• Applied Chemistry for Engineering
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• v.28 no.5
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• pp.593-596
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• 2017

Sodium titanate nanosheets were prepared by a hydrothermal synthesis method under basic conditions. Ruthenium was introduced on the surface of sodium titanate nanosheets through an UV irradiation in the aqueous $RuCl_3$ solution. The crystal phase and morphology of synthesized samples were analyzed by X-ray diffraction, transmission electron microscopy and energy dispersive spectroscopy. In addition, the content of Ru was evaluated by inductively coupled plasma. It was proposed that a monomeric form of ruthenium was incorporated on the surface of sodium titanate. Ruthenium incorporated sodium titanates were applied to alcohol oxidation using molecular oxygen as an oxidant. The sample with 7% ruthenium showed a catalytic activity with a turnover frequency value of $2.1h^{-1}$ in oxidizing benzyl alcohol to benzaldehyde without any other byproducts at $105^{\circ}C$ and 1 atmosphere.

• 한국정보디스플레이학회:학술대회논문집
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• 2000.01a
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• pp.81-83
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• 2000

Tin-doped indium oxide(ITO) thin films were deposited on polyethylene terephthalate(PET) at room temperature by oxygen ion beam assisted evaporator system and the effects of oxygen gas flow rate on the properties of room temperature ITO thin films were investigated. Plasma characteristics of the ion gun such as oxygen ions and atomic oxygen radicals as a function of oxygen flow rate were investigated using optical emission spectroscopy(OES). Faraday cup also used to measure oxygen ion density. The increase of oxygen flow rate to the ion gun generally increase the optical transmittance of the deposited ITO up to 6sccm of $O_2$ and the further increase of oxygen flow rate appears to saturate the optical transmittance. In the case of electrical property, the resistivity showed a minimum at 6 sccm of $O_2$ with the increase of oxygen flow rate. Therefore, the improved ITO properties at 6 sccm of $O_2$ appear to be more related to the incorporation of low energy oxygen radicals to deposited ITO film rather than the irradiation of high energy oxygen ions to the substrate. At an optimal deposition condition, ITO thin films deposited on PET substrates showed the resistivity of $6.6{\times}10^{-4}$ ${\Omega}$ cm and optical transmittance of above 90%.

• Archives of Pharmacal Research
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• v.18 no.4
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• pp.231-236
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• 1995

Effects of sodium salts of various monovalent inorganic anions on transdermal permeation of salicylic acid were investigated. In in-vitro experiment using a Franz-type diffusion cell and excisicylic acid were investigated. In-vitro experiment using a Franze-type diffusion cell and excised mouse skin, the permeation-enhancing activities of the sodium salts of inoraganic anions were rougly proportional to lyotropic Hofmeister serlling abilities of the anions l F/sup -/

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.577-577
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• 2013

플라즈마를 이용하는 공정은 반도체 산업에서 박막트랜지스터, 평면 모니터와 LCD 등 다양한 반도체 및 디스플레이 소자를 제작하는데 중요한 기술 중 하나로 발전되어 왔다. 현재 플라즈마 공정 기술을 이용하여 소자의 크기를 수십 나노 이하로 공정함으로써 수율을 향상시킬 수 있었지만, 소자의 미세화는 그 한계점에 봉착하였다. 그러한 이유로 웨이퍼 사이즈의 크기를 대구경화 시킴으로써 이런 문제점을 극복하고자 하였지만, 대구경 웨이퍼 사이즈에 맞는 차세대 대면적 공정 장비와 그에 따른 플라즈마 소스의 개발과 이를 컨트롤 할 수 있는 능력이 매우 절실하게 되었다. 본 연구에서는 대구경 웨이퍼용 플라즈마 소스를 위해 상대적으로 낮은 압력과 고밀도 플라즈마를 발생시킬 수 있는 유도 결합형 플라즈마원을 사용하였다. 하지만 유도 결합형 플라즈마 소스의 경우 대구경화에 따른 안테나의 길이가 길어짐으로써 생기는 정상파 효과를 피할 수가 없게 되었다. 그러한 이유로, 본 연구에서는 정상파 효과를 줄일 수 있는 상대적으로 낮은 주파수를 사용하는 안테나의 형태를 이용하여 실질적인 공정 영역에 있어서의 균일도 문제를 해결하였다. 또한, 플라즈마의 특성조절을 위해 이중주파수를 사용함 으로써 플라즈마 특성 조절을 하였다. 이러한 형태의 이중주파수를 사용하는 플라즈마 소스를 이용하여 10 mTorr의 Ar/CF4 조건에서 양이온 종들을 PSM (Plasma Sampling Mass spectroscopy, HIDEN Inc.)을 통해 에너지를 분석하였다. 이중 주파수에 있어 전력비율에 따라 IEDs (Ion Energy Distributions)는 많은 변화가 관찰되었으며, 인가하는 입력전력에 따라 E-H mode 전이가 일어남을 관찰할 수 있었다.

