• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.1915-1917
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• 2004

Inductively coupled plasma is commonly used for electrodeless lamp due to its ease of plasma generation. Optical characteristics significantly depend on the RF power and gas pressure of the plasma. This paper describes the measurement of luminance as a function of RF power and gas pressure with a goal of finding optimal operating conditions of the electrodeless lamp. The gas pressure was varied from 10 [mTorr] to 500 [mTorr] and the RF power was varied from 10 [W] to 200 [W]. It was found that the luminance tends to be decreased when argon pressure is increased, and the luminance is increased as RF power is increased. It was also found that the luminance per unit RF power is high when the argon pressure is low and when the RF power is in the range of 30 [W]${\sim}$40 [W].

• Journal of Korean Society for Atmospheric Environment
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• v.30 no.4
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• pp.339-349
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• 2014

$CO_2$ emission has been gradually increased due to rising fossil fuel use. A gliding arc plasma scrubber (GAPS) was proposed to destruct $CO_2$. For optimum design of GAPS, a CFD analysis has been conducted in different configuration for the system. The parameters considered included gas injection velocity at the nozzle and gas flow rate to gap between electrodes. The reactor configuration affected velocity fields which caused changes in the mixture fraction and the retention time. The mixing effect of $CO_2$ and supplied gas ($CH_4$ and steam) was enhanced by installing a orifice baffle. This revealed that the orifice baffle is effective in $CO_2$ conversion by positioning the reactants in the gas into the center of plasma discharge.

• Bulletin of the Korean Chemical Society
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• v.27 no.3
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• pp.373-375
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• 2006

$CF_4$ gas is one of the most common chemicals used for dry etching in semiconductor manufacturing processes. For application to the etching process and environmental control, the low-pressure inductively coupled plasma (LP-ICP) was employed to obtain the spectrum of $CF_4$ gas. In terms of the analysis of the spectra, trace CF radical by A-X and B-X transitions was detected. The other $CF_x$ radicals, such as $CF_2$ and $CF_3$, were not seen in this experiment whereas strong C and $C_2$ emissions, dissociation products of $CF_4$ gas, were observed.

• Transactions of the Korean Society of Automotive Engineers
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• v.9 no.1
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• pp.216-221
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• 2001

In this study, the effects of nitriding methods and times on the fatigue strength of SACM 645 steel were investigated. The rotary bending tests were carried out to obtain and compare the fatigue strengths of plasma ion nitrided specimens and gas nitride specimen. The 70 hr. gas nitrided specimen had the highest fatigue strength of 1.05$\times$$10^3$ MPa over the 40 hr., 70 hr. and 90 hr. plasma ion nitrided specimens, which had the fatigue strength of 3.48$\times$$10^2$, 4.57$\times$$10^2$ and 4.64$\times$$10^2$ respectively. Also, the microhardness tests were conducted to measure the effective case depths. The plasma ion nitrided specimens showed much higher surface hardness values than the gas nitrided specimen overall.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.2
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• pp.39-43
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• 2008

Atmospheric pressure plasma polishing (APPP) is a noncontact precision machining technology that uses low temperature plasma chemical reactions to perform atom-scale material removal. APPP is a complicated process, which is affected by many factors. Through a preliminary theoretical analysis and simulation, we confirmed that some of the key factors are the radio frequency (RF) power, the working distance, and the gas ratio. We studied the influence of the RF power and gas ratio on the removal rate using atomic emission spectroscopy, and determined the removal profiles in actual operation using a commercial form talysurf. The experimental results agreed closely with the theoretical simulations and confirmed the effect of the working distance. Finally, we determined the element compositions of the machined surfaces under different gas ratios using X-ray photoelectron spectroscopy to study the influence of the gas ratio in more detail. We achieved a surface roughness of Ra 0.6 nm on silicon wafers with a peak removal rate of approximately 32 $mm^{3}$/min.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.492-492
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• 2012

RF biased inductively coupled plasma (ICP) has been widely used in various semiconductor etching processes and laboratory plasma researches. However, almost researches for the RF bias have been focused on the controls of dc self-bias voltages, even though the RF bias can change plasma parameters, such as electron temperature, plasma density, electron energy distribution (EED), and their spatial distributions. In this study, we report on the effect of the RF bias on the plasma parameters and the EEDs with various external parameters, such the RF bias power, the ICP power, the gas pressure, the gas mixture, and the frequency of RF bias. Our study shows the correlation between the RF bias and the plasma parameters and gives a crucial key for the understanding of collisionless electron heating mechanism in the RF biased ICP.

• Proceedings of the KIEE Conference
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• 1999.07e
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• pp.2224-2226
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• 1999

Non-thermal plasma techniques is applied in many fields. Recently acid rain, global warming, ozone depletion, and smog are preeminent environmental problems. The cause for this environmental problems is the flue gas. Non-thermal plasma techniques has an attention for the solution of flue gas. Non-thermal plasma is used for the removal of flue gas composed of NOx, etc. This field has grown dramatically. This experiment is performed by using cylinder type reactor under the condition of room temperature and atmosphere pressure. NO gas is used instead of flue gas. Bidirectional pulse generator is used instead of the unidirectional pulse generator to increase the efficiency.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.250.2-250.2
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• 2014

Currently, teeth whitening method which is applicable to dental surgery is that physician expertises give medical treatment to teeth directly dealed with a high concentration of hydrogen peroxide and carbamide peroxide. If hydrogen peroxide concentration is too high for treatment of maximized teeth whitening effect [1], it is harmful to the human body [2]. To the maximum effective and no harmful teeth whitening effect in a short period of time at home, we have observed the whitening effect using carbamide peroxide (15%) and a low-temperature atmospheric pressure plasma jet which is regulated by the Food and Drug Administration. The gas supplied conditions of the non-thermal atmospheric pressure plasma jet was with the humidified (0.6%) gas in nitrogen or air at gas flow rate of 1000 sccm. Also, the measurement of chemical species from the jet was carried out using the optical emission spectroscopy (OES), the evidence of increased reactive oxygen species compared to non-humidified plasma jet. We have found that the whitening effect of the plasma is very excellent through this experiment, when bovine teeth are treated in carbamide peroxide (15%) and water vapor (0.2 to 1%). The brightness of whitening teeth was increased up to 2 times longer in the CIE chromaticity coordinates. The colorimetric spectrometer (CM-3500d) can measure color degree of whitening effect.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.11
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• pp.1246-1251
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• 2004

This paper is investigated about the effect of carrier gas type and the humidity for generating hydrogen gas. The vibration of the water surface is more powerful with increasing applied voltage. In this experimental reactor which is made of multi-needle and plate, the maximum acquired hydrogen production rate is about 3500 ppm. In the experimental result of generating hydrogen gas by non-thermal plasma reactor, the rate of generating hydrogen gas is different with what kind of carrier gas is. We used two types of carrier gas, such as $N_2$ and He. $N_2$ as carrier gas is more efficient to generate hydrogen gas than He because $N_2$ is reacted with $O_2$, which is made from water dissociation. In comparison with water droplet by humidifier and without water droplet by humidifier, the generation of hydrogen gas is decreased in case of water droplet by humidifier. That is the result that the energy for water dissociation is reduced on water surface because a part of plasma energy is absorbed at the small water molecular produced from humidifier.

• Proceedings of the Korean Vacuum Society Conference
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• 2008.02a
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• pp.181-181
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• 2008