• 한국전산유체공학회지
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• 제14권1호
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• pp.70-77
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• 2009

In this study, time-dependent numerical analysis was carried out to investigate the plasma jet impingement on a flat plate, and a compressible form of two-dimensional inviscid gas dynamics equations were solved using the flux corrected transport algorithm. The mathematical modeling of Joule heating in the polycarbonate capillary bore and the mass ablation from the bore wall was incorporated in the numerical analysis and the series of computation was performed for three cases depending on the distance of the opposing plate from the capillary exit. The computational results reveal that the presence of the opposing plate does not affect the flow conditions inside the capillary when compared to the case of open-air plasma discharge. In the exterior region, the flow structure shows the typical supersonic underexpanded jet which consists of the strong Mach disk in front of the opposing plate and the barrel shock at the side of the jet. It is found that the shock evolution becomes more quasi-steady when the plate distance decreases. Also, the effects of the distance between the capillary bore exit and the opposing plate on the flow conditions along the opposing plate are investigated and the pressure variation on the plate shows more complicated interaction between the plasma discharge and the opposing plate when the location of plate becomes closer to the capillary exit.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제53권1호
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• pp.24-29
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• 2004

$CF_4$ gas is one of the most useful gases in modern technologies for semiconductor fabrication. However, there are many problems which should be solved in order to fabricate semiconductor device, for example, etching speed drop due to ion charge-up and etching selectivity drop due to the high electron energy. One of useful method in order to suppress their damages above is pulsed-time modulated plasma (PM). However, transient responses of charged particles occur when the source power is turned-on and -off in PM method. To control plasma properties in detail, such a transient phenomenon must be investigated. In this paper, we investigate $CF_4$ RF plasma properties under a one-dimensional fluid model. And also for dynamic and stable control of $CF_4$ plasmas, we investigated the transient behavior of the plasmas after step up or down of the amplitude of the power source voltage $V_s$(t). Fundamental properties of transient $CF_4$ plasmas was discussed. Furthermore, we intend to discuss new method for pulsed-time plasma modulation.

• International Journal of Aeronautical and Space Sciences
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• 제18권1호
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• pp.138-143
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• 2017

A performance analysis for a pulsed plasma thruster(PPT) has been conducted to predict the thrust and current change. Two models were implemented - a one-dimensional lumped circuit analysis model and the Teflon ablation model provided by Michael Keidar. The circuit model incorporating resistance and inductance models was adapted to predict the magnitude of the discharge current. Numerical simulations like current discharge rates with different voltages were reasonably well compared with experimental data. The effects of Teflon ablation on thruster characteristics were investigated.

• 한국전기전자재료학회논문지
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• 제13권12호
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• pp.1039-1044
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• 2000

Breakdown voltage model and expertiments are compared for discharge cells of AC plasma display panel. In the model, discharge paths are assumed to be initial electric field lines and the one-dimensional continuity equation is applied to the charged particle transport at each field line. The comparisons are performed in the wide range of gas pressure (50-600torr), Xe partial pressure over total pressure (1-6%), sustain electrode gap(100-1000$\mu\textrm{m}$), wall height(130, 300$\mu\textrm{m}$), and voltage pulse width(2-6${\mu}$s). The presented breakdown voltage model well agree with experiments in the above wide range. The increase of breakdown voltage with the decrease of the width(L) of protruding electrode is also described by the model.

• Applied Science and Convergence Technology
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• 제27권1호
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• pp.14-18
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• 2018

In order to understand the mechanism of the synthesis of particles using a plasma torch, it is necessary to understand the reaction mechanisms using a computer simulation. In this study, we have developed a simulation method to combine the Lagrangian scheme to follow microparticles and a nodal method to treat nanoparticles categorized with different particle sizes. The Lagrangian scheme includes the Coulomb force which affects the dynamics of larger particles. In contrast, the nodal method is adequate for the nanoparticles because the charge effect is negligible for nanoparticles but the number of nanoparticles is much larger than that of microparticles. This method is helpful to understand the dynamics and growth mechanism of micro- and nano-powder mixture observed in the experiment.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 추계학술대회논문집B
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• pp.720-725
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• 2000

To remove harmful gases from combustion exhaust gases. fundamental study on NOx removal using pulse corona discharge has been performed through experiments and simulations. The energy consumption should be decreased in order to apply non-thermal plasma technology to industry process. This work summarized the effects of $H_2O$ and Hydrocarbon additive in NOx removal efficiency. The Radical program is used to simulate high voltage discharge and the process of NOx removal. At last, experimental results were compared with simulation results to verify the reliability of this program.

