• Title/Summary/Keyword: Plasma thermal spray

Search Result 133, Processing Time 0.037 seconds

Large Scale Treatment of Perfluorocompounds Using a Thermal Plasma Scrubber

  • Han, Sung-Han;Park, Hyun-Woo;Kim, Tae-Hee;Park, Dong-Wha
    • Clean Technology
    • /
    • v.17 no.3
    • /
    • pp.250-258
    • /
    • 2011
  • Thermal plasma has been presented for the decomposition of perfluorocompounds (PFCs) which are extensively used in the semiconductor manufacturing and display industry. We developed pilot-scale equipment to investigate the large scale treatment of PFCs and called it a "thermal plasma scrubber". PFCs such as $CF_4$, $C_2F_6$, $SF_6$, and $NF_3$ used in experiments were diluted with $N_2$. There were two different types of experiment setup related to the water spray direction inside the thermal plasma scrubber. The first type was that the water was sprayed directly into the gas outlet located at the exit of the reaction section. The second type was that the water was sprayed on the wall of the quenching section. More effective decomposition took place when the water was sprayed on the quenching section wall. For $C_2F_6$, $SF_6$, and $NF_3$ the maximum destruction and removal efficiency was nearly 100%, and for $CF_4$ was up to 93%.

Particle Deposition, PD Process - New Potential in Material Processing -

  • Fukumoto, Masahiro
    • Proceedings of the Korean Powder Metallurgy Institute Conference
    • /
    • 2006.09a
    • /
    • pp.47-48
    • /
    • 2006
  • Oridinal thermal spray process has developed into two ways, namely, temperature dominated represented by plasma spraying, and velocity dominated represented by HVOF. It is common for both that the particle materials sprayed are basically in melted or half melted condition. New process has developed recently, that is, Cold Spray and Aerosol Deposition. Particle's heating is limited in CS lower than half of the material's melting point. Moreover, exactly no heating is loaded in AD process. Through the investigation on common feature for these three spraying processes, potential of new material process - Particle Deposition, PD - is considered and proposed.

  • PDF

Thermal Spray Coating

  • 김종영
    • 전기의세계
    • /
    • v.42 no.1
    • /
    • pp.5-11
    • /
    • 1993
  • 금속이나 세라믹 입자를 용사하여 보호피막을 형성하는 기술은 화염을 사용하는 방법에서 시작했으며 용사재료는 분말, 선, 봉의 형태로 공급되었다. 1960년대에 상업적인 plasma 용사장비가 개발되었으며 여기서 사용된 D.C.plasma jet를 이용하여 분말형태의 용사재료를 용융하고 고속으로 피용사테에 용융입자를 분사하여 피용사체면에 충돌시켜 다층의 얇은 피막을 형성한다. 최근(1985년)에는 R.F.(Radio Frequency) Plasma를 이용하여 열전도도가 작은 재료나 산소와 반응성이 큰 재료를 용사하는 방법도 개발되고 있다. 용사피복법은 현재 여러가지 방법이 실용되고 있으며 재료를 용융하는 열원에 따라 분류하면 표1과 같다. 즉 산소와 연료 가스의 혼합에 의한 연소나 폭발에너지를 이용하는 가스식 용사법과 Arc, Plasma등의 전기 에너지를 이용하는 전기식 용사법으로 크게 나눌 수 있다.

  • PDF

Analysis of thermal stresses developed in plasma sprayed layer (플라즈마 용사층에 발생하는 응력해석)

  • 배강열;김희진
    • Journal of Welding and Joining
    • /
    • v.8 no.4
    • /
    • pp.58-68
    • /
    • 1990
  • The formation of thermal stresses by plasma spraying is generally considered as adverse. Therefore, the knowledge of stress distribution in the deposited layer during and after plasma spraying will be of special interest. In this study finite difference heat transfer analysis and finite element stress analysis were carried out to predict the change of stress distribution in the plasma coated layer with the variations of preheat temperature, number of scan, particle size, and bond coat. The results of the numerical analysis were as follows: 1) Transient stresses developed in the coated layer were up to the level of yiedl strength at the temperature. 2) The tensile stresses were developed in the deposited layer and the surface of the substrate, but the compressive stresses were developed in the rest of the substrate. 3) Transient and residual stresses were significantly affected by the preheat temperature. 4) The variations of temperature of powder particle and number of torch scan changed tensile stress distribution, but made no difference on the magnitude of the stresses. 5) Bond coated layer reduced the stree level of deposited layer.

