• ETRI Journal
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• v.26 no.3
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• pp.281-284
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• 2004

We demonstrate a new fabrication method for adjusting the temperature dependence of a polymeric arrayed-waveguide grating (AWG) on a Si substrate. A temperature-dependent wavelength shift of-0.1nm/$^{\circ}C$ in a polymeric AWG on a Si substrate is reduced of+0.1nm/$^{\circ}C$ by detaching part of the polymer film, including the grating channel region of the AWG, from the Si substrate while the other parts remain fixed on the substrate.

• Macromolecular Research
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• v.12 no.5
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• pp.437-442
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• 2004

We have fabricated a polymeric waveguide by using a hot embossing technique and have investigated its propagation loss. The replication of waveguide channels through the use of a hot embossing technique is of interest as a single-step process that could deliver surface roughnesses far smaller than the wavelength. We have evaluated experimentally that the sidewall roughness has a dominant effect on insertion losses of the multimode polymeric waveguide. The propagation loss of the waveguide decreased dramatically upon decreasing the sidewall roughness of the channel. We have confirmed that the preparation of waveguides having nanometer-scale sidewall roughness and 0.1 dB/cm propagation loss is possible when using the hot embossing technique.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.27 no.6
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• pp.997-1006
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• 2003

LICA technique evolved as a basic fabrication process fur micro-structure. The present report deals with the basic technological features in the sequence of the LIGA technique such as deep x-ray lithography(DXRL), electroplating, and moulding processes at Pohang Light Source (PLS). We designed 3-D structured master for fabrication of polymeric optical wavegude and manufactured polymeric optical wavegude with the same using hot embossing process. Polymeric optical waveguide could be produced with ${\pm}$ 1 $\mu\textrm{m}$ accuracy and good surface roughness.

• ETRI Journal
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• v.18 no.4
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• pp.287-299
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• 1997

Integrated-optic polarization controlling devices such as polarizers, polarization splitters, and polarization converters, are proposed and demonstrated in nonlinear optic polymers. Poling-induced birefringence in electro-optic polymers is exploited to fabricate the devices. The polymeric waveguide polarizers show low excess losses, and extinction ratios of 20.7 dB and 17.1 dB for TM-pass and TE-pass polarizers, respectively. The polymeric waveguide polarization splitters exhibit TE-TM mode splittings with crosstalk of 14.2 dB and 10.1 dB for TM and TE mode splittings, respectively. The polymeric waveguide polarization converters show successful TE/TM polarization mode conversion with conversion efficiencies of higher than 30 dB. The device employs poling-induced waveguides which have slowly rotating azimuth angle of optic axis along the light propagation direction. The novel polarization converter is insensitive to wavelength and easier to fabricate than the other polarization converters containing periodic structures.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.945-949
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• 2003

LIGA(Lithographie Galvanoformung Abformung), a fabrication method for the production of microstructrues with a high aspect ratio, is now playing an important role in a fabrication of polymeric optical waveguide device as the replication processes have been developed such as hot embossing and injection molding. The present report deals with the fabrication of Ni master used for the replication of multi-mode polymeric optical waveguide. With the basic technological features in the sequence of the LIGA technique, we fabricated Ni master with 12 channel microstructures of $100\;{\times}\;100{\mu}m\;^2{\times}\;60mm$, and achieved an accuracy of ${\pm}1\;{\mu}m$. Manufactured polymeric optical wavegude with the same using hot embossing process has also the same accuracy and approved its mass production capability.

• Current Optics and Photonics
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• v.3 no.5
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• pp.401-407
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• 2019

Polymeric optical waveguide devices with Bragg gratings have been investigated, for implementing tunable lasers and wavelength filters used in wavelength-division-multiplexed optical communication systems. Owing to the excellent thermo-optic effect of these polymers, wavelength tuning is possible over a wide range, which is difficult to achieve using other optical materials. In this study the phase-mask technology, which has advantages over the conventional interferometeric method, was introduced to facilitate the fabrication of Bragg gratings in polymeric optical waveguide devices. An optical setup capable of fabricating multiple Bragg gratings simultaneously on a 4-inch silicon wafer was constructed, using a 442-nm laser and phase mask. During fabrication, some of the diffracted light in the phase mask was totally reflected inside the mask, which affected the quality of the Bragg grating adversely, so experiments were conducted to solve this issue. To verify grating uniformity, two types of wavelength-filtering devices were fabricated using the phase-mask lithography, and their reflection and transmission spectra were measured. From the results, we confirmed that the phase-mask method provides good uniformity, and may be applied for mass production of polymer Bragg-grating waveguide devices.

• Journal of the Microelectronics and Packaging Society
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• v.22 no.3
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• pp.73-77
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• 2015

This paper presents integrated polymeric spectrometer module which offers compact size, easily-fabricated structure and low cost. The proposed spectrometer module includes the nano diffraction grating with non-uniform pitch and planar optical waveguide with concave mirror to be fabricated by UV imprint lithography. To increase the reflection efficiency, we designed the nano diffraction grating with triangular profiles. The polymeric planar spectrometer includes a spectral bandwidth of 700 nm, resolution of 10 nm and precision below 5 nm. This polymeric planar spectrometer is well-suited for sensor system.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1998.06a
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• pp.247-251
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• 1998

This work presents the analysis of $1\times2$ polymer waveguide thermo-optic switch using asymmetric Y-splitter at the wavelength of 1300nm. Because of the high thermo-optic coefficient of polymeric materials the design of efficient switches were feasible. For the numerical simulation of these switches the finite difference beam propagation method has been employed. Design rules for a $1\times2$ polymeric switch have been defined by using the numerical techniques.

• Proceedings of the Optical Society of Korea Conference
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• 1996.09a
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• pp.86-86
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• 1996

• Korean Journal of Optics and Photonics
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• v.17 no.1
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• pp.54-59
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• 2006

Biophotonic sensors based on polymer waveguide with Bragg reflection grating are demonstrated in this work. Waveguide Bragg reflectors were designed by using the effective index method and the transmission matrix method. The grating pattern was formed by exposing the laser interference pattern on a photoresist. On top of the inverted rib waveguide, the Bragg reflection grating was inscribed by the O2 plasma etching. In order to perform the bio-molecule detection experiment, a calixarene molecule was self-assembled on top of thin Au film deposited on the waveguide Bragg reflector. To measure the response of the sensor, several PBS solutions with different concentrations of potassium ion from 1 pM to $100\;{\mu}M$ were dropped on the sensor surface. The shift of Bragg reflection wavelength was observed from the fabricated sensor device, which was proportional to the concentration of potassium ion ranging from 1 pM to 108 pM.