• 한국산업융합학회 논문집
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• 제6권4호
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• pp.277-289
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• 2003

This study proposes a mathematical model to characterize the removal of nitrogen oxides in a dielectric barrier discharge plasma process. As well as the reactions between nitrogen oxides, water vapor, oxygen and nitrogen, the model takes into account the effect of ethylene often used as a chemical additive to reduce the power consumption of the process on the removal of nitrogen oxides. Since the concentrations of the radicals concerned in the main reactions including O, OH, H and N should be calculated to predict the removal efficiency of nitrogen oxides, they were theoretically derived. The parameters affecting the removal of nitrogen oxides, such as initial concentration, discharge power, humidity, and ethylene concentration were experimentally evaluated, which were compared with the calculated results to verify the validity of the model proposed. The predicted concentrations of several byproducts formed in this process were also presented and discussed. The effects of several parameters mentioned above on the removal of nitrogen oxides were reasonable described by the proposed model.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 심포지엄 논문집 정보 및 제어부문
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• pp.99-101
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• 2006

Auto-Cross Correlated time series (ACTS) model was constructed by using the backpropagation neural network. The performance of ACTS model was evaluated with sensor information collected from a large volume, industrial plasma-enhanced chemical vapor deposition system. A total of 18 sensor information were collected. The effect of inclusion of past and future information were examined. For all but three sensor information with a large data variance demonstrated a prediction error less than 3%. By integrating ACTS model into equipment software, process quality can be more stringently monitored while improving device throughput.

• Journal of Welding and Joining
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• 제28권4호
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• pp.67-72
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• 2010

The purpose of this paper is to understand the behavior of GHTAW process under the space environment with the experimental and numerical analysis. Gas Hollow Tungsten Arc Welding (GHTAW) using a hollow tungsten electrode was adopted, since the ignition and discharge of a conventional GTAW process is not appropriate to the space environment due to low pressure in space. In order to clarify the phenomena of GHTAW under space environment, an investigation of thermal and physical properties of the GHTAW arc plasma was experimentally performed under low pressure conditions. Furthermore, the molten pool behavior and weldment of GHTAW were understood by CFD-based numerical analysis, based on the models of GHTA heat source, arc pressure and electromagnetic force induced by arc plasma, the characteristics of which were obtained by the captured images of a CCD camera.

• 조명전기설비학회논문지
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• 제18권1호
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• pp.52-59
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• 2004

미립자 플라즈마란 입경이 수[$\mu\textrm{m}$]이하의 거의 일정한 크기를 가진 미립자가 다수로 생성 및 유지되면서, 정 또는 부외 전하를 가지고 기체 플라즈마 중에 부유하는 상태를 말한다. 플라즈마 프로세스에서는 이러한 미립자가 집적회로에 중착되어 막의 열화, 회로 배선의 불량 및 단선 등의 약영향을 끼치는 것으로 인식되고 있으며, 이러한 부분에 대한 억제나 제어에 관한 연구가 진행되고 있다. 본 연구에서는 유체 모델을 이용한 시뮬레이션으로부터 방전 챔버내의 Ar 플라즈마의 현상을 이해하고, Ar 플리즈마 중에 미립자를 투입하여 그 움직임을 분석하여, 플라즈마 중의 미립자 운동의 핵석 결과로서는, 하부 전극 면위에 비교적 규칙성을 갖는 미립자가 배열하는 것을 확인할 수 있었다. 또한, 약 전리 플라즈마에서는 전지의 이동로가 크기 때문에 미립자의 대전량은 평균 전자 에너지에 크게 의존하는 것을 알 수 있었다.