• Journal of the Semiconductor & Display Technology
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• v.21 no.3
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• pp.74-79
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• 2022

In this study, the plasma corrosion resistance and the change in the number of contamination particles generated using the plasma etching process and cleaning process of coating parts for semiconductor plasma etching equipment were investigated. As the coating method, atmospheric plasma spray (APS) was used, and the powder materials were Y₂O₃ and Y₃Al₅O₁₂ (YAG). There was a clear difference in the densities of the coatings due to the difference in solubility due to the melting point of the powdered material. As a plasma environment, a mixed gas of CF₄, O₂, and Ar was used, and the etching process was performed at 200 W for 60 min. After the plasma etching process, a fluorinated film was formed on the surface, and it was confirmed that the plasma resistance was lowered and contaminant particles were generated. We performed a surface cleaning process using piranha solution(H₂SO₄(3):H₂O₂(1)) to remove the defect-causing surface fluorinated film. APS-Y₂O₃ and APS-YAG coatings commonly increased the number of defects (pores, cracks) on the coating surface by plasma etching and cleaning processes. As a result, it was confirmed that the generation of contamination particles increased and the breakdown voltage decreased. In particular, in the case of APS-YAG under the same cleaning process conditions, some of the fluorinated film remained and surface defects increased, which accelerated the increase in the number of contamination particles after cleaning. These results suggest that contaminating particles and the breakdown voltage that causes defects in semiconductor devices can be controlled through the optimization of the APS coating process and cleaning process.

• Journal of Ocean Engineering and Technology
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• v.19 no.5 s.66
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• pp.43-49
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• 2005

This paper is to investigate the effect of corrosion by acoustic emission method in tensile loading and the adhesiveness between substrate and coating layer. The powders used are Zn and Amdry625, respectively. They are coated on brass alloy substrate. AE signals of Zn and Amdry625 coating layer increase drastically in strain $2\%$. However, those of Zn specimen have more than those of Amdry625 specimen. When the specimens executed the corrosion test under $3.5\%$ NaCl solution for 500, 1000 hours, the salt solution penetrated into the surface of the substrate through the pores of the coating layer. As a result, corrosion production formed on the surface of the substrate. The adhesiveness between coating layers is weakened by the polarization and corrosion itself. The AE event, count, and energy of corroded coating specimens decrease, compared to specimens without corrosion. The results are summarized as follows : 1. In the tensile tests, the time that it took to start and develop the cracks and exfoliations between the surface of the substrates and the plasma spray coatings were different according to the type of plasma sprayed material, which are Zn and Amdry625. These phenomena were obvious at the strain rate 1 to $5\%$, and few available data were found after that stage. 2. The specimens with Zn coating showed the characteristics of crack, according to the changes of the tensile strength applied on the substrates while those with Amdry625 showed exfoliation as a result of low adaptation to the tensile strength. 3. The anti-corrosion specimens showed that the adhesive properties between the substrate and the plasma spray coating were strong in the order of Zn, Amdry. It showed that Corroded specimens cracked or exfoliated easily, even with the small energy, because those had a comparatively weakened adhesive property, due to corrosion. 4. Zn specimen showed no corrosion phenomena on the surface of the substrates, because they had the function of sacrifice anode however, Amdry625 specimen showed the corrosion, because it did not have that function.

• Korean Journal of Materials Research
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• v.14 no.1
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• pp.52-58
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• 2004

The surface property and formation behavior of a boride layer formed on Ni-Cr-Mo steel in a plasma paste boronizing treatment were investigated. The plasma paste boronizing treatment was carried out at 973～1273 K for 1-7 hrs under the gas ratio of Ar:H$_2$ (2:1). The thickness of the boride layer increased with increasing temperature and time in the boronizing treatment. The cross-section of the boride layer was a tooth structure and the hardness was Hv 2000～2500. XRD analysis revealed that the compound was identified as FeB, $Fe_2$B, and mixed phase of FeB/$Fe_2$B in the boride layer formed at 973～1073 K, 1173K, and 1273K, respectively. The Ni-Cr-Mo alloy boronized at 1173-1273 K showed the best excellent wear resistance against the sand. As a results of corrosion test in 1 M $H_2$$SO_4$ solution, $Fe_2$B formed on the matrix alloy exhibited higher corrosion resistance than FeB.

• Applied Science and Convergence Technology
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• v.25 no.1
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• pp.15-18
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• 2016

Study investigated the optimal anodizing conditions for fabricating an oxide film that produces less contamination in a corrosive plasma environment, using oxalic acid and tartaric acid. Oxide films were produced using sulfuric acid, oxalic acid, and tartaric acid electrolyte mixtures with various mole ratios. The oxide film made by adding 0.05M tartaric acid to 0.3M oxalic acid showed higher breakdown voltage and lower leakage current. Additionally, contamination particles were reduced during plasma etching, thus demonstrates that this mixture presented optimal conditions. However, higher tartaric acid content (0.1 M, 0.15 M) led to lower breakdown voltages and higher leakage currents. Also, it resulted in more cracking during thermal shock tests as well as the generation of more contamination particles during plasma processing.

