• 제목/요약/키워드: Plasma discharge

검색결과 1,419건 처리시간 0.034초

플라즈마동합법에 의한 유기피막의 성장기정에 관한 연구 (A Study on Growth Mechanism of Organic Thin Films by the Plasma Polymerization)

  • 이덕철;한상옥;박구범
    • 대한전기학회논문지
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    • 제36권1호
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    • pp.29-35
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    • 1987
  • TPolystyrene thin films are prepared by glow discharge of sytrene monomer vapor th establish the growth mechanism of organic thin films by the plasma polymerization. As the discharge parameters, discharge current(5mA-20mA), frequency (10kHz-50kHz, 13.56MHz), gaspressure (0.2torr-1.5torr), and discharge time(2min-12min)are adopted. Plasma-polymerized filmsof styrene vapor are identified as polystyrene by IR spectra. The thickness of plasma-polymerized films increases with gas pressure, frequency and discharge current in the region of the low frequency and below the allowed gas pressure where the polymerization occurs. It is suggested that the growth mechanism can be explained by ionic reaction in d.c. and low frequency region, and by radical reaction in high frequency region.

동축 원통형 코로나 방전 플라즈마의 해석적 모델 (An Analytical Model of Corona Discharge Plasmas in Coaxial Cylindrical Reactor)

  • 고욱희
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제53권3호
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    • pp.157-161
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    • 2004
  • We present a simple analytical expression of plasma density by making use of the electron density equation to study the dynamic behavior of the corona discharge plasma. It assumes that a specified voltage profile is fed through the inner conductor of the reactor chamber consisting of two coaxial conducting cylinders. The analytical description is based on the electron continuity equation with ionization and attachment by electrons. It is found that the electron density profile calculated between two coaxial cylindrical electrodes depends very sensitively on the Profile of applied voltage. The analytical expression of plasma density and its generation will provide important scaling laws in the corona discharge plasma.

Effects of Hydrophilic Surface Treatment on SUS Substrates by Using Dielectric Barrier Discharge

  • Joa, Sang-Beom;Kang, In-Je;Yang, Jong-Keun;Lee, Heon-Ju
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.458-458
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    • 2012
  • Fuel Cell is used stacking metal or polymer substrate. This hydro property of substrate surface is very important. Usually, surface property is hydrophilic. The surface oxidation of SUS is investigated through plasma treatments with an atmospheric-pressure dielectric barrier discharge (DBD) for increasing hydrophilic property. The plasma process makes an experiment under various operating conditions of the DBD, which operating conditions are treatment time, plasma gas mixture ratio, the plasma source supply frequency. Two kinds of SUS substrate, SUS-304 and SUS 316L, were used. Discharge frequency has a crucial impact on equipment performance and gas treatment. After the plasma treatment of a SUS plate, highly improved wettability was noted. But, when high oxygen supply, the substrate damaged seriously.

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저압 열전자 방전 플라즈마의 Monte Carlo 시뮬레이션 (Monte Carlo Simulation of Thermionic Low Pressure Discharge Plasma)

  • 고욱희
    • 전기학회논문지
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    • 제61권12호
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    • pp.1880-1885
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    • 2012
  • Nonlinear dynamical behaviors in thermionic low pressure discharge are investigated using a particle-in-cell(PIC) simulation. An electrostatic PIC code is developed to model the plasma discharge system including the kinetic effects. The elastic collision, excitation collision, ionization collision, and electron-ion recombination collision are considered in this code. The generated electrons and ions are traced to analyze physical characteristics of the plasma. The simulation results show that the nonlinear oscillation structures are observed for cold plasma in the system and the similar structures are observed for warm plasma with a shift in values of the bifurcation parameter. The detailed oscillation process can be subdivided into three distinct mode; anode-glow, temperature-limited, and double-layer modes.

무성방전의 중첩을 이용한 다중방전형 오존발생기의 오존생성수율 개선 (Improvement of Ozone Yield by a Multi-Discharge Type Ozonizer Using Super position of Silent Discharge Plasma)

  • 송현직;이동헌;오진훈;박성욱;서영택
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2004년도 학술대회 논문집 전문대학교육위원
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    • pp.88-91
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    • 2004
  • In order to improve ozone generation, we experimentally investigated the silent discharge plasma and ozone generation characteristics of a multi-discharge type ozonizer. Ozone in a multi-discharge type ozonizer is generated by superposition of a silent discharge plasma, which is simultaneously generated in separated discharge spaces. A multi-discharge type ozonizer is composed of three different kinds of superposed silent discharge type ozonizers, depending on the method of applying power to each electrode. We observed that the discharge period of the current pulse for a multi-discharge type ozonizer can be longer than that of silent discharge type ozonizer with two electrodes and one gap.Hence, ozone generation is improved up to 17185 ppm and 783 g/kwh for the superposed silent discharge type ozonizer for which an AC high voltages with a 180 phase difference were applied to the internal electrode and the external electrode, respectively, with the central electrode being ground

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Carbon Nano-Powder Functionalization and Disperisibility with Plasma Discharge