• Journal of Korean Society for Atmospheric Environment
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• v.21 no.4
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• pp.423-430
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• 2005

This study was investigated with sample digestion techniques and a reliability of the analytical results for a quantitative analysis of a standard reference material ('urban particulate matter', SRM 1648). The metallic elements were analyzed by inductively coupled plasma mass spectrometry (ICP-MS) with closed vessel microwave acid digestion method and atomic absorption spectroscopy (AAS). Quality control of the overall analytical procedures for metallic element determinations of standard reference material were estimated by analysis of a SRM 1648. Three digestion solutions $(type\;1:\;HNO_3,\;type\;2:\;HNO_3\;and\;H2O_2(4'1)\;mixture,\;type\;3:5.55\%\; HNO_3\;and\;16.75\%\;HCI\;mixture)$ were applied to SRM 1648. As a result, three digestion solutions used in this study are completely unable to digest Cr of SRM 1648. Reliability of Cr and As showed some errors in the digestion with digestion solution type (3) due to the influence of chlorides. Type (3) digestion solutions are sufficient to fulfill the digestion of As as well as Se in SRM 1648. ICP-MS results showed the improvement in accurate and precise determination of some trace elements like Cd, V and Pb in SRM 1648. It is important to use the proper digestion solution for each element to qualify analytical precision.

• Journal of the Korean institute of surface engineering
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• v.48 no.6
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• pp.297-302
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• 2015

Nanocrystalline diamond(NCD) coated aluminium plates were prepared and applied as heat sinks for LED modules. NCD films were deposited on 1 mm thick Al plates for times of 2 - 10 h in a microwave plasma chemical vapor deposition reactor. Deposition parameters were the microwave power of 1.2 kW, the working pressure of 90 Torr, the $CH_4/Ar$ gas ratio of 2/200 sccm. In order to enhance diamond nucleation, DC bias voltage of -90 V was applied to the substrate during deposition without external heating. NCD film was identified by X-ray diffraction and Raman spectroscopy. The Al plates with about 300 nm thick NCD film were attached to LED modules and thermal analysis was carried out using Thermal Transient Tester (T3ster) in a still air box. Thermal resistance of the module with NCD/Al plate was 3.88 K/W while that with Al plate was 5.55 K/W. The smaller the thermal resistance, the better the heat emission. From structure function analysis, the differences between junction and ambient temperatures were $12.1^{\circ}C$ for NCD/Al plate and $15.5^{\circ}C$ for Al plate. The hot spot size of infrared images was larger on NCD/Al than Al plate for a given period of LED operation. In conclusion, NCD coated Al plate exhibited better thermal spreading performance than conventional Al heat sink.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.24 no.1
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• pp.33-40
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• 2014

Poly vinylidene fluoride-co-hexafluoropropylene (PVdF-HFP) membrane were prepared by the electrospinning technique. We had applied a DLC coating process and then the surface of the membrane and the contact angle change was investigated. Electrospun fibrous PVdF-HFP membrane surface became to wrinkled shape by Ar plasma treatment and treatment conditions. The wrinkled surface of PVdF-HFP membrane became super-hydrophilic. However, after DLC coating process, it became super-hydrophobic. The resulting surfaces were characterized by water contact angle measurement, X-ray photoelectron spectroscopy (XPS) and field emission scanning electron microscopy (FE-SEM). Resultantly it was recognized that the wettability characteristics of the membrane surfaces depended on the chemical composition and surface morphology.

