• Transactions on Electrical and Electronic Materials
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• v.8 no.5
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• pp.211-214
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• 2007

Chemical and morphological changes of phenol formaldehyde-based photoresist after $O_2$ radiofrequency(RF) plasma treatment depending on exposure time and source power were investigated. It was found that etch rate of photoresist sharply increased after discharge turn on and reached a limit with increase in plasma exposure time. Contact angle measurements and X-ray photoelectron spectroscopy(XPS) analysis showed that the surface chemical structure become nearly constant after 15 sec of the treatment. Atomic force microprobe(AFM) measurements were shown that surface roughness was increased with plasma exposure time.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.458-458
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• 2012

Fuel Cell is used stacking metal or polymer substrate. This hydro property of substrate surface is very important. Usually, surface property is hydrophilic. The surface oxidation of SUS is investigated through plasma treatments with an atmospheric-pressure dielectric barrier discharge (DBD) for increasing hydrophilic property. The plasma process makes an experiment under various operating conditions of the DBD, which operating conditions are treatment time, plasma gas mixture ratio, the plasma source supply frequency. Two kinds of SUS substrate, SUS-304 and SUS 316L, were used. Discharge frequency has a crucial impact on equipment performance and gas treatment. After the plasma treatment of a SUS plate, highly improved wettability was noted. But, when high oxygen supply, the substrate damaged seriously.

• Transactions on Electrical and Electronic Materials
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• v.2 no.4
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• pp.7-10
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• 2001

A new possibility of our atmospheric cold plasma torch has been examined on the surface treatment of an air-exposed vulcanized rubber compound. The plasma treatment effect was evaluated by the bondability with another rubber compound using a polyurethane adhesive. The adhesion property was improved by the treatment with plasma containing oxygen radicals. The oxygen radical generation from the plasma was verified and its efficiency was found to be dependent on the cathode material.

• Textile Coloration and Finishing
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• v.16 no.5
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• pp.35-41
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• 2004

Poly(ethylene terephthalate), polyimide(Kapton), and polypropylene surfaces were modified with argon low temperature plasma by RF glow discharge at 240m Torr, 40W to investigate the surface morphological changes due to the plasma treatment using atomic force microscopy(AFM). Analysis of the AFM images and Ra(average roughness) revealed that the plasma treatment resulted in significant ablation on the surfaces. The morphological changes and surface roughness, however, were different depending on material characteristics such as heat stability, presence of amorphous region, swelling phenomenon, and molecular structure of repeating unit. It was assumed that polypropylene due to its tertiary hydrogen was ablated easily compared to poly(ethylene terephthalate), and that polyimide was more resistant to the ablation than PET due to rigid skeleton of imide and stable phenyl ring structure.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.376-376
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• 2016

Poly(ethylene oxide) (PEO)/functionalized bacterial cellulose nanowhiskers (f-BCNW) (0.1 wt%) composite nanofibers were fabricated by electrospinning process and the thermomechanical properties were significantly enhanced more than the PEO and PEO/bacterial cellulose nanowhiskers (BCNW) (0.1 wt%) composite nanofibers. The functionalization of BCNW (f-BCNW) was performed by microwave plasma treatment for effects of nitrogen functionalization of chemically-driven BCNW. The N-containing functional groups of f-BCNW enhanced chemical bonding between the hydroxyl groups of the polymer chains in the PEO matrix and diameter size of PEO/f-BCNW (0.1 wt%) composite nanofibers were decreased more than PEO and PEO/BCNW (0.1 wt%) composite nanofibers on the same concentration. The strong interfacial interactions between the f-BCNW nanofillers and polymer matrix were improved the thermomechanical properties such as crystallization temperature, weight loss and glass transition temperature (Tg) compared to PEO and PEO/BCNW composites nanofibers. The results demonstrated that N2 plasma treatment of BCNW is very useful in improving thermal stability for bio-applications.

• Proceedings of the KIEE Conference
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• 1991.11a
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• pp.304-306
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• 1991

A new gas-flow type reactor for plasma polymerization was developed to symthesize functional polymer, which enhances the reaction of radicals activated in discharge. $\alpha$-Methylstyrene was used for the polymerization, which are known as starting monomers for the polymer with degradating characteristics. The molecular structure and molecular weight distribution of the polymers were studied.

• Proceedings of the KIEE Conference
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• 2011.07a
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• pp.1475-1476
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• 2011

플라즈마 중합 기법에 의해 제작된 고분자 (plasma polymerized polymer) 박막은 단량체(monomer)의 고유의 특성을 유지하며 고분자 박막이 형성됨을 확인하고, 기판 바이어스에 의해 시간에 따른 증착 두께는 선형적으로 증가함을 확인하였다. 자체 제작된 플라즈마 중합 시스템에서 self-bias voltage를 최소화하여 플라즈마 고분자의 증착효율 및 두께 조절이 가능함을 확인하였다. 플라즈마 합성을 이용해 고분자 박막을 제조하고, MIM 소자를 제작하여 통상적인 고분자 합성기법으로 제조된 고분자 대비 높은 유전상수 값이 확인되었다. 결과적으로 유기박막 트랜지스터 및 유기 메모리 등 플렉서블 유기전자소자용 절연/유전체 박막으로의 응용이 기대된다.

• 한국정보디스플레이학회:학술대회논문집
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• 2009.10a
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• pp.370-373
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• 2009

X-ray lithography was employed to fabricate ITO-less high resolution sustain electrodes for plasma display panel (PDP). A polyimide film based X-ray mask and Xray sensitive Ag electrode paste were fabricated to check their effect on the patterning of Ag electrodes with less than 30 ${\mu}m$ in width. The X-ray lithographic method was found to be useful for the high resolution sustain electrode patterns due to the high penetration power and low scattering property of X-ray source.

• Macromolecular Research
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• v.12 no.6
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• pp.608-614
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• 2004

Isotactic polypropylene (PP) surfaces were modified with argon and oxygen plasmas using a radio­frequency (RF) glow discharge at 240 mTorr and 40 W. The changes in topography and surface structure were investigated by atomic force microscopy (AFM) in conjunction with specular reflectance of infrared (IR) microspectroscopy. Under our operating conditions, the AFM image analysis revealed that longer plasma treatment resulted in significant ablation on the PP surface, regardless of the kind of plasma employed, but the topography was dependent on the nature of the gases. Specular reflectance IR spectroscopic analysis indicated that the constant removal of surface material was an important ablative aspect when using either plasma, but the nature of the ablative behavior and the resultant aging effects were clearly dependent on the choice of plasma. The use of argon plasma resulted in a negligible aging effect; in contrast, the use of oxygen plasma caused a noticeable aging effect, which was due to reactions of trapped or isolated radicals with oxygen in air, and was partly responsible for the increased surface area caused by ablation. The use of oxygen plasma is believed to be an advantageous approach to modifying polymeric materials with functionalized surfaces, e.g., for surface grafting of unsaturated monomers and incorporating oxygen-containing groups onto PP.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2009.05a
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• pp.105-105
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• 2009