  • 강유석;정만기;이덕연;송석균;김성인
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.491-491
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    • 2013
  • A novel plasma system has been developed for 3-dimensional modification of the carbon nano-powders. Improvement of dispersion of these nano materials are studied by plasma discharge, not using chemical modification. The plasma process is considered to great advantages over wet chemical process due to environmental, economic viewpoint, and uniformity over the treated volume. The uniform dispersion is a critical factor for these material's nano composite applications. Using this plasma system, graphene, carbon black, and CNT was treated and functionalized. Several key discharge conditions such as Ar/H2/O2 or Ar/H2/NH3 gas ratio, treatment time, power, feeder's vibration frequency are investigated. Hydrophobic of graphene has turned some more into hydrophilic by reaction test with water, electrophoresis, surface contact angle test, and turbidity analysis. The oxygen content ratio in the plasma treated CNT has increased about 3.7 times than the untreatedone. In the case of graphene and carbon black, the oxygen- and nitrogen- content has been enhanced average 10%. O-H (N-H) peak, C-O (C-N) peak, and C=O (C=N) peak data have been detected by FTIR measurement and intensified compared to before-plasma treatment due to O2 or NH3 content.

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강유전체층을 갖는 선대선 방편 플라즈마장치의 코로나 방전 및 오존발생 특성 (Corona Discharge and Ozone Generation Characteristics of a Wire-to-Wire Plasma Reactor with a Ferroelectric Pellet Layer)

  • 문재덕;신정민;한상옥
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제53권7호
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    • pp.377-381
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    • 2004
  • A discharge plasma reactor using a ferroelectric pellet packed bed is now used as a removal means of pollutant gases, such as NOx, SOx and VOCs. When an ac voltage is applied to this plasma reactor, then the pellets are polarized, and great electric fields are formed at each top and bottom contact points of the ferroelectric pellets. Thus the points of each pellet become covered with intense corona discharges, where an electrophysicochemical reaction is taking place strongly However these strong discharges also elevate the temperature of the pellets greatly and concurrently decrease the output ozone generation, as a result, the overall removal efficiency of gas becomes decreased greatly A new configuration of discharge plasma reactor using a ferroelectric pellet layer and a wire-to-wire electrode has been proposed and investigated experimentally. It is found that an intensive microdischarge is taking place on the surface of ac corona-charged ferroelectric pellet layer of the proposed reactor, which concurrently enhances the efficiency of plasma generation greatly And, this type of configuration of plasma reactor utilizing a wire-to-wire electrode and a ferroelectric pellet layer could be used as one of effective plasma reactors to remove pollutant gas.

펄스형 $CO_2$ 레이저를 이용한 기중 침 대 침 전극간의 유도방전 특성 (The induced discharge characteristics in atmosphere adopting a pulsed $CO_2$ laser)

  • 정용호;최진영;이유수;정현주;송건주;김희제
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 춘계합동학술대회 논문집
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    • pp.172-175
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    • 2002
  • The technique of induced discharge by a pulsed CO2 laser is being applied to control electrical discharge path, material processing, triggered lightning for protecting the power equipments. In this paper, we have investigated about the characteristics of the induced discharge at atmospheric conditions by using a plasma channel, which is produced when a pulsed CO2 laser radiation is focused by a focusing mirror as a trigger source. A plasma channel produced by laser radiation has an effect on decreasing the threshold voltage and inducing the discharge in both needle electrodes. We have confirmed a delay time between a produced plasma channel and an electrical discharge after laser radiation. We provided the decreased voltage lower than the natural discharge voltage between electrode type of needles and was induced the discharge by forming a plasma channel between them. In this research we could understand the time delay of induced discharge by laser radiation, and the characteristics of the discharge cause by the decrease in the threshold voltage, and the polarity effect by changes of plasma channel positions between two electrodes.

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저기압하의 아르곤 가스의 RF 글로우 방전특성 (RF Glow Discharge Characteristics of Argon at Low Gas Pressure)

  • 곽동주;김두환;박정후
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1995년도 하계학술대회 논문집 C
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    • pp.1382-1384
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    • 1995
  • In order to study the structure of RF glow discharge driven at 13.56MHz in argon, the discharge voltage, current and phase shift between them will be measured over a wide range of discharge parameters(gas pressure between 1mTorr and 50mTorr with discharge power between 20mW and 200W). In this paper, the dc glow discharge characteristics and plasma parameters of both FTS and CPMS systems are studied experimentally. It is found that for CPMS system discharge is stablized under wider ranges of magnetic field and pressure than for FTS system. The plasma density and electron temperature of the plasma for these two systems are in the range of $10^{10}{\sim}7{\times}10^{11}[cm^{-3}]$ and $3.5{\sim}6.5$[eV], respectively.

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교류형 플라즈마 디스플레이에서 단일 유지 파형을 가지는 기입 방전의 특성의 연구 (Study on Characteristics of Write Discharge with Single Sustain Waveform in AC Plasma Display Panel )

  • 조병권
    • 한국전기전자재료학회논문지
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    • 제36권1호
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    • pp.56-61
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    • 2023
  • The characteristics of write discharge were investigated when the conventional driving method with the unipolar sustain voltages, and the single sustain driving method applying the bipolar sustain voltage were applied in an AC plasma display. In the case of having a single sustain waveform, the strength of the write discharge is weakened compared to the conventional driving method during the address period, because the wall charge inside the panel is more dissipated by the lower scanning voltage. In the driving method with a single sustain waveform, the bias voltage of the other electrodes was changed to improve the write discharge characteristics. As a result, the intensity of the discharge was enhanced by 32% and the delay time was shortened by 60 ㎲.