• Title/Summary/Keyword: Plasma Kinetics

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$C_{x}F_{y}$ Polymer Film Deposition in rf and dc $C_{7}F_{16}$ Vapor Plasmas

  • Sakai, Y.;Akazawa, M.;Sakai, Yosuke;Sugawara, H.;Tabata, M.;Lungu, C.P.;Lungu, A.M.
    • Transactions on Electrical and Electronic Materials
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    • v.2 no.1
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    • pp.1-6
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    • 2001
  • $C_{x}F_{y}$ polymer film was deposited in rf and dc Fluorinert vapor ($C_{7}F_{16}$) plasmas. In the plasma phase, the spatial distribution of optical emission spectra and the temporal concentration of decomposed species were monitored, and kinetics of the $C_{7}F_{16}$ decomposition process was discussed. Deposition of $C_{x}F_{y}$ film has been tried on substrates of stainless steel, glass, molybdenum and silicon wafers at room temperature in the vapor pressures of 40 and 100 Pa. The films deposited in the rf plasma showed excellent electrical properties as an insulator for multi-layered interconnection of deep-submicron LSI, i.e. the low dielectric constant ∼2.0, the dielectric strength ∼2 MV/cm and the high deposition rate ∼100nm/min at 100W input power.

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Etching Kinetics Of $SrBi_2Ta_2O_{9}$ Thin Film in $Cl_{2}$/$CF_{4}$/Ar gas Chemistry ($Cl_{2}$/$CF_{4}$/Ar gas chemistry에 의한 $SrBi_2Ta_2O_{9}$ 박막의 식각 특성)

  • 김동표;김창일;이원재;유병곤;김태형;장의구
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.62-65
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    • 2001
  • $SrBi_2Ta_2O_{9}$ thin films were etched in inductively coupled $Cl_{2}$/$CF_{4}$/Ar plasma. The maximum etch rate was 1060 $\AA\textrm{m}$/min in $Cl_{2}$/$CF_{4}$/Ar (80). The chemical reactions on the etched surface were studied with x-ray photoelectron spectroscopy. The etching of SBT thin films in $Cl_{2}$/$CF_{4}$/Ar were etched by chemically assisted reactive ion etching. The small addition of $Cl_2$ into $CF_4$(20)/Ar(80) plasma will decrease the fluorine radicals and the increase Cl radical.

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Effects of glycerol and seminal plasma in characteristics of preserved canine spermatozoa (개 정액의 보존시 glycerol 첨가 및 정장제거가 정자의 성상에 미치는 영향)

  • Kim, Kye-seong
    • Korean Journal of Veterinary Research
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    • v.33 no.2
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    • pp.345-350
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    • 1993
  • Multiple ejaculates were collected from four male mongrel dogs. The second fraction and the small volume of third fraction from the ejaculates were divided and treated as follows : control; addition of the egg-yolk Tris extender to the semen at $37^{\circ}C$. group I; Removal of seminal plasma, group II; addition of the glycerolated extender at $4^{\circ}C$, group III Removal of seminal plasma and addition of glycerolated extender at $4^{\circ}C$. The semen cooled to $4^{\circ}C$ was equlibrated for 2hrs and preserved in refrigerator at $4^{\circ}C$. The preserved semen was evaluated for kinetics, morphology, motility and thermoresistance daily for 3 days. 1. The kinectics after preserved days 2 and 3 of group I was significantly higher than that of control(p<0.05). 2. There were no significant difference in abnormal morphology of each group between the periods of storage. 3. The motility after preserved day 1 and days 3 of group I was significantly higher than that of others(p<0.05), and the molity after preserved days 2 of group I and III was signficantly higher than that of others(p<0.05). 4. When the molity of preserved semen was measured during incubation at $37^{\circ}C$, the motility of four groups was declined at similar rates. There was no effect of removal of seminal plasma and glycerol addition on thermoresistance.

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Phenol Removal Using Oxygen-Plasma Discharge in the Water (산소-플라즈마 방전을 이용한 수중의 페놀 제거)

  • Park, Young-Seek
    • Journal of Environmental Science International
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    • v.22 no.7
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    • pp.915-923
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    • 2013
  • Decomposition of non-biodegradable contaminants such as phenol contained in water was investigated using a dielectric barrier discharge (DBD) plasma reactor in the aqueous solutions with continuous oxygen bubbling. Effects of various parameters on the removal of phenol in aqueous solution with high-voltage streamer discharge plasma are studied. In order to choose plasma gas, gas of three types (argon, air, oxygen) were investigated. After the selection of gas, effects of 1st voltage (80 ~ 220 V), oxygen flow rate (2 ~ 7 L/min), pH (3 ~ 11), and initial phenol concentration (12.5 ~ 100.0 mg/L) on phenol degradation and change of $UV_{254}$ absorbance were investigated. Absorbance of $UV_{254}$ can be used as an indirect indicator of phenol degradation and the generation and disappearance of the non-biodegradable organic compounds. Removal of phenol and COD were found to follow pseudo first-order kinetics. The removal rate constants for phenol and COD of phenol were $5.204{\times}10^{-1}min^{-1}$ and $3.26{\times}10^{-2}min^{-1}$, respectively.

