• Title/Summary/Keyword: Plasma x-ray

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High-resolution Spectroscopy of the Nickel-like Molybdenum X-ray Laser Toward the Generation of Circularly Polarized X-ray Laser

  • Hasegawa, Noboru;Sasaki, Akira;Yamatani, Hiroshi;Kishimoto, Maki;Tanaka, Momoko;Ochi, Yoshihiro;Nishikino, Masaharu;Kunieda, Yuichi;Kawachi, Tetsuya;Yoneda, Hitoki;Iwamae, Atsushi
    • Journal of the Optical Society of Korea
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    • v.13 no.1
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    • pp.60-64
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    • 2009
  • We attempted the first measurement of the spectral width of the nickel-like molybdenum x-ray laser (${\lambda}\;=\;18.895\;nm$) by use of a high-resolution spectrometer in order to determine the strength of the magnetic field required for the generation of a circularly polarized x-ray laser. The spectral width was measured to be ${\Delta}{\lambda}\;=\;18\;m{\AA}$ under the substantial lasing condition. The magnetic field required for the generation of a circularly polarized x-ray laser was 40 T. The splitting of the x-ray laser line was clearly obtained under 15 T external magnetic field. The strength of the magnetic field estimated from the splitting of the x-ray laser line was large compared with the external magnetic field. It implies that there might be an alternative mechanism for enhancement of the magnetic field in the gain medium plasma.

The Effect of Density Gradient on the Self-modulated Laser Wakefield Acceleration with Relativistic and Kinetic Effects

  • Yoo, Seung-Hoon;Kim, Jae-Hoon;Kim, Jong-Uk;Seo, Ju-Tae;Hahn, Sang-June
    • Journal of the Optical Society of Korea
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    • v.13 no.1
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    • pp.42-47
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    • 2009
  • The propagation of an intense laser pulse through an upward density-gradient plasma in a self-modulated laser wakefield acceleration (SM-LWFA) is investigated by using particle-in-cell (PIC) simulations. In the fully relativistic and kinetic PIC simulations, the relativistic and kinetic effects including Landau damping enhance the electron dephasing. This electron dephasing is the most important factor for limiting the energy of accelerated electrons. However, the electron dephasing, which is enhanced by relativistic and kinetic effects in the homogeneous plasma, can be forestalled through the detuning process arising from the longitudinal density gradient. Simulation results show that the detuning process can effectively maintain the coherence of the laser wake wave in the spatiotemporal wakefield pattern, hence considerable energy enhancement is achievable. The spatiotemporal profiles are analyzed for the detailed study on the relativistic and kinetic effects. In this paper, the optimum slope of the density gradient for increasing electron energy is presented for various laser intensities.

Application of Inverse Pole Figure to Rietveld Refinement: III. Rietveld Refinement of $SnO_2$ Thin Film using X-ray Diffraction Data

  • Kim, Yong-Il;Jung, Maeng-Joon;Kim, Kwang-Ho
    • The Korean Journal of Ceramics
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    • v.6 no.4
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    • pp.354-358
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    • 2000
  • The SnO$_2$film was deposited on a corning glass 1737 substrate by plasma enhanced chemical vapor deposition using a gas mixture of SnCl$_4$, $O_2$, and Ar. The film thickness was measured using $\alpha$-step and was about 9400$\AA$. The conventional X-ray diffractometry and pole figure attachment were used to refine the crystal structure of SnO$_2$ thin film. Six pole figures, (200), (211), (310), (301), (321), and (411), were measured with CoK$_\alpha$ radiation in reflection geometry. The X-ray diffraction data were measured at room temperature using CuK$_\alpha$ radiation with graphite monochromator. The agreement between calculated and observed patterns for the normal direction of SnO$_2$ thin film was not satisfactory due to the severely preferred orientation effect. The Rietveld refinement of heavily textured SnO$_2$ thin film was successfully achieved by adopting the pole density distribution of each reflection obtained from the inverse pole figure as a correction factor for the preferred orientation effect. The R-weighted pattern, R$_wp$, was 15.30%.

