• Journal of the Korean institute of surface engineering
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• v.54 no.6
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• pp.365-370
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• 2021

In this research, we proceeded with research on plasma resistance of the cleaning process of APS(Atmospheric Plasma Spray)-Y₂O₃ coated parts used for semiconductor and display plasma process equipment. CF₄, O₂, and Ar mixed gas were used for the plasma environment, and respective alconox, surfactant, and piranha solution was used for the cleaning process. After APS-Y₂O₃ was exposed to CF₄ plasma, the surface changed from Y₂O₃ to YF₃ and a large amount of carbon was deposited. For this reason, the plasma corrosion resistance was lowered and contamination particles were generated. We performed a cleaning process to remove the defect-inducing surface YF₃ layer and carbon layer. Among three cleaning solutions, the piranha cleaning process had the highest detergency and the alconox cleaning process had the lowest detergency. Such results could be confirmed through the etching amount, morphology, composition, and accumulated contamination particle analysis results. Piranha cleaning process showed the highest detergency, but due to the very large thickness reduction, the base metal was exposed and a large number of contaminated particles were generated. In contrast, the surfactant cleaning process exhibit excellent properties in terms of surface detergency, etching amount, and accumulated contamination particle analysis.

• Journal of the Korean Society for Heat Treatment
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• v.33 no.4
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• pp.185-192
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• 2020

In this study, materials characterization of pure copper and copper based carbon nano-tube composite prepared by powder metallurgy method were investigated. Prior to evaluate materials characterization, spark plasma sintering processing variables such as sintering temperature, pressure, thickness and diameter of compacts was optimized to ensure the microstructure and materials property of pure Cu and Cu-CNT composite. In addition, corrosion behavior of Cu-based CNT composite produced by powder sintering method was investigated. It was confirmed from this study that the corroded surfaces of the composite shows less dissolution compared with pure copper in 3.5 wt% NaCl solution. The measured corrosion current density (I_corr) indicates improved corrosion property of Cu based composite containing small additions of CNTs in chloride containing media. Micro-galvanic activity between Cu and CNT was not observed in given sintering condition.

• Journal of the Korean institute of surface engineering
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• v.38 no.1
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• pp.1-6
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• 2005

Ni-15at.% W coatings with film thicknesses of 20-40 ㎛ were electroplated on a steel substrate, and their oxidation behavior was investigated at 700 and 800℃ in air. For comparison, a pure Ni coating and a bulk Ni were also oxidized. The Ni-15at.%W coating displayed the worst oxidation resistance, due to the formation of less-protective NiO, Fe₂O₃, NiFe₂O₄ and NiWO₄. The corrosion behavior Ni-15at.%W coatings electroplated on a steel substrate was similarly investigated at 700 and 800℃ in the Ar-l%SO₂ atmosphere. For comparison, the uncoated steel substrate was also corrosion-tested in the Ar-l %SO₂ atmosphere. Severe scale spallation and the internal corrosion of the steel that occurred in the uncoated substrate were not observed in the coated specimen. However, it seemed that the Ni-15at.%W coating cannot be a potential candidate as a sulfidation-resistant coating, due to the formation of less-protective NiO, NiS, WO₃ and NiWO₄.

• Journal of the Korean institute of surface engineering
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• v.36 no.1
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• pp.79-84
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• 2003

$WC-Ti_{1}$ -xA $l_{x}$ N multilayered coatings are performed by their periodically repeated structures of lamellae of WC-Ti/$WC-Ti_{1}$ -xA $l_{x}$ Nmaterials. The $WC-Ti_{1}$ -xA $l_{x}$ N coatings with variable Al content were deposited onto AISI D2 steel by cathodic arc deposition (CAD) method. The electrochemical behavior of multilayered $WC-Ti_{1}$ -xA $l_{x}$ N coatings with different phases (WC- Ti$0.6/Al_{0.4}$ N, $WC-Ti_{0.53}$$Al_{0.47}$N, $WC-Ti_{0.5}$ $Al_{0.5}$ N and $WC-Ti_{ 0.43}$$Al_{0.57}$ N) was investigated in deaerated 3.5% NaCl solution at room temperature. The corrosion behaviors for the multilayered coatings were investigated by electrochemical techniques (potentiodynamic polarization) and surface analyses (X-ray diffraction (XRD), scanning electron microscopy (SEM), and glow discharge optical emission spectroscopy (GDOES)). In the petentiodynamic polarization test, the corrosion current density of $WC-Ti_{0.5}$$Al_{0.5}$N was lower than others.