• Journal of the Korean Society for Heat Treatment
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• v.14 no.2
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• pp.103-109
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• 2001

Plasma nitrocarburising and post oxidation were performed on SM45C steel using a plasma nitriding unit. Nitrocarburising was carried out with various methane gas compositions with 4 torr gas pressure at $570^{\circ}C$ for 3 hours and post oxidation was carried out with 100% oxygen gas atmosphere with 4 torr at different temperatures for various times. It was found that the compound layer produced by plasma nitrocarburising consisted of predominantly ${\varepsilon}-Fe_{2-3}(N,C)$ and a small proportion of ${\gamma}-Fe_4(N,C)$. With increasing methane content in the gas mixture, ${\varepsilon}$ phase compound layer was favoured. In addition, when the methane content was further increased, cementite was observed in the compound layer. The very thin oxide layer on top of the compound layer was obtained by post oxidation. The formation of Oxide phase was initially started from the magnetite($Fe_3O_4$) and with increasing oxidation time, the oxide phase was increased. With increasing oxidation temperature, oxide phase was increased. However the oxide layer was split from the compound layer at high temperature. Corrosion resistance was slightly influenced by oxidation times and temperatures.

• Korean Journal of Metals and Materials
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• v.47 no.11
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• pp.716-721
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• 2009

The major drive for the application of low-temperature plasma treatment in nitrocarburizing of austenitic stainless steels lies in improved surface hardness without degraded corrosion resistance. The low-temperature plasma nitrocarburizing was performed in a gas mixture of $N_{2}$, $H_{2}$, and carbon-containing gas such as $CH_{4}$ at $450^{\circ}C$. The influence of the processing time (5~30 h) and $N_{2}$ gas composition (15~35%) on the surface properties of the nitrocarburized layer was investigated. The resultant nitrocarburized layer was a dual-layer structure, which was comprised of a N-enriched layer (${\gamma}_N$) with a high nitrogen content on top of a C-enriched layer (${\gamma}_C$) with a high carbon content, leading to a significant increase in surface hardness. The surface hardness reached up to about $1050HV_{0.01}$, which is about 4 times higher than that of the untreated sample ($250HV_{0.01}$). The thickness of the hardened layer increased with increasing treatment time and $N_{2}$ gas level in the atmosphere and reached up to about $25{\mu}m$. In addition, the corrosion resistance of the treated samples without containing $Cr_{2}N$ precipitates was enhanced than that of the untreated samples due to a high concentration of N on the surface. However, longer treatment time (25% $N_{2}$, 30 h) and higher $N_{2}$ gas composition (35% $N_{2}$, 20 h) resulted in the formation of $Cr_{2}N$ precipitates in the N-enriched layer, which caused the degradation of corrosion resistance.

• Corrosion Science and Technology
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• v.3 no.1
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• pp.26-29
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• 2004

Metal plated plastics are becoming more prevalent in materials of communication parts. A new technique MmSH is a process of injecting plastics to produce innovated physical properties compared to the conventional injection process. This study involves two ways of coating plastics Ni by electroless plating and varying bath and plasma treatment for improved adhesion strength between plating layer and surface. MmSH injection processed ASS with plasma treated after neutralization showed a superior adhesion force and a gloss and rate of deposition when it was in pH 7.5. On the other hand, conventional injection processed ASS was in pH 6.5.

• Corrosion Science and Technology
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• v.5 no.6
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• pp.213-217
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• 2006

Titania coatings were prepared on commercially pure Ti by plasma electrolytic oxidation (PEO) method with various electrolytes and process condition. Coatings were formed under galvanostatic condition with several current density values, and the change of applied voltage with process time was recorded. The microstructure of the titania coatings was observed using XRD, SEM, TEM, and the time-voltage diagrams were analyzed in terms of microstructure evolution.

• Corrosion Science and Technology
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• v.4 no.1
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• pp.23-28
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• 2005

Several plasma-sprayed ceramic coatings with two- and three-layers were characterized and tested for the application of cooling tube coatings of oxygen convert gas recovery system (OG cooling system) in the steel making plant. Thermal cycling tests using a torch heating with compressed air cooling were carried out and characterized before and after the tests. The effects of metallic bond coat as well as ceramic top coat were also studied. Possible failure mechanisms with low carbon steel substrate were assessed in term of microstructure, porosity, bond strength, thermal expansion coefficient, and the phase transformation. Finally, the results of field tests at the OG cooling system are presented and discussed their microstructural degradation. Test results have shown that three-layered coatings perform better than two-layered coatings.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09a
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• pp.53-54
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• 2006

Ti-Zr-Ni coatings deposited by low vacuum plasma spray technique consisted of nanometer-sized $W-Ti_{50}Zr_{35}Ni_{15}$ 1/1 cubic approximant and TiZrNi Laves phases as well as a low volume fraction of $ZrO_2$ phase. The shift of composition during deposition of the quasicrystalline powders and the presence of $ZrO_2$ phases are believed to be responsible for the reduced corrosion performances evaluated by means of electrochemical tests in a Hanks' Balance Salt Solution at $37^{\circ}C$.