• 한국정보디스플레이학회:학술대회논문집
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• 2003.07a
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• pp.1001-1004
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• 2003

We applied the spray pyrolysis technique to prepare fine $YBO_{3}$:Tb particles with high photoluminescence, which could be used in the plasma display device as a green phosphor. Several preparation conditions were investigated in order to tail the vacuum ultraviolet characteristics of $YBO_{3}$:Tb particles when they were prepared by the spray pyrolysis. As a result, the optimized $YBO_{3}$:Tb particles showed the high photoluminescence intensity as well as fine size in comparison with the commercial one.

• Bulletin of the Korean Chemical Society
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• v.23 no.8
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• pp.1127-1134
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• 2002

Fine ceramic particles of zirconia toughened alumina (ZTA), titania toughened alumina (TTA), and zirconia-titania toughened alumina (ZTTA) have been synthesized by ultrasonic spray pyrolysis (USP) at various temperatures from starting salt solutio ns of various compositions aiming for the development of catalytic material. These particles were characterized for properties such as shape, size and size distribution, diffraction pattern, and chemical and phase composition of elements by scanning electron microscopy (SEM), particle size analyzer (PSA), x-ray diffraction (XRD), and inductively coupled plasma-atomic emission spectroscopy (ICP-AES). Chemical compositions and sizes of ceramic composites have been controled by the stoichiometry of salt solutions and the flow rate of spraying solutions. The optimum experimental conditions for the various composite particle syntheses have been proposed.

• Journal of Information Display
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• v.2 no.4
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• pp.57-62
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• 2001

Green-emitting $Zn_2SiO_4$:Mn phosphor particles having a spherical shape and high luminescence intensities under VUV were prepared by spray pyrolysis process under severe preparation conditions. The type of precursor solutions affected the morphology and luminescence characteristics of the prepared particles. The particles prepared from the clear solution by laboratory-scale process had spherical shape and dense morphology, while the particles prepared from the severe preparation conditions had rough surface and collapsed structure. However, the particles prepared from the colloidal solution utilizing fumed silica were spherical in shape and filled morphology at the severe preparation conditions of high flow rate of carrier gas, high concentration of solution, and large reactor size. The prepared $Zn_2SiO_4$:Mn phosphor particles with complete spherical shape had higher photoluminescence intensity than that of the commercial product prepared by solid state reaction.

• 한국연소학회:학술대회논문집
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• 2006.10a
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• pp.15-19
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• 2006

The meat consumption produces a lot of bone waste everyday. Dumping bone waste without treatment results into environmental hazards. Conventional treatment by pyrolysis is slow, inefficient and produces hazardous by-products. In the work, an investigation of bone waste incinerated using thermal plasma technology is presented. A high temperature arc plasma torch operated at 33 kW was employed for the experiments. Bone waste was incinerated to remove the infectious organic matter and to vitrify the inorganic matter using plasma torch. Bone waste was reduced its 2/3 weight after the treatment. The process was highly efficient, economical, convenient, and fuel free. This method could be used as an alternative method for disposal of bone waste, small infectious animals, hazardous hospital waste, etc.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.33A no.10
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• pp.98-106
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• 1996

A thin film of aluminum for ultra large scale integrated circuits metalization has been deposited on TiN and SiO$_{2}$ substrates by plasma assisted chemical vapor deposition using DMEAA (dimenthylethylamine alane) as a precursor. The effects of plasma on surface topology and growth characteristics were investigated. Thermal CVD Al could not be got continuous films on insulating subsrate such as SiO$_{2}$. However, it was found that Al films could be deposited on SiO$_{2}$ substate without any pretreatments by the hydrogen plasma for pyrolysis of DMEAA. Compared to the thermal CVD, PACVD films showed much better reflectance and resistance on TiN and SiO$_{2}$ substrate. We obtained mirror-like PACVD Al film of 90% reflectance and resistance on TiN and SiO$_{2}$ substrates. We obtained mirror-like PACVD Al film of 90% reflectance on TiN substrate. Excellent conformal step coverage was obtained on submicron contact holes ;by the PACVD blanket deposition.

