• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.151-154
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• 2001

The pneumatic vibration isolation systems have been widely used in industry and laboratories, but the full mathematical analysis and nonlinear modeling techniques have not been reported yet, even while the nonlinear features of the pneumatic vibration isolation system decide the main characteristics. For instance, the orifice in a pneumatic vibration isolator has been traditionally considered as a simple viscous damper, which was too much simplified to explain the performance of the isolation system. In this paper, the nonlinear characteristics are considered for the orifice and chamber, etc. The numerical simulation is carried out by the MATLAB/Simulink software. From the analysis result, a clear trend of the nonlinear features is shown: the vibration transmissibility changes not only due to the excitation frequency but also due to the amplitude of the vibration excitation. Therefore various design parameters are optimally chosen for the vibration isolation system. The proposed methods show good compatibility between the analysis results and the experiments.

• 한국소음진동공학회논문집
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• 제23권10호
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• pp.909-919
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• 2013

Pneumatic exciters can be good replacements of electrodynamic, piezoelectric and hydraulic exciters owing to simple structure and large exciting force. One problem to be solved is a slow response caused by compressibility of air. Desirable frequency response characteristics of exciter are constant magnitude and zero degree phase, because users want no time delay between input signal and output force. For this reason, frequency range of pneumatic exciters is limited about 0~1 Hz. Therefore, expansion of frequency range is an important issue when designing the pneumatic exciter. In this paper, the pneumatic exciter which has same structure with active pneumatic isolator is dealt with. The dynamic characteristics are presented, and its limitation of expanding frequency range is shown based on analytical studies. Then the pneumatic exciter with dual-chamber is suggested to overcome this problem. Based on simulation study, a design method is presented.

• 한국소음진동공학회논문집
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• 제18권1호
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• pp.110-122
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• 2008

Pneumatic vibration isolator typically consisting of dual-chamber pneumatic springs and a rigid table are widely employed for proper operation of precision instruments such as optical devices or nano-scale equipments owing to their low stiffness- and high damping-characteristics. As environmental vibration regulations for precision instruments become more stringent, it is required to improve further the isolation performance. In order to facilitate their design optimization or active control, a more accurate mathematical model or complex stiffness is needed. Experimental results we obtained rigorously for a dual-chamber pneumatic spring exhibit significantly amplitude dependent behavior, which cannot be described by linear models in earlier researches. In this paper, an improvement for the complex stiffness model is presented by taking two major considerations. One is to consider the amplitude dependent complex stiffness of diaphragm necessarily employed for prevention of air leakage. The other is to employ a nonlinear model for the air flow in capillary tube connecting the two pneumatic chambers. The proposed amplitude-dependent complex stiffness model which reflects dependency on both frequency and excitation amplitude is shown to be very valid by comparison with the experimental measurements. Such an accurate nonlinear model for the dual-chamber pneumatic springs would contribute to more effective design or control of vibration isolation systems.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.737-738
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• 2013

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2007년도 춘계학술대회논문집
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• pp.97-102
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• 2007

As environmental vibration requirements on precision equipments get more stringent, use of pneumatic vibration isolators becomes more crucial and, hence, their dynamic performance needs to be further improved. Dynamic behavior of those pneumatic vibration isolation tables is very important to both manufacturer and customer as performance specifications. Together with conventional transmissibility, transient response characteristics are another critical performance index especially when movements of components, e.g., x-y tables, of the precision equipments are very dynamic. In this paper, analysis on transient response of a pneumatic vibration isolation table loaded by a mass moving on it is presented. This is a conventional dynamics problem on a rigid body with 6 degree of freedom and a mass with another degree of freedom. How to obtain transient responses of the isolation table is described when the movements of the mass are prescribed relative to the table.

• 한국소음진동공학회논문집
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• 제17권6호
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• pp.515-523
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• 2007

As environmental vibration requirements on precision equipments get more stringent, use of pneumatic vibration isolators becomes more crucial and, hence, their dynamic performance needs to be further improved. Dynamic behavior of those pneumatic vibration Isolation tables is very important to both manufacturer and customer as performance specifications. Together with conventional transmissibility, transient response characteristics are another critical performance index especially when movements of components, e.g., x-y tables, of the precision equipments are very dynamic. In this paper, analysis on transient response of a pneumatic vibration isolation table loaded by a mass moving on it is presented. This is a conventional dynamics problem on a rigid body with 6 degree of freedom and a mass with another degree of freedom. How to obtain transient responses of the isolation table is described when the movements of the mass are prescribed relative to the table.

• 한국소음진동공학회논문집
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• 제20권12호
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• pp.1128-1138
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• 2010

정밀 방진에서 전형적인 문제로 고하중으로 인한 저주파 공진 특성이 있다. 전자기 에어 스프징은 진동 제어 장치이자 능동형 방진 장치이다. 이 연구에서 전자기 에어 스프링은 반도체 생산을 위한 저주파 공진을 제거하는 것을 목적으로 한다. 능동형 방진 장치로 기계 및 전가 부분은 2.5톤의 하 중에 작동되도록 설계하였다. 전자기 스프링은 탄성 공압 챔버 내에 공기압을 이용하여 띄우고, 전자기 된 시스템에 의하면 공진 주파수 영역에서 제어 시간 및 최고 피크가 상당히 줄어들었고, 그 결과 피동형 시스템 상의 고유 진동에 의해 발생되는 공진을 피할 수 있음을 보였다.