• Korean Journal of Materials Research
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• v.28 no.10
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• pp.544-550
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• 2018

The passivation of AZ91D Mg alloys by plasma anodization requires deliberate choice of process parameters due to the presence of large amounts of structural defects. We study the dependence of pore formation, surface roughness and corrosion resistance on voltage by comparing the direct current (DC) mode and the pulse wave (pulse) mode in which anodization is performed. In the DC plasma anodization mode, the thickness of the electrolytic oxide film of the AZ91D alloy is uneven. In the pulse mode, the thickness is relatively uniform and the formed thin film has a three-layer structure. The pulse mode creates less roughness, uniform thickness and improved corrosion resistance. Thus, the change of power mode from DC to pulse at 150 V decreases the surface roughness (Ra) from $0.9{\mu}m$ to $0.1{\mu}m$ and increases the corrosion resistance in rating number (RN) from 5 to 9.5. Our study shows that an optimal oxide film can be obtained with a pulse voltage of 150 V, which produces an excellent coating on the AZ91D casting alloy.

• Journal of Electrical Engineering and Technology
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• v.10 no.4
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• pp.1746-1751
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• 2015

In this study low voltage Plasma Electrolytic Oxidation (PEO) was utilized to eliminate high voltage PEO drawbacks such as high cost, dimensional deformation and porosity. Low voltage PEO produces a thin coating which causes low corrosion resistance. In order to solve such problem, 0.1~0.6M pyrophosphates were added in a bath containing 1.4M NaOH, and 0.35M Na₂SiO₃. 70 V PEO was conducted at 25℃ for 3 minutes. Chemical composition, morphology and corrosion resistance of the anodized coating were analyzed. The anodized film was composed of MgO, Mg₂SiO₄, and Mg₂O₇P₂. The morphology of film showed appropriately dense structure and low porosity in the anodized layers. It is found that low voltage Plasma Electrolytic Oxidation in cooperation with phosphating treatment can provide a good corrosion protection for the AZ31B magnesium alloy.

• Journal of the Korean institute of surface engineering
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• v.47 no.5
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• pp.221-226
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• 2014

A low temperature plasma nitrocarburizng was implemented on the duplex stainless steel to achieve the enhancement of surface hardness without degradation of its corrosion resistance. Attempts were made to investigate the influence of Pulse frequency and Duty factor of pulsed power in a high Pulse frequency regime on the surface characteristics of the hardened layer. The hardened layer (S-phase) was formed on all of the treated surfaces. Surface hardness reached up to 1300 $HV_{0.1}$ which is about 4.6 times higher than that of the untreated material (280 $HV_{0.1}$). The thickness of the hardened layer tends to increase lightly with the higher Pulse frequency and the higher Duty factor. The corrosion resistance of nitrocarburized duplex stainless steel was almost similar to that of the untreated material. Both the Pulse frequency and the Duty factor do not have a significant influence on the corrosion property of plasma treated duplex stainless steel.

• Korean Journal of Materials Research
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• v.25 no.6
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• pp.293-299
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• 2015

In this study, nitrogen ions were implanted into STS 316L austenitic stainless steel by plasma immersion ion implantation (PIII) to improve the corrosion resistance. The implantation of nitrogen ions was performed with bias voltages of -5, -10, -15, and -20 kV. The implantation time was 240 min and the implantation temperature was kept at room temperature. With nitrogen implantation, the corrosion resistance of 316 L improved in comparison with that of the bare steel. The effects of nitrogen ion implantation on the electrochemical corrosion behavior of the specimen were investigated by the potentiodynamic polarization test, which was conducted in a 0.5 M $H_2SO_4$ solution at $70^{\circ}C$. The phase evolution and texture caused by the nitrogen ion implantation were analyzed by an X-ray diffractometer. It was demonstrated that the samples implanted at lower bias voltages, i.e., 5 kV and 10 kV, showed an expanded austenite phase, ${\gamma}_N$, and strong (111) texture morphology. Those samples exhibited a better corrosion resistance.

• Proceedings of the Korean Vacuum Society Conference
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• 2004.02a
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• pp.143-143
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• 2004

• Journal of the Korean institute of surface engineering
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• v.42 no.3
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• pp.116-121
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• 2009

The 2-step low temperature plasma processes (the combined carburizing and post-nitriding) offer the increase of both surface hardness and thickness of hardened layer and corrosion resistance than the individually processed low temperature nitriding and low temperature carburizing techniques. The 2-step low temperature plasma processes were carried out for improving both the surface hardness and corrosion resistance of AISI 316L stainless steel. The influence of gas compositions on the surface properties during nitriding step were investigated. The expanded austenite (${\gamma}_N$) was formed on all of the treated surface. The thickness of ${\gamma}_N$ and concentration of N on the surface increased with increasing both nitrogen gas and Ar gas levels in the atmosphere. The thickness of ${\gamma}_N$ increased up to about $20{\mu}m$ and the thickness of entire hardened layer was determined to be about $40{\mu}m$. The surface hardness was independent of nitrogen and Ar gas contents and reached up to about 1200 $HV_{0.1}$ which is about 5 times higher than that of untreated sample (250 $HV_{0.1}$). The corrosion resistance in 2-step low temperature plasma processed austenitic stainless steels was also much enhanced than that in the untreated austenitic stainless steels due to a high concentration of N on the surface.