A study of CuCl$_{x}$ growth mechanism and etching with Cl$_2$ plasma and PEt$_3$(Tri-ethyl phospine) (Cl$_2$ 플라즈마를 인가한 CuCl$_{x}$성장 및 PEt$_3$를 이용한 CuCl$_{x}$의 식각에 대한 연구)

  • 박성언;김기범
    • Journal of the Korean institute of surface engineering
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    • v.30 no.2
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    • pp.111-120
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    • 1997
  • The growth kinetion of $CuCl_x$ layer on Cu was investigated using $Cl_2$ gas with/without plasma. The etching kinetics ofit was also studied, in which PEt3 gas as well as $Cl_2$ gas were used. when plasma and DC bias were applied, not only the growth rate of $CuCl_x$ layer but also the surface concentration of Cl in $CuCl_x$ layer drastically increased. The growth mode is divided into three regimes, where the thinkness $CuCl_x$ layer ise proportional to t, lo9g $T^{1/2}$ , respectively, whether plasma, is applied or not. These three regime. It is also identified that the eath rate of Cu is drastically increased as the $Cl_2$ pressure is increased. However, when plasma and DC bias were applied, the etching rate is decreased, and ClCu-P-U layer is formed. in addition, as the etching time is increased, the surface concentration of Cl is increased and $CuCl_2$ formed partially.

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The Analysis of Vitamin C Concentration in Organs of $Gulo^{-/-}$ Mice Upon Vitamin C Withdrawal

  • Kim, Hye-Min;Bae, Se-Yeon;Yu, Yeon-Sil;Kim, Ye-Jin;Kim, Hang-Rae;Hwang, Young-Il;Kang, Jae-Seung;Lee, Wang-Jae
    • IMMUNE NETWORK
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    • v.12 no.1
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    • pp.18-26
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    • 2012
  • Background: Vitamin C is an essential nutrient for maintaining human life. Vitamin C insufficiency in the plasma is closely related with the development of scurvy. However, in vivo kinetics of vitamin C regarding its storage and consumption is still largely unknown. Methods: We used $Gulo^{-/-}$ mice, which cannot synthesize vitamin C like human. Vitamin C level in plasma and organs from $Gulo^{-/-}$ mice was examined, and it compared with the level of wild-type mice during 5 weeks. Results: The significant weight loss of $Gulo^{-/-}$ mice was shown at 3 weeks after vitamin C withdrawal. However, there was no differences between wild-type and vitamin C-supplemented $Gulo^{-/-}$ mice (3.3 g/L in drinking water). The concentration of vitamin C in plasma and organs was significantly decreased at 1 week after vitamin C withdrawal. Vitamin C is preferentially deposited in adrenal gland, lymph node, lung, and brain. There were no significant changes in the numbers and CD4/CD8 ratio of splenocytes in $Gulo^{-/-}$ mice with vitamin C withdrawal for 4 weeks. And the architecture of spleen in $Gulo^{-/-}$ mice was disrupted at 5 weeks after vitamin C withdrawal. Conclusion: The vitamin C level of $Gulo^{-/-}$ mice was considerably decreased from 1 week after vitamin C withdrawal. Vitamin C is preferentially stored in some organs such as brain, adrenal gland and lung.

Etching characteristics and modeling of BST thin films using inductively coupled plasma (유도결합 플라즈마를 이용한 BST 박막의 식각 특성 및 모델링)

  • Kim, Gwan-Ha;Kim, Kyoung-Tae;Kim, Dong-Pyo;Lee, Cheol-In;Kim, Tae-Hyung;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.11a
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    • pp.29-32
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    • 2004
  • This work was devoted to an investigation of etching mechanisms for $(Ba,Sr)TiO_3$ (BST) thin films in inductively coupled $CF_4/Ar$ plasma. We have found that an increase of the Ar content in $CF_4/Ar$ plasma causes non-monotonic behavior of BST etch rate, which reaches a maximum value of 40 nm/min at 80% Ar. Langmuir probe measurements show a weak sensitivity of both electron temperature and electron density to the change of $CF_5/Ar$ mixing ratio. O-D model for plasma chemistry gave monotonic changes of both volume densities and fluxes for active species responsible for the etching process. The analysis of surface kinetics confirms the possibility of non-monotonic etch rate behavior due to the concurrence of physical and chemical pathways in ion-assisted chemical reaction.

