• Macromolecular Research
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• 제12권1호
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• pp.134-140
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• 2004

Semi-crystalline poly(ethylene terephthalate) (PET) film surfaces were modified with argon and oxygen plasmas by radio-frequency (RF) glow discharge at 240 mTorr/40 W; the changes in topography and surface structure were investigated by atomic force microscopy (AFM) in conjunction with specular reflectance of infrared microspectroscopy (IMS). Under our operating conditions, analysis of the AFM images revealed that longer plasma treatment results in significant ablation on the film surface with increasing roughness, regardless of the kind of plasma used. The basic topographies, however, were different depending upon the kind of gas used. The specular reflectance analysis showed that the ablative mechanisms of the argon and oxygen plasma treatments are entirely different with one another. For the Ar-plasma-treated PET surface, no observable difference in the chemical structure was observed before and after plasma treatment. On the other hand, the oxygen-plasma-treated PET surface displays a significant decrease in the number of aliphatic C-H groups. We conclude that a constant removal of material from the PET surface occurs when using the Ar-plasma, whereas preferential etching of aliphatic C-H groups, with respect to, e.g. , carbonyl and ether groups, occurs upon oxygen plasma.

• 한국광학회지
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• 제8권3호
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• pp.245-249
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• 1997

본 논문에서는 모드 결합을 최적화하기 위해 수정된 결합 영역을 갖는 전기광학 폴리머 디지탈 광스위치를 제작하였다. 분기형 도파로는 반응이온식각 방법을 이용하여 만들었다. 그리고, 수정된 결합 영역은 두 광도파로의 분기점에서부터 광파의 진행 방향을 따라 점진적으로 도입하였으며, 소자 제작 이후에 광표백 방법을 이용하여 구현하였다. 분기 영역에서 두 도파로 간의 모드 결합이 최적화 되도록 수정된 결합 영역의 구조와 굴절률 분포를 조절함으로써, 소자의 길이가 고정되어 있는 상태에서 스위칭 성능을 향상시켰다. 측정 결과에 의하면, 구동 전압은 약 30%이상 감소되었으며 누화는 4~6 dB정도 개선되었다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2008년도 춘계학술대회 논문집
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• pp.285-287
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• 2008

AAO(Anodic Aluminum Oxidation) method has been known that it is practically useful for the fabrication of nano-structures and makes it possible to fabricate the highly ordered nano masters on large surface and even on the 2.5 or 3D surface at low cost comparing to the expensive e-beam lithography or the conventional silicon processing. In this study, by using the multi-step anodizing and etching processes, highly ordered nano patterned master with concave shapes was fabricated. By varying the processing parameters, such as initial matter and chemical conditions; electrical and thermal conditions; time scheduling; and so on, the size and the pitch of the nano pattern can be controlled. Consequently, various alumina/aluminum nano structures can be easily available in any size and shape by optimized anodic oxidation in various aqueous acids. In order to replicate nano patterned master, the resulting good filled uniform nano molded structure through electro-forming process shows the validity of the fabricated nano pattern masters.

• 한국레이저가공학회지
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• 제11권2호
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• pp.26-32
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• 2008

Micro lens array (MLA) is widely used in information technology (IT) industry fields, for examples such as a projection display, an optical power regulator, a micro mass spectrometer and for medical appliances. Recently, MLA have been fabricated and developed by using a reflow method, micro etching, electroplating, micromachining and laser local heating. Laser local thermal-expansion (LLTE) technology demonstrates the formation of microdots on the surface of polymer substrate, in this paper. We have also investigated the new direct fabrication method of placing the MLA on the surface of a SU-8 photoresist layer. We have obtained the 3D shape of the micro lens processed by UV laser irradiation and have experimentally verified the optimal process conditions.