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Determination of Trace Elements in Atmospheric Dust by X-Ray Fluorescence Spectrometry(II) : X-ray Fluorescence Spectrometric Determination of Light Elements (형광 X선에 의한 대기분진중의 미량성분의 측정(II): 대기부유분진 중 경원소의 X-선 형광분석)

  • 이용근;박현미;이동수;이보경
    • Journal of Korean Society for Atmospheric Environment
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    • v.9 no.3
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    • pp.247-254
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    • 1993
  • A simple and direct method is developed for the determination of light Elements in atmospheric particulates by X-ray fluorescence spectrometry. Calibration standards for the light elements such as Al, Mg, K, Ca, etc are prepared by filtering real atmospheric particulates over variable time and subsequently standardizing them by Inductively Coupled Plasma-Mass Spectrometry(ICP-MS) or Atomic Absorption Spectrophotometry(AAS) analysis. The validity of this calibration method is tested by analyzing more than 100 aerosol samples, collected at urban(Seoul) and rural(Padori) sites over a two year period with this method and then comparing them with those by other accuracy proven methods such as AAS or ICP-MS: for all metals tested the results showed reasonably good agreements (R $\geq$ 0.95).

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A Study of the Etched ZnO Thin Films Surface by Reactive Ion in the Cl2/BCl3/Ar Plasma (Cl2/BCl3/Ar 플라즈마에서 반응성 이온들에 의해 식각된 ZnO 박막 표면 연구)

  • Woo, Jong-Chang;Kim, Chang-Il
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.23 no.10
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    • pp.747-751
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    • 2010
  • In the study, the characteristics of the etched Zinc oxide (ZnO) thin films surface, the etch rate of ZnO thin film in $Cl_2/BCl_3/Ar$ plasma was investigated. The maximum ZnO etch rate of 53 nm/min was obtained for $Cl_2/BCl_3/Ar$=3:16:4 sccm gas mixture. According to the x-ray diffraction (XRD) and atomic force microscopy (AFM), the etched ZnO thin film was investigated to the chemical reaction of the ZnO surface in $Cl_2/BCl_3/Ar$ plasma. The field emission auger electron spectroscopy (FE-AES) analysis showed an elemental analysis from the etched surfaces. According to the etching time, the ZnO thin film of etched was obtained to The AES depth-profile analysis. We used to atomic force microscopy to determine the roughness of the surface. So, the root mean square of ZnO thin film was 17.02 in $Cl_2/BCl_3/Ar$ plasma. Based on these data, the ion-assisted chemical reaction was proposed as the main etch mechanism for the plasmas.

A Study on the Adhesion Strength and Residual Stress Measurement of Plasma Sprayed Cr$_3$C$_2$-NiCr Coating (크롬탄화물 용사피막의 접착력 및 잔류응력측정에 관한 연구)

  • ;;Kim, E. H.;Kwun, S. I.
    • Journal of Welding and Joining
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    • v.14 no.4
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    • pp.43-52
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    • 1996
  • The plasma sprayed Cr$_{2}$C$_{2}$-NiCr coatings are widely used as wear-resistant and corrosion-resistant materials. The mechanical properties of the plasma sprayed Cr$_{2}$C$_{2}$-NiCr coatings were examined in this study. The distribution of the residual stress with the coating thickness was also examined by X-ray diffraction method. The pore in the coatings could be classified into two types ; one is the intrinsic pore originated from the spraying powder, the other is the extrinsic pore formed during spraying. During the tensile adhesion test, the fracture occurred at the interface of top coat and substrate or top coat and bond coat depending on the existence of bond coat. It was found that the compressive residual stress near the interface decreased with the increase of the top coat thickness. The tensile adhesion strength of the coating without bond coat was higher than that with bond coat, because the coating with bond coat has higher horizontal crack density near the interface between bond coat and top coat.

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The Etching Properties of SBT Thin Films in Cl$_2$ Inductively Coupled Plasma (Cl$_2$ 유도결합 플라즈마를 이용한 SBT 박막의 식각특성)

  • Kim, Dong-Pyo;Kim, Chang-Il
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.50 no.5
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    • pp.211-215
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    • 2001
  • SBT thin films were etched at different content of $Cl_2$ in $Cl_2$/Ar or $Cl_2/N_2$(80%). As $Cl_2$ gas increased in $Cl_2$/Ar or $Cl_2/N_2$ gas plasma. the etch rate decreased. The result indicates that physical puttering of charged particles is dominant to chemical reaction in etching SBT thin films. To evaluate the etching mechanism of SBT thin films, x-ray photoelectron to chemical reaction in etching SBT thin films. To evaluate the etching mechanism of SBT thin films, x-ray photoelectron spectroscopy (XPS), secondary ion mass spectrometry (SIMS) and atomic force microscopy (AFM) were carried out. From the result of AFM, the rms values of etched samples in Ar only or $Cl_2$ only plasma were higher than that of as-deposited, $Cl_2$/Ar and $Cl_2/N_2$ plasma. This can be illustrated by a decrease of Bi content of nonvolatile etching products (Sr-Cl and Ta-Cl), which are revealed by XPS and SIMS.

