• Korean Journal of Optics and Photonics
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• v.17 no.1
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• pp.54-59
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• 2006

Biophotonic sensors based on polymer waveguide with Bragg reflection grating are demonstrated in this work. Waveguide Bragg reflectors were designed by using the effective index method and the transmission matrix method. The grating pattern was formed by exposing the laser interference pattern on a photoresist. On top of the inverted rib waveguide, the Bragg reflection grating was inscribed by the O2 plasma etching. In order to perform the bio-molecule detection experiment, a calixarene molecule was self-assembled on top of thin Au film deposited on the waveguide Bragg reflector. To measure the response of the sensor, several PBS solutions with different concentrations of potassium ion from 1 pM to $100\;{\mu}M$ were dropped on the sensor surface. The shift of Bragg reflection wavelength was observed from the fabricated sensor device, which was proportional to the concentration of potassium ion ranging from 1 pM to 108 pM.

• Journal of Welding and Joining
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• v.21 no.7
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• pp.34-41
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• 2003

Weld quality monitoring and seam tracking along the butt-joint lengthwise to the tube axis are studied. The material of tube is 60kg/$\textrm{mm}^2$ grade steel sheet, and the longitudinal butt-joint is shaped by 2 roll bending machine. The tube with a thickness of 1.5mm, diameter of 105.4mm and length of 2000mm is successfully obtained by the $CO_2$ laser welding system equipped with a seam tracker and plasma sensor. Experimental results show that the developed welding system can be used for the precision seam tracking and the real-time monitoring of weld quality, and the laser welded tube can be used for car body md component after tubular hydroforming.

• Particle and aerosol research
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• v.11 no.4
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• pp.93-98
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• 2015

Particles which generated from plasma enhanced chemical vapor deposition (PECVD) during thin film deposition process can affect to the process yield. By using light extinction method, ISPM can measure particles in the large-diameter pipe (${\leq}300mm$). In our research, in-situ particle monitor (ISPM) sensor was installed at the 300 mm diameter exhaust-line to count the particles in each size. In-house flange for mounting the transmitting and receiving parts of ISPM was carefully designed and installed at a certain point of exhaust line where no plasma light affect to the light extinction measurement. Measurement results of trend changes on particle count in each size can confirm that ISPM is suitable for real-time monitoring of vacuum process.

• Journal of Sensor Science and Technology
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• v.14 no.6
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• pp.423-429
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• 2005

In this paper, we proposed the fabrication process of the stable e-beam evaporation and the patterning of metals layer on the polydimethylsiloxane (PDMS) substrate. The metal layer was deposited under the various deposition rate, and its effect to the electrical and mechanical properties (e.g.: adhesion-strength of metal layer) was investigated. The influence of surface roughness to the adhesion-strength was also examined via the tape test. Here, we varied the roughness by changing the reactive ion etching (RIE) duration. The electrode patterning was performed through the conventional photolithography and chemical etching process after e-beam deposition of $200{\AA}$ Ti and $1000{\AA}$ Au. As a result, the adhesion strength of metal layer on the PDMS surface was greatly improved by the oxygen plasma treatment. The e-beam evaporation on the PDMS surface is known to create the wavy topography. Here, we found that such wavy patterns do not effect to the electrical and mechanical properties. In conclusion, the metal patterns with minimum $20{\mu}m$ line width was produced well via the our fabrication process, and its electrical conductance was almost similar to the that of metal patterns on the silicon or glass substrates.

• Transactions on Electrical and Electronic Materials
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• v.15 no.3
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• pp.164-169
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• 2014

We investigated the etching characteristics of $HfAlO_3$ thin films in $O_2/Cl_2/Ar$ and $O_2/BCl_3/Ar$ gas, using a high-density plasma (HDP) system. The etch rates of the $HfAlO_3$ thin film obtained were 30.1 nm/min and 36 nm/min in the $O_2/Cl_2/Ar$ (3:4:16 sccm) and $O_2/BCl_3/Ar$ (3:4:16 sccm) gas mixtures, respectively. At the same time, the etch rate was measured as a function of the etching parameter, namely as the process pressure. The chemical states on the surface of the etched $HfAlO_3$ thin films were investigated by X-ray photoelectron spectroscopy. Auger electron spectroscopy was used for elemental analysis on the surface of the etched $HfAlO_3$ thin films. These surface analyses confirm that the surface of the etched $HfAlO_3$ thin film is formed with nonvolatile by-product. Also, Cl-O can protect the sidewall due to additional $O_2$.