• Journal of Industrial and Engineering Chemistry
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• 제68권
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• pp.387-392
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• 2018

Various technical approaches and concepts have been proposed to develop conductive super-hydrophobic (SH) surfaces. However, most of these approaches are not usable in practical applications because of insufficient adhesion and cost issues. Additionally, durability and uniformity issues are still in need of improvement. The goal of this research is to produce a large-area conductive SH surface with improved adhesion performance and uniformity. To this end, carbon nanotubes (CNT) with a high aspect ratio and elastomeric polymer were utilized as a conductive filler and matrix, respectively, to form a coating layer. Additionally, nanoscale silica particles were utilized for stable implementation of the conductive SH surface. To improve the adhesion properties between the SH coating layer and substrate, pretreatment of the substrate was conducted by utilizing both wet and dry etching processes to create specific organic functional groups on the substrate. Following pretreatment of the surface, a zirco-aluminate coupling agent was utilized to enhance adhesion properties between the substrate and the SH coating layer. Raman spectroscopy revealed that adhesion was greatly improved by the formation of a chemical bond between the substrate and the SH coating layer at an optimal coupling agent concentration. The developed conductive SH coating attained a high electromagnetic interference (EMI) shielding effectiveness, which is advantageous in self-cleaning EMI shielding applications.

• 전기학회논문지P
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• 제67권4호
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• pp.214-220
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• 2018

Light sources induced by gas discharge using rare gases have been widely used in the thin film deposition, the surface modification and the polymer etching. A dielectric barrier discharge (DBD) has been developed in order to consistently emit light and control the wavelength of the emission light. However, much research on the characteristics of the movement of discharge particles is required to improve the efficiency of the light lamp and the life-time of the light apparatus in detail. In this paper, we developed a He DBD discharge simulation tool and investigated the characteristics of discharge particles which were electrons, two positive ions ($He^+$, $He_2^+$) and 5 excited particles ($He^*(1S)$, $He^*(3S)$, $He^*$, $He^{**}$, $He^{***}$). The discharge currents showed the transition from pulse mode to continuous mode with the increase of power. With the accumulated charges on the barrier walls, the discharge current was rapidly increased and caused oscillation of the discharge voltage. As the gas pressure increased, $He_2^+$ and $He^*(3S)$ became the dominant activated particles. The input power was mostly consumed by electrons and $He_2^+$ ion. And the change curve showed that power consumption by electrons increased more with gas pressure than with source voltage or frequency.

• Design & Manufacturing
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• 제15권4호
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• pp.57-64
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• 2021

In recent materials industry, researches on the technology to manufacture super hydrophobic surface by effectively controlling the wettability of solid surface are expanding. Research on the fabrication of super hydrophobic surface has been studied not only for basic research but also for self-cleaning, anti-icing, anti-friction, flow resistance reduction in construction, textile, communication, military and aviation fields. A super hydrophobic surface is defined as a surface having a water droplet contact angle of 150 ° or more. The contact angle is determined by the surface energy and is influenced not only by the chemical properties of the surface but also by the rough structure. In this paper, maskless lithography using DMD, electro etching, anodizing and hot embossing are used to make the polymer resin PMMA surface super hydrophobic. In the fabrication of microstructure, DMDs are limited by the spacing of microstructure due to the structural limitations of the mirrors. In order to overcome this, maskless lithography using a transfer mechanism was used in this paper. In this paper, a super hydrophobic surface with micro and nano composite structure was fabricated. And the wettability characteristics of the micro pattern surface were analyzed.

• Korean Chemical Engineering Research
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• 제52권3호
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• pp.382-387
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• 2014