• Journal of the Korean Chemical Society
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• v.44 no.6
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• pp.547-555
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• 2000

The surface water in the upstream and midstream of Nakdong river, which is being used as tap water and industrial water supply in Daegu city and Kyungpook province, was analyzed in its water quality. In addition, the sediments of which was analyzed in terms of heavy metal and organic substance contents. All the sampling was done in the drought season for 2 days of June 22-23 and carried out in 10 sampling sites. The sites cover the whole Kyungpook provincial region, starting from Yangsam Bridge in Chyeong Ryang Provincial Park as the upper end, to the Ko Ryung Bridge as the lower end sampling site of Nakdong river that flows through Kyungpook province. The 22 items including $NH^{+}_{4}$, $NO^{-}_{2}$ and COD were analyzed for surface water and 11 items including organic constituents(trichloroethylene, etc) and heavy metals were analyzed for sediments. The sediments samples were analyzed by elution testing method and acid dissolution method and then the results were compared with each other. All heavy metals in samples were determined by Inductively Coupled Plasma-Atomic Emission Spectroscopy(ICP-AES) and other constituents were analyzed by standard testing methods of the Korean Ministry of Environment.

• Corrosion Science and Technology
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• v.19 no.4
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• pp.189-195
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• 2020

Two air vents situated on a heat transport pipe in district heating system were exposed to the same environment for 10 years. However, one air vent was more corroded than the other. It also had a hole on the top of the front-end pipe. Comparative analysis was performed for these air vents to identify the cause of corrosion and establish countermeasures. Through experimental observation of the damaged part and analyses of powders sampled from air vents, it was found that corrosion was initiated at the top of the front-end pipe. It then spread to the bottom. Energy dispersive X-ray spectroscopy results showed that potassium and chlorine were measured from the corroded product in the damaged air vent derived from rainwater and insulation, respectively. The temperature of the damaged air vent was maintained at 75 ~ 120 ℃ by heating water. Rainwater-soaked insulation around the front-end pipe had been hydrolyzed. Therefore, the damaged air vent was exposed to an environment in which corrosion under insulation could be facilitated. In addition, ion chromatography and inductively coupled plasma measurements indicated that the matrix of the damaged front-end pipe contained a higher manganese content which might have promoted corrosion under insulation.

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.05a
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• pp.39.1-39.1
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• 2009

본 실험은 연성과 광 투명도가 뛰어난 아크릴 (PMMA) 과 폴리카보네이트 (Polycabonate) 기판의 축전 결합형 플라즈마 (CCP) 건식 식각 연구에 관한 것이다. 특히 식각 반응기 내부의 압력 변화에 따른 두 기판의 건식 식각 특성 분석에 초점을 맞추었다. 실험에 사용된 기판은 두께 1mm의 아크릴 (PMMA) 과 폴리카보네이트 (Polycabonate)를 $1.5\times1.5\;cm^2$로 절단하여 Photo-lithography 공정을 통하여 감광제 (Photo-resist)로 패턴하였다. 식각 반응기 내부에 패턴 된 아크릴(PMMA) 과 폴리카보네이트 (Polycabonate)를 넣은 후 반응기 내부 진공 상태로 만들었다. 그 후 5 sccm $O_2$ 가스를 유량조절기 (Mass flow controller)를 통하여 식각 반응기 내부로 유입하여 실험을 하였다. 이때 식각 공정 변수는 식각 반응기 내부 압력과 샘플 척 파워이다. 특성평가 항목은 식각 후 기판 (Substrate)의 식각율 (Etch rate), 식각 선택비 (Selectivity) 그리고 기판 표면 거칠기 (RMS roughness)이다. 실험 결과는 표면 단차 분석기(Surface profiler)를 이용하여 기판 (Substrate)의 표면을 분석 하였다. 또한 OES (Optical Emission Spectroscopy) 를 이용하여 식각 중 내부 플라즈마의 상태를 분석하였다. 본 실험 결과에 따르면 5 sccm $O_2$ 가스와 100 W 척 파워를 고정한 후 반응기 내부의 압력을 25 mTorr에서 180 mTorr까지 변화시켜 실험한 결과 40 mTorr의 반응기 내부 압력에서 실험 자료 중 가장 높은 식각율로 아크릴 (PMMA)은 $0.46\;{\mu}m/min$, 폴리카보네이트 (Polycabonate)는 $0.28\;{\mu}m/min$의 결과를 얻었다. 또한 이 자료를 바탕으로 5 sccm $O_2$ 가스와 반응기 내부 압력을 40 mTorr로 고정시키고 RIE 척 파워를 25 W에서 150 W로 증가시켰을 때 아크릴 (PMMA)의 식각율은 $0.15\;{\mu}m/min$에서 $0.72\;{\mu}m/min$까지 증가하였고, 폴리카보네이트 (Polycabonate) 의 식각율은 $0.1\;{\mu}m/min$에서 $0.36\;{\mu}m/min$까지 증가하였다.