anode in a rechargeable lithium battery. Moreover, the tin oxide showed far more enhanced cycling stability than that of powders obtained from anodic tin oxides, strongly indicating that this thin film electrode is mechanically more stable against cycling-induced internal stress. In spite of the enhanced cycling stability, however, the reduction in the initial irreversible capacity and additional improvement of cycling stability are still needed to allow for practical use.

• Transactions on Electrical and Electronic Materials
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• v.15 no.6
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• pp.305-308
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• 2014

Organosilyl-modified and star-shaped poly (${\varepsilon}$-caprolactone) (m-PCL) was prepared, and added to polymethylsilsesquioxane (PMSSQ), to make composites. The end groups of m-PCL are chemically similar to PMSSQ, and m-PCL mixed well with PMSSQ in the composite. Porous PMSSQ film was made by further calcination of the composite film at elevated temperature. m-PCL-templated PMSSQ and the as-prepared porous PMSSQ were structurally, optically, and thermally characterized in thin films. The chemical binding of m-PCL and PMSSQ effectively suppressed the phase separation of PMSSQ and m-PCL during the curing process. After calcination at elevated temperature, there remained many pores in the PMSSQ matrix. The refractive indices of the resulting porous PMSSQ thin films decreased with increase of the film porosities, depending on the initial m-PCL loadings.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.45-45
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• 2009

This paper describes the formation of porous 3C-SiC by anodization. 3C-SiC thin films were deposited on p-type Si(100) substrates by APCVD using HMDS (Hexamethyildisilane: $Si_2(CH_3)_6$). UV-LED(380 nm) was used as a light source. The surface morphology was observed by SEM and the pore size was increased with increase of current density. Pore diameter of 70 ~ 90 nm was achieved at 7.1 $mA/cm^2$ current density and 90 sec anodization time. FT-IR was conducted for chemical bonding of thin film and porous 3C-SiC. The Si-H bonding was observed in porous 3C-SiC around wavenumber 2100 $cm^{-1}$. PL shows the band gap enegry of thin film (2.5 eV) and porous 3C-SiC (2.7 eV).

• International Journal of Air-Conditioning and Refrigeration
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• v.14 no.2
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• pp.66-75
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• 2006

The effect of antifreeze solution liquid film on the frost prevention is experimentally investigated. It is desirable that the antifreeze solution spreads widely on the heat exchanger surface forming thin liquid film to prevent frost nucleation while having small thermal resistance across the film. A porous layer coating technique is adopted to improve the wettability of the antifreeze solution on a parallel plate heat exchanger. The antifreeze solution spreads widely on the heat exchanger surface with $100{\mu}m$ thickness by the capillary force resulted from the porous structure. It is observed that the antifreeze solution liquid film prevents a parallel plate heat exchanger from frosting. The reductions of heat and mass transfer rate caused by the thin liquid film are only $1{\sim}2%$ compared with those for non-liquid film surface.

• International Journal of Air-Conditioning and Refrigeration
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• v.13 no.2
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• pp.99-106
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• 2005

Falling film heat transfer has been widely used in many applications in which heat and mass transfer occur simultaneously, such as evaporative coolers, cooling towers, absorption chillers, etc. In such cases, it is desirable that the falling film spreads widely on the surface to form a thin liquid film to enlarge contact surface and to reduce the thermal resistance across the film and/or the flow resistance to the vapor stream over the film. In this respect, hydrophilic treatment of the surface has been tried to improve the surface wettability by decreasing the contact angle between the liquid and the surface. However, the hydrophilic treatment was found not very effective to increase the surface wettedness of inclined surfaces, since the liquid flow forms rivulet patterns instead of a thin film as it flows down the inclined surface and accelerates gradually by the gravity. In this work, a novel method is suggested to improve the surface wettedness enormously. In this work, the surface is treated to have a thin hydrophilic porous layer on the surface. With this treatment, the liquid can spread widely on the surface by the capillary force resulting from the porous structure. In addition to this, the liquid can be held within the porous structure to improve surface wettedness regardless of the surface inclination. The experiment on the evaporative cooling of inclined surfaces has been conducted to verify the effectiveness of the surface treatment. It is measured that the latent heat transfer increases almost by $80\%$ at the hydrophilic porous layer coated surface as compared with the untreated surface.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.17 no.1
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• pp.25-32
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• 2005

Falling film heat transfer has been widely used in many applications in which heat and mass transfer occur simultaneously, such as evaporative coolers, cooling towers, absorption chillers, etc. In such cases, it is desirable that the falling film spreads widely on the surface forming thin liquid film to enlarge contact surface and to reduce the thermal resistance across the film and/or the flow resistance to the vapor stream over the film. In this work, the surface is treated to have thin porous layer on the surface. With this treatment, the liquid can be spread widely on the surface by the capillary force resulting from the porous structure. In addition to this, the liquid can be held within the porous structure to improve surface wettedness regardless of the surface inclination. The experiment on the evaporative cooling of an inclined surface has been conducted to verify the effectiveness of the surface treatment. It is measured that the evaporative heat transfer increases about $50\%$ by the porous layer treatment as compared with that from orignal bare surfaces.