본 연구에서는 PC/ABS 블렌드를 고속전단성형법을 사용하여 제조하였고 스크류 회전속도와 전단부하시간을 공정 변수로 하여 이에 따른 블렌드의 모폴로지 변화를 분석하였다. 블렌드의 모폴로지 및 ABS 분산상의 크기를 주사전자현미경으로 관찰하여 안정한 상 구조와 최적의 물성을 가지는 고속전단성형조건을 확립하였고, 전단응력에 의한 블렌드의 열화 현상을 알아보기 위해 기계적 물성의 변화를 측정하였다. 이 때, 스크류 회전속도는 500 rpm에서 3000 rpm까지 변화시켰으며 전단부하시간은 10초에서 40초까지 주었다. 고속전단성형법을 사용하여 제조한 PC/ABS 블렌드 및 고속전단성형을 가하지 않은PC/ABS 컴파운드의 분산상 크기를 명확하게 관찰하기 위하여 블렌드의 단면에 크롬산 수용액을 이용한 에칭공정을 시행하였고 공정 전후의 모폴로지를 비교 분석하였다. 에칭으로 생긴 블렌드 내의 ABS 홀을 이미지 측정 프로그램인 Image J를 이용하여 측정한 결과, 스크류 회전속도에 따라 그 크기가 감소하였으며 특히 1000 rpm 이상의 스크류 회전속도 하에서 제조된 PC/ABS 블렌드의 경우, 기계적 물성이 급격하게 감소하여 블렌드의 분해가 일어났음을 알 수 있었다. 결과적으로 PC/ABS 블렌드에 1000 rpm의 스크류 회전속도를 가한 경우, 나노미터 단위의 분산상을 가지며 가장 안정한 상구조를 관찰할 수 있었고 인장강도 및 신율도 상대적으로 높아서 PC/ABS 블렌드의 최적 고속전단성형조건이라 할 수 있다.

• 마이크로전자및패키징학회지
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• 제12권4호통권37호
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• pp.275-280
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• 2005

나노 임프린트 (NIL)와 포토 리소그라피를 접목시킨 combined nanoimprint and photolithography (CNP) 기술을 이용하여 나노 미세 패턴을 형성하였다. 일반적인 UV-NIL 스탬프의 양각 패턴 위에 Cr 금속막을 입힌 hybrid mask mold (HMM)을 E-beam writing과 plasma etching으로 제작하였다. HMM 전면에는 친수성 물질인 $SiO_2$를 코팅하여 점착방지막 역할의 self-assembled monolayer(SAM) 형성을 용이하게 함으로써 HMM과 transfer layer의 분리를 용이하게 하여 패턴 손상을 억제하였다. 또한, transfer layer에는 일반적인 monomer resin 대신에 건식 에칭에 대한 저항력이 높은 negative PR을 사용하였다. Photo-mask 역할을 하는 HMM의 Cr 금속막이 UV를 차단하여 잔류하게 되는 PR의 비경화층(unexpected residual layer)은 간단한 현상 공정으로 제거하여 PR 잔류층이 없는 나노 미세 패턴을 transfer layer에 형성하였다.

• 폴리머
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• 제37권3호
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• pp.316-322
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• 2013

본 연구에서는 고분자 소재 중 하나인 폴리(에틸렌 테레프탈레이트)(poly(ethylene terephthalate), PET) 필름의 표면을 친수성으로 개질하기 위하여 기상 불소화 및 초음파 수세를 실시하였다. 표면 처리된 PET 필름의 표면 특성은 접촉각, 표면 자유에너지, 주사전자 현미경(FE-SEM), 원자간력 현미경(AFM), X선 광전자분석법(XPS)을 통하여 분석하였다. 직접 불소화 및 초음파 수세 처리된 PET 필름의 물 접촉각은 $10.8^{\circ}$으로 미처리된 PET에 비하여 85% 감소하였고, 총 표면 자유에너지는 $42.25mNm^{-1}$으로 미처리된 PET에 비하여 650% 증가하였다. 또한 RMS(root mean square) 거칠기는 1.965 nm로 미처리된 PET 필름에 비하여 348% 증가하였으며, 친수성 관능기인 C-OH 결합의 농도는 약 3배 가까이 증가하였다. 이는 직접 불소화 및 초음파 수세 처리된 PET 필름 표면에 형성된 친수성 관능기와 공동화 현상에 의한 화학적 식각 반응에서 기인한 것으로 생각된다. 이 결과로부터, 기상 불소화 및 초음파 수세 처리법은 PET 필름 표면을 친수성으로 쉽게 개질할 수 있는 효과적인 방법으로 기대된다.