• Journal of the Korean Chemical Society
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• v.44 no.6
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• pp.592-599
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• 2000

The fine particles of binary ceramic composite of titania-partially-stabilized zirconia(TPSZ) were synthesized by ultrasonic spray pyrolysis at the various temperatures, compositions and concentrations and the effects of process factors for synthesis on the characteristics of fine particles were discussed. The starting salt solutions were prepared to have the ionic concentrations of 0.025~0.1 M aqueous solutions. The fine particles were prepared to have the compositions of 90~97.5 wt% of $ZrO_2$ and 2.5~10 wt% of $TiO_2$. The temperatures for particle synthesis were regulated to be 400~550$^{\circ}C$ as a drying zone, 800~1100$^{\circ}C$ as a pyrolysis zone. The produced fine particles were collected by a wet process and analyzed to investigate characteristic properties after being dried. The compositions of ceramic fine particles were determined by Inductively Coupled Plasma-Atomic Emission Spectroscopy(ICP-AES) technique and phases, morphologies and particle sizes of those were investigated by Raman Spectroscopy, X-ray diffraction(XRD), Scanning Electron Microscopy(SEM), Transmission Electron Microscopy(TEM) and Particle Size Analyzer(PSA) techniques.

• Korean Journal of Materials Research
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• v.18 no.7
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• pp.379-383
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• 2008

We report on the light-emitting diode (LED) characteristics of core-shell CdSe/ZnS nanocrystal quantum dots (QDs) embedded in $TiO_2$thin films on a Si substrate. A simple p-n junction could be formed when nanocrystal QDs on a p-type Si substrate were embedded in ${\sim}5\;nm$ thick $TiO_2$ thin film, which is inherently an n-type semiconductor. The $TiO_2$ thin film was deposited over QDs at $200^{\circ}C$ using plasma-enhanced metallorganic chemical vapor deposition. The LED structure of $TiO_2$/QDs/Si showed typical p-n diode currentvoltage and electroluminescence characteristics. The colloidal core-shell CdSe/ZnS QDs were synthesized via pyrolysis in the range of $220-280^{\circ}C$. Pyrolysis conditions were optimized through systematic studies as functions of synthesis temperature, reaction time, and surfactant amount.

• Journal of environmental and Sanitary engineering
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• v.22 no.2
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• pp.9-20
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• 2007

The incineration process has commonly used for wastes amount reduction and thermal treatments of pollutants as the technologies accumulated. However, the process is getting negative public images owing to matter of hazardous pollutants emission. Specially dioxins became a main issue and were mostly emitted from municipal solid wastes incineration. In this reason, pyrolysis/gasification/melting process is presented as an alternative of incineration process. The pyrolysis/gasification/melting process, a novel technology, is middle of verification of commercial plant and development of technologies in Korea. But the survey about the pollutant emission from the process, and background data in these facilities is necessary. So in this survey, t is investigated that the behavior of chlorobenzenes and chlorophenols in plasma type pyrolysis/gasification/melting plant of pilot scale. We investigated discharging behavior of each phase of chlorobenzene through each process in the plsasma type pyrolysis/gasification/melting process. From this result, it was found that about 99 percent of particle-phase chlorobenzene was removed, but on the other hand gas-phase chlorobenzene was increased by about 600 percent through heat exchanger, flue gas cooling, system and semi dry absorption bag filter(SDA/BF). Also, this investigation presented that di-chlorobenzene(DCB) tri-chlorobenzene(TCB), tetra-chlorobenzene(TeCB), penta-chlorobenzene (PCB), except mono-chlorobenzene(MCB) and hexa-chlorobenzene(HCB) were increased through the flue gas cooling system and the semi dry absorption bag filter(SDA/BF). It was investigated that concentration of particle-phase chlorophenol was decreased by about 66 percent, but on the other hand, concentration of gas-phase chlorophenol was increased by about 170 percent through heat exchanger, flue gas cooling system, and semi dry absorption bag filter(SDA/BF). Also, it was found that di-chlorophenol(DCP), tri-chlorophenol(TCP), and penta-chlorophenol(PCP) were increased through the flue gas cooling system, and the semi dry absorption bag filter(SDA/BF). It can be considered that small-scale pilot facility and short investigation period might cause the concentration increase through the flue gas cooling system and the semi dry absorption bag filter(SDA/BF). A further study on real-scale pilot facility and accurate investigation may be required.