  • PDF

Study on Metal Microfilter Coated with Ceramics by Using Plasma Thermal Spray Method (플라즈마 용사를 이용한 복합세라믹 미세필터 연구)

  • Song, In-Gyu;Lee, Young-Min;Shin, Hyun-Myung;Choi, Hae-Woon
    • Transactions of the Korean Society of Mechanical Engineers A
    • /
    • v.35 no.9
    • /
    • pp.1035-1040
    • /
    • 2011
  • This research was performed on a microfilter made of a hybrid material (ceramic + metal) that was coated with ceramics on the metal-filter surface by using the thermal spray method. The ceramic powders used were $Al_2O_3+40TiO_2$ powder with a particle size of $20{\mu}m$ and $Al_2O_3$ (98%+)powder with a particle size of $45{\mu}m$. The metal filters were filter-grade $20{\mu}m$, $30{\mu}m$, and $50{\mu}m$ sintered metal powder filters (SIKA-R 20 IS, 30 IS, 50 IS; Sinter Metals Filters) and filter-grade $75{\mu}m$ sintered mesh filter with five layers. Ceramic-coated filters that were coated using the thermal spray method had a great influence on powder material, particle size, and coating thickness. However, these filters showed a fine performance when used as micro-filters.

The Mechanical Properties and Biocompatibility of Functionally Graded Coatings(FGC) of Hydroxyapatite(HA) and Metallic Powders - Functionally Gradient Coatings of Thermal Spray in Air- (Hydroxyapatite (HA)와 금속 분말 경사 코팅의 기계적 특성 및 생체 적합성 - 대기 열용사 경사코팅 -)

  • Kim, Eun-Hye;Kim, Yu-Chan;Han, Seung-hee;Yang, Seok-Jo;Park, Jin-Woo;Seok, Hyun-Kwang
    • Korean Journal of Metals and Materials
    • /
    • v.47 no.1
    • /
    • pp.13-20
    • /
    • 2009
  • This work presents functionally graded coatings (FGC) of hydroxyapatite (HA) and metallic powders on Ti-6Al-4V implants using plasma spray coating method. HA has been the most frequently used coating material due to its excellent compatibility with human bones. However, because of the abrupt changes in thermomechanical properties between HA and the metallic implant across an interface, and residual stress induced on cooling from coating temperture to room temperature, debonding at the interface occurs in use sometimes. In this work, FGC of HA and Ti or Ti-alloy powders is made to mitigate the abrupt property changes at the interface and the effect of FGC on residual stress release is investigated by evaluating the mechanical bond strength between the implant and the HA coating layers. Thermal annealing is done after coating in order to crystallize the HA coating layer which tends to have amorphous structure during thermal spray coating. The effects of types and compositional ratio of metallic powders in FGC and annealing conditions on the bond strength are also evaluated by strength tests and the microstructure analysis of coating layers and interfaces. Finally, biocompatibility of the coating layers are tested under ISO 10993-5.

