Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2008.02a
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- Pages.181-181
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- 2008
Numerical modeling for process uniformity improvement of a plasma reactor by optimization of gas inlet configuration
Plasma reactor에서 Gas 주입구의 배열 구조에 따른 공정 균일도 개선 모델링
- Published : 2008.02.14
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