• Korean Chemical Engineering Research
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• v.40 no.6
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• pp.752-756
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• 2002

Green-emitting $Zn_2SiO_4:Mn$ phosphors for PDP(Plasma Display Panel) application were synthesized by colloidal seed-assisted spray pyrolysis process. The codoping with $Gd^{3+}/Li^+$, which replaces $Si^{4+}$ site in the willemite structure, was performed to improve the luminous properties of the $Zn_2SiO_4:Mn$ phosphors. The particles prepared by spray pyrolysis process using fumed silica colloidal solution had a spherical shape, small particle size, narrow size distribution, and non-aggregation characteristics. The $Gd^{3+}/Li^+$ codoping amount affected the luminous characteristics of $Zn_2SiO_4:Mn$ phosphors. The codoping with proper amounts of $Gd^{3+}/Li^+$ improved both the photoluminescence efficiency and decay time of $Zn_2SiO_4:Mn$ phosphor particles. In spray pyrolysis, the post-treatment temperature is another factor controlling the luminous performance of $Zn_2SiO_4:Mn$ phosphors. The $Zn_{1.9}SiO_4:Mn_{0.1}$ phosphor particles containing 0.1 mol% $Gd^{3+}/Li^+$ co-dopant had a 5% higher PL intensity than the commercial product and 5.7 ms decay time after post-treatment at $1,145^{\circ}C$.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.198-198
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• 2011

단분산 결정질 실리콘 나노입자 (<10 nm)는 양자점 효과로 인한 선택적 파장 흡수가 가능하므로 태양전지 분야에 응용 가능성이 크다. 특히 입경의 크기가 작아지면 부피대비 표면적이 넓어지기 때문에 태양빛 흡수 면적이 증가한다. 따라서 입자의 크기는 태양전지에서 효율을 결정하는 중요한 요소 중 하나이다. 이러한 이유에서 plasma arc synthesis, laser ablation, pyrolysis 그리고 PECVD (Plasma Enhanced Chemical Vapor Deposition) 등이 실리콘 나노입자를 합성하는데 연구되어 왔으며, 특히 PECVD는 입자 생성과 동시에 균일한 증착이 이루어질 수 있기 때문에 태양전지 제작 시 공정 효율을 높일 수 있다. PECVD를 이용한 나노입자 합성에서 입경을 제어하는데 중요한 전구물질은 Ar과 SiH4가스이다. Ar 가스는 ICP (Inductively Coupled Plasma) 챔버 내부에 가해준 전력을 통해 가속됨으로써 분해되어 Ar plasma가 생성된다. 이는 공급되는 SiH4가스를 분해시켜 핵생성을 유도하고, 그 주위로 성장시킴으로써 실리콘 나노입자가 합성된다. 이때 중요한 변수 중 하나는 핵생성과 입자성장시간의 조절을 통한 입경제어 이다. 또한 공급되는 가스의 유량은 입자가 생성될 때 필요한 화학적 구성비를 결정하므로 입경에 중요한 요소가 된다. 마지막으로 공정압력은 챔버내부의 plasma 구성 요소들의 평균 자유 행로를 결정하여 SiH4가 분해되어 입자가 생성되는 속도와 양을 제어한다. PECVD를 이용한 실리콘 나노입자 형성의 주요 변수는 RF pulse, 가스(Ar, SiH4, H2)의 유량, Plasma power, 공정압력 등이 있다. 본 연구에서는 RF (Radio Frequency) PECVD방법을 이용하여 실리콘 나노입자를 만드는데 필요한 여러 변수들을 제어함으로써 이에 따른 입경분포 차이를 연구하였다. 또한 SEM (Scanning Electron Microscopy)과 SMPS (Scanning Mobility Particle Sizer)를 이용하여 각 변수에 따라 생성된 나노입자의 입경과 농도를 분석하였다. 이 중 plasma power에 따른 입경분포 측정 결과 600W에서 합성된 실리콘 나노입자가 상당히 단분산 된 형태로 나타남을 확인할 수 있었고 향후 다른 변수의 제어, 특히 DC bias 전압과 열을 가함으로써 나노입자의 결정성을 확인하는 추가 연구를 통해 태양전지 제작에 응용 할 수 있을 것으로 예상된다.