PROPERTIES OF PLASMA SPRAYED COATINGS

  • Ding, C.X.;Zhang, Y.F.;Xia, J.Y.
    • Journal of the Korean Vacuum Society
    • /
    • v.4 no.S2
    • /
    • pp.58-63
    • /
    • 1995
  • Plasma spray has attracted attention as an effective method for obtaining protective coatings. In this paper, the physical, mechanical and thermal properties of coatings are reviewed. The microstructural features of the coatings are described. The relationship between the properties of coatings and their microstructure is also discussed. Plasma sprayed coatings are used to reduce wear and improve thermal protection on a large number of components in various industries. In some cases, the conditions of application are very aggressive and therefore the resulting maintenance costs are expensive. Improved coating materials and appropriate properties of coatings are the most promising ways to solve these problems[1,2]. The optimum coating properties depend on the microstructure of coatings[1-5]. In this paper, some ceramic coatings frequently used in industries were reported. The physical, mechanical and thermal properties of ceramic coatings are reviewed. The microstructure features of coatings are addressed. The relationship between the microstructure of coatings and their properties are discussed.

  • PDF

Photocatalytic Property of Nano-Structured TiO$_2$ Thermal Splayed Coating - Part I: TiO$_2$ Coating - (나노구조 TiO$_2$ 용사코팅의 미세조직 제어 공정기술 개발과 광촉매 특성평가 - Part I: TiO$_2$코팅 -)

  • 이창훈;최한신;이창희;김형준;신동우
    • Journal of Welding and Joining
    • /
    • v.21 no.4
    • /
    • pp.39-45
    • /
    • 2003
  • Nano-TiO$_2$ photocatalytic coatings were deposited on the stainless steel 304(50$\times$70$\times$3mm) by the APS(Atmospheric Plasma Spraying). Photocatlytic reaction was tested in MB(methylene blue) aqueous solution. For applying nano-TiO$_2$ powders by thermal spray, the starting nano-TiO$_2$ powder with 100% anatase crystalline was agglomerated by spray drying. Plasma second gas(H$_2$) flow rate and spraying distance were used as principal process parameters which are known to control heat enthalpy(heat input). The relationship between process parameters and the characteristics of microstructure such as the anatase phase fraction and grain size of the TiO$_2$ coatings were investigated. The photo-decomposition efficiency of TiO$_2$ coatings was evaluated by the kinetics of MB aqueous solution decomposition. It was found that the TiO$_2$ coating with a lower heat input condition had a higher anatase fraction, smaller anatase grain size and a better photo-decomposition efficiency.

Experimental Study on the Corrosion Characteristics of Zn and Zn-15Al Coatings Deposited by Plasma Arc Thermal Spray Process in Saline Solution (플라즈마 아크 용사 공법에 의해 도포된 Zn 및 Zn-15Al 금속 코팅의 해수 환경에서 부식 특성에 관한 실험적 연구)

  • Jeong, Hwa-Rang;Lee, Han-Seung
    • Journal of the Korea Institute of Building Construction
    • /
    • v.21 no.6
    • /
    • pp.539-550
    • /
    • 2021
  • In this study, Zn and Zn-15Al were coated on general carbon steel by plasma arc metal spraying and then immersed in a 3.5wt.% NaCl solution similar to the seawater environment to evaluate the corrosion resistance properties. Through the surface shape analysis test by SEM and XRD, it was found that the Zn coating was porous and needle-shaped, so the penetration of the electrolyte was easy, and thus the corrosion rate was rapid. On the other hand, the Zn-15Al coating had a uniform and dense shape and was shown to suppress corrosion.

Wear Characteristics of $Cr_{2}O_{3}\;and\;ZrO_{2}$Coating Materials by Plasma Spray ($Cr_2O_3$$ZrO_{2}$ 플라즈마 용사한 코팅재의 마모 특성)

  • Kim, Sung-Ig;Kim, Hee-Gon;Lee, Bong-Gil;Kim, Gui-Shik
    • Tribology and Lubricants
    • /
    • v.22 no.6
    • /
    • pp.335-341
    • /
    • 2006
  • This paper reports the wear characteristics of two types of coating materials, which are $Cr_2O_3$ and $ZrO_2$, by coated plasma thermal spray method. The wear test was carried out under air, grease, and bearing fluid conditions. The wear testing machine of a pin-on disk type were used to measure friction forces, friction coefficients and the weight losses of the coating specimens on the various sliding velocity and loading condition. The wear surface of specimens were observed by scanning electron microscope (SEM) photographs.