• Journal of the Korean Graphic Arts Communication Society
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• v.26 no.2
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• pp.31-43
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• 2008

The functional dyes, which has various optical characteristics that can be applicable to field of electronic, photo electronic, such as sensor or electrode, were synthesized. Physical property and optical stability was studied with preparation of conductive type film as a kind of optical filter of plasma display panel, by adapting neon cut off dye, which can selectively absorbing between 580 and 610nm wavelength. The filter was prepared with PSA resin, which has functional group of - COOH and - OH, as binder. And the characters such as spectroscopy, heat-proof / wet-proof, thermal stability and commerciality, which must be held by functional dyes, were examined. Conductive type film is the kind of film includes only neon cut off dyes. For the neon cut off dyes, cyanine dyes can be applied. And it is observed that spectrum of before and after the durability test are not changed due to stability of dyes, as the result of coating on the mesh film with PSA binder.

• Journal of the Semiconductor & Display Technology
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• v.22 no.4
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• pp.53-58
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• 2023

The storage capacity of 3D-NAND flash memory has been enhanced by the multi-layer dielectrics. The deposition process has become more challenging due to the tight process margin and the demand for accurate process control. To reduce product costs and ensure successful processes, process diagnosis techniques incorporating artificial intelligence (AI) have been adopted in semiconductor manufacturing. Recently there is a growing interest in process diagnosis, and numerous studies have been conducted in this field. For higher model accuracy, various process and sensor data are required, such as optical emission spectroscopy (OES), quadrupole mass spectrometer (QMS), and equipment control state. Among them, OES is usually used for plasma diagnostic. However, OES data can be distorted by viewport contamination, leading to misunderstandings in plasma diagnosis. This issue is particularly emphasized in multi-dielectric deposition processes, such as oxide and nitride (ON) stack. Thus, it is crucial to understand the potential misunderstandings related to OES data distortion due to viewport contamination. This paper explores the potential for misunderstanding OES data due to data distortion in the ON stack process. It suggests the possibility of excessively evaluating process drift through comparisons with a QMS. This understanding can be utilized to develop diagnostic models and identify the effects of viewport contamination in ON stack processes.

• Journal of the Microelectronics and Packaging Society
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• v.29 no.4
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• pp.21-27
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• 2022

Flexible pressure sensor was developed using low-cost conductive graphite as printed electronics. Flexible pressure sensors are attracting attention as materials to be used in future industries such as medical, games, and AI. As a result of evaluating various electromechanical properties of the printed electrode for flexible pressure sensors, it showed a constant resistance change rate in a maximum tensile rate of 20%, 30° tension/bending, and a simple pulse test. A more appropriate matrix pattern was designed by simulating the electrodes for which this verification was completed. Utilizing the Serpentine pattern, we utilized a process that allows simultaneous fabrication and encapsulation of the matrix pattern. One side of the printed graphite electrode was O₂ plasma surface treated to increase adhesive strength, rotated 90 times, and two electrodes were made into one through a lamination process. As a result of pasting the matrix pattern prepared in this way to the wrist pulse position of the human body and proceeding with the actual measurement, a constant rate of resistance change was shown regardless of gender.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.30 no.5
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• pp.189-193
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• 2020

Recently, various methods for preparing a flexible electrode for implementing a wearable sensor have been introduced. Wearable sensors show similar tendency to use various polymer substrates, which provides elasticity suitable to the motion of human body. In this paper, a highly elastic silver nanowire based electrode was prepared on a sponge-based stretchable substrate, and electrical properties were evaluated. Silver nanowires were grown using a wet chemical synthesis, impregnated into a plasma-treated sponge, and then heat treated at a low temperature. In particular, the plasma surface treatment of the sponge enables uniform coating of silver nanowires. The flexible sponge electrode showed reliable electrical resistance changes over 160 repeated tensile-compression cycles.

• Journal of IKEEE
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• v.19 no.4
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• pp.541-547
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• 2015

In current semiconductor manufacturing, as the feature size of integrated circuit (IC) devices continuously shrinks, detecting endpoint in plasma etching process is more difficult than before. For endpoint detection, various kinds of sensors are installed in semiconductor manufacturing equipments, and sensor data are gathered with predefined sampling rate. Generally, detecting endpoint is performed using OES data of by-product. In this study, OES data of both by-product and etchant gas are used to improve reliability of endpoint detection. For the OES data pre-processing, a combination of Signal to Noise Ratio (SNR) and Principal Component Analysis (PCA),are used. Polynomial Regression and Expanded Hidden Markov model (eHMM) technique are applied to pre-processed OES data to detect endpoint.