한국정보디스플레이학회:학술대회논문집
- 2009.10a
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- Pages.370-373
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- 2009
Fabrication of ITO-less Sustain Electrodes for High Resolution Plasma Display Panel by X-Ray Lithographic Process
- Ryu, Seung-Min (Sch. of Mechanical Engineering & Aerospace System, KAIST) ;
- Yang, Dong-Yol (Sch. of Mechanical Engineering & Aerospace System, KAIST) ;
- So, Jae-Yong (Dept. of Polymer Science, Kyungpook Nat. Univ.) ;
- Park, Lee-Soon (Dept. of Polymer Science, Kyungpook Nat. Univ.) ;
- Cheong, Hee-Woon (Dept. of Electrical Engineering & Computer Science, Seoul Nat. Univ.) ;
- Whang, Ki-Woong (Dept. of Electrical Engineering & Computer Science, Seoul Nat. Univ.)
- Published : 2009.10.12
Abstract
X-ray lithography was employed to fabricate ITO-less high resolution sustain electrodes for plasma display panel (PDP). A polyimide film based X-ray mask and Xray sensitive Ag electrode paste were fabricated to check their effect on the patterning of Ag electrodes with less than 30