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Phenol Treatment Plasma Reactor of Dielectric Barrier Discharge (유전체 장벽 방전 플라즈마 반응기를 이용한 페놀 처리)

  • Park, Young-Seek
    • Journal of Environmental Science International
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    • v.21 no.4
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    • pp.479-488
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    • 2012
  • A Dielectric barrier discharge (DBD) plasma is shown in the present investigation to be effective of phenol degradation in the aqueous solutions in batch reactor with continuous air bubbling. Removal of phenol and effects of various parameters on the removal efficiency in the aqueous solution with high-voltage streamer discharge plasma are studied. The effect of 1st voltage (80 ~ 220 V), air flow rate (3 ~ 7 L/min), pH (3 ~ 11), electric conductivity of solution (4.16 ${\mu}S$/cm, deionized water) ~ 16.57 mS/cm (addition of NaCl 10 g/L) and initial phenol concentration (2.5 ~ 20.0 mg/L) were investigated. The observed results showed that phenol degradation was higher in the basic solution than that of the acidic. The optimum values on the 1st voltage and air flow rate for phenol degradation were 140 V and 6 L/min, respectively. It was considered that absorbance variation of $UV_{254}$ of phenol solution can be use as an indirect indicator of change of the non-biodegradable organic compounds within the treated phenol solution. Electric conductivity was not influenced the phenol degradation. To obtain the removal efficiency of phenol and COD of phenol over 97 % (initial phenol concentration, 10.0 mg/L), 80 min and 120 min were need, respectively. Phenol and COD degradation showed a pseudo-first order kinetics.

Study on Reactive Non-thermal Plasma Process combined with Metal Oxide Catalyst for Removal of Dilute Trichloroethylene

  • Han Sang-Bo;Oda Tetsuji;Park Jae-Youn;Park Sang-Hyun;Koh Hee-Seok
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.19 no.3
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    • pp.292-300
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    • 2006
  • In order to improve energy efficiency in the dilute trichloroethylene removal using the nonthermal plasma process, the barrier discharge treatment combined with manganese dioxide was experimentally studied. Reaction kinetics in this process was studied on the basis of final byproducts distribution. Decomposition efficiency was improved to about $99\;\%$ at the specific energy of 40 J/L with passing through manganese dioxide. C=C ${\pi}$ bond cleavage of TCE substances gave DCAC, which has the single bond of C-C through oxidation reaction during the barrier discharge plasma treatment. Those DCAC were broken easily in the subsequent catalytic reaction due to the weak bonding energy about $3{\sim}4\;eV$ compared with the double bonding energy in TCE molecules. Oxidation byproducts of DCAC and TCAA from TCE decomposition are generated from the barrier discharge plasma treatment and catalytic surface chemical reaction, respectively. Complete oxidation of TCE into COx is required to about 400 J/L, but $CO_2$ selectivity remains about $60\;\%$.

Effect of anticancer drug methortrexate on the biliary excretion kinetics of the reudced folate derivatives in rats (항암제 methotrexate가 랫드 담즙중 환원형엽산유도체의 배설동태에 미치는 영향)

  • Shin, Ho-chul;Cha, Shin-woo;Bae, Ju-hyun;Kim, Hyun-ju;Jeong, Tae-cheon;Park, Jong-il;Yoon, Jong-man;Kim, Gye-woong;Kim, Jin-suk;Han, Sang-seop
    • Korean Journal of Veterinary Research
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    • v.36 no.1
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    • pp.57-63
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    • 1996
  • The biliary excretion kinetics of the active folate derivatives were examined after an intravenous injection of methotrexate at doses of 0.3 and 10mg/kg to clarify the mechanism of the acute decrease in the plasma folate by the dihydrofolate reductase inhibitors. Even at a higher dose than used in the clinical therapy, methotrexate did not cause any acute depletion of folate denvatives in the excreted bile. Therefore, the decrease in the plasma folate appeared not to be related with the biliary excretion process of folates. A factor responsible for the plasma folate depletion by DHFR inhibitors may be due to the malabsorption of folate derivatives excreted into the small intestine.

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