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Synthesis of W2C by Spark Plasma Sintering of W-WC Powder Mixture and Its Etching Property (W-WC의 Spark Plasma Sintering에 의한 W2C의 합성 및 식각특성)

  • Oh, Gyu-Sang;Lee, Sung-Min;Ryu, Sung-Soo
    • Journal of Powder Materials
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    • v.27 no.4
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    • pp.293-299
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    • 2020
  • W2C is synthesized through a reaction-sintering process from an ultrafine-W and WC powder mixture using spark plasma sintering (SPS). The effect of various parameters, such as W:WC molar ratio, sintering temperature, and sintering time, on the synthesis behavior of W2C is investigated through X-ray diffraction (XRD) analysis, scanning electron microscopy (SEM) analysis of the microstructure, and final sintered density. Further, the etching properties of a W2C specimen are analyzed. A W2C sintered specimen with a particle size of 2.0 ㎛ and a relative density over 98% could be obtained from a W-WC powder mixture with 55 mol%, after SPS at 1700℃ for 20 min under a pressure of 50 MPa. The sample etching rate is similar to that of SiC. Based on X-ray photoelectron spectroscopy (XPS) analysis, it is confirmed that fluorocarbon-based layers such as C-F and C-F2 with lower etch rates are also formed.

Study on Etching Damages of YMnO3 Thin Films by Cl-based Plasma (Cl-based 플라즈마에 의한 YMnO3 박막의 식각 damage에 관한 연구)

  • 박재화;기경태;김동표;김창일;장의구
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.16 no.6
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    • pp.449-453
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    • 2003
  • Ferroelectric YMnO$_3$ thin films were etched with Ar/Cl$_2$ and CF$_4$/Cl$_2$ inductively coupled plasma (ICP). The maximum etch rate of YMnO$_3$ thin film was 300 $\AA$/min at a Ar/Cl$_2$ gas mixing ratio of 2/8, a RF power of 800 W, a DE bias of 200 V, a chamber pressure of 15 mTorr, and a substrate temperature of 30 $^{\circ}C$. From the X-ray photoelectron spectroscopy (XPS) analysis, yttrium etched by chemical reactions with Cl radicals assisted by Ar ion bombardments in Ar/Cl$_2$ plasma. In CF$_4$/Cl$_2$ plasma, yttrium are remained on the etched surface of YMnO$_3$ and formed of nonvolatile YF$_{x}$ compounds manganese etched effectively by chemical reactions with Cl and F radicals. From the X-ray diffraction (XRD) analysis, the (0004) diffraction peak intensity of the YMnO$_3$ thin film etched in Ar/Cl$_2$ plasma shows lower value than that in CF$_4$/Cl$_2$ plasma. It indicates that the crystallinty of YMnO$_3$ thin film is more easily damaged by the Ar ion bombardment than the changes of stoichiometry due to nonvolatile etch by-products.s.

Cr, Ni and Cu removal from Si wafer by remote plasma-excited hydrogen (리모트 수소 플라즈마를 이용한 Si 웨이퍼 위의 Cr, Ni 및 Cu 불순물 제거)

  • 이성욱;이종무
    • Journal of the Korean Vacuum Society
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    • v.10 no.2
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    • pp.267-274
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    • 2001
  • Removal of Cr, Ni and Cu impurities on Si surfaces using remote plasma-excited hydrogen was investigated. Si surfaces were contaminated intentionally by acetone with low purity. To determine the optimum process condition, remote plasma-excited hydrogen cleaning was conducted for various rf-powers and plasma exposure times. After remote plasma-excited hydrogen cleaning, Si surfaces were analyzed by Total X-ray Reflection Fluorescence(TXRF), Surface Photovoltage(SPV) and Atomic Forece Microscope(AFM). The concentrations of Cr, Ni and Cu impurities were reduced and the minority carrier lifetime increased after remote plasma-excited hydrogen. Also RMS roughness decreased by more than 30% after remote plasma-excited hydrogen cleaning. AFM analysis results also show that remote plasma-excited hydrogen cleaning causes no damage to the Si surface. TXRF analysis results show that remote plasma-excited hydrogen cleaning is effective in eliminating metallic impurities from Si surface only if it is performed under an optimum process conditions. The removal mechanism of the Cr, Ni and Cu impurities using remote plasma-excited hydrogen treatments is proposed to be the lift-off during removal of underlying chemical oxides.

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