• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1994년도 춘계학술대회 논문집
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• pp.138-140
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• 1994

Plasma polymerized thin film was prepared using an interelectrod inductively coupled gas-flow-type reactor. Styrene was chosen as the monomer to be used. This thin films were also delineated by the electron-beam apparatus with an acceleration voltage 30kV, and the pattern in the resist was developed with RIE 80 with argon gas mixture ratio, pressure and RF power. The effect of charge of discharge power on growth rate and etching rate of the thin films were studied. The molecular structure of thin films were investigated by FIR and then was discussed in relation to its quality as a resist. In the case of Plasma polymerization, thickness of resist could be controlled by discharge duration and power. Also etch rate is increased as to growing argon gas and RF power with RIE 80.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 하계학술대회 논문집 C
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• pp.1695-1697
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• 2003

In this paper the emission properties of electrodeless fluorescent lamp were discussed using the inductively coupled plasma. To transmit the electromagnetic energy into the chamber a RF power of 13.56MHz was appied to the antenna and considering the Ar gas pressure and the RF electric power change, the emission spectrum, Ar-I line, luminance were investigated. At this time the input parameter for ICP RF plasma, Ar gas pressure and RF power were applied in the range of 10${\sim}$60m Torr, 10${\sim}$300W respectively.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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• pp.554-557
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• 2003

This paper describes the information for quantitative simulation of weakly ionized plasma. We should grasp the meaning of the plasma state condition to utilize engineering application and to understand materials of plasma state. In this paper, electron swarm parameter in He+Xe and Ar+He mixture gas calculated for range E/N values $0.01{\sim}500$ [Td] at the temperature is 300 [K] and pressure is 1 [Torr], using a set of electron collision cross sections determined by the authors, and using a method of Backward Prolongation by two term approximation Boltzmann equation method, for basic study on the gas discharge panel.

• Mass Spectrometry Letters
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• 제10권1호
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• pp.27-31
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• 2019

In this article, the properties of ${CO_2}^+(CO_2)_n$ clusters in a Paul ion trap have been investigated using mass-selective instability mode which conducted by chosen precursor ions, mainly $Ar^+$ and ${CO_2}^+$ produced by a mixture of Ar and $CO_2$. Exposure of ${CO_2}^+$ ions to $CO_2$ molecules, lead to the formation of ${CO_2}^+(CO_2)_n$ clusters. Here, Ar gas react as a buffer gas and lead to form ${CO_2}^+(CO_2)_n$ cluster by collisional effect.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1987년도 정기총회 및 창립40주년기념 학술대회 학회본부
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• pp.300-303
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• 1987

A microwave plasma generating system has been designed to study the properties of plasma. A microwave(2.45GHz) generated by the magnetron is transmitted to the cylindrical cavity through the the rectangular wave guide to generate hydrogen plasma. The electron temperature and the plasma density are measured by the Double Langmuir probe. A dilectric such as alumina is heated by the microwave add plasma. The surface temperature varies with the neutral gas pressure.

• 공업화학
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• 제9권1호
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• pp.94-100
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• 1998

천연가스의 주성분인 메탄의 마이크로웨이브 플라즈마 촉매반응에 의한 C2+ 탄화수소로의 전환반응을 고찰하였다. 플라즈마 출력의 증가(40~120 watt)와 유량이 감소(40~5mL/min)함에 따라서 메탄의 C2+ 생성물로의 전환율을 29.2%에서 42.2%로 향상되었으며, 촉매를 플라즈마와 함계 사용하여 에틸렌과 아세틸렌의 선택도를 향상시키는 동시에 높은 전환율을 유지할 수 있다. 실험에 사용한 여러 촉매중에는 Fe계의 촉매가 가장 높은 에틸렌의 선택도(30%)를 나타내었다. 실제 천연가스의 전환실험에서는 C2+ 생성물의 수율이 33.3%에서 46%의 범위를 보였다. 순수한 메탄이 원료였을 때 보다 높은 C2+ 수율이 얻어진 것은 천연가스가 메탄 보다 반응성이 높은 성분인 에탄과 프로판등을 함유하고 있기 때문으로 생각된다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.179-179
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• 2016

A radio-frequency (RF) Inductively Coupled Plasma (ICP) torch system was used for boron-nitride nano-tube (BNNT) synthesis. Because of electrodeless plasma generation, no electrode pollution and effective heating transfer during nano-material synthesis can be realized. For stable plasma generation, argon and nitrogen gases were injected with 60 kW grid power in the difference pressure from 200 Torr to 630 Torr. Varying hydrogen gas flow rate from 0 to 20 slpm, the electrical and optical plasma properties were investigated. Through the spectroscopic analysis of atomic argon line, hydrogen line and nitrogen molecular band, we investigated the plasma electron excitation temperature, gas temperature and electron density. Based on the plasma characterization, we performed the synthesis of BNNT by inserting 0.5~1 um hexagonal-boron nitride (h-BN) powder into the plasma. We analysis the structure characterization of BNNT by SEM (Scanning Electron Microscopy) and TEM (Transmission Electron Microscopy), also grasp the ingredient of BNNT by EELS (Electron Energy Loss Spectroscopy) and Raman spectroscopy. We treated bundles of BNNT with the atmospheric pressure plasma, so that we grow the surface morphology in the water attachment of BNNT. We reduce the advancing contact angle to purity bundles of BNNT.

• 한국전기전자재료학회논문지
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• 제11권6호
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• pp.472-476
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• 1998

The surface reactions of silica film($SiO_2-P_2O_5-B_2O_3-GeO_2$) with fluorocarbon plasma has been studied by using angle -resolved x-ray photoelectron spectroscopy(XPS). It has been confirmed that residual carbon consists of C-C and C-CFx bonds and fluorine mainly binds silicon in the case of etched silica by using $CF_4$ gas plasma. The surface reaction of silica with various fluorocarbon gases, such as $CF_4,C_2F_6 and CHF_3$ were investigated. XPS results showed that though the etching gases were changed, the elements and binding states of the residual layers on the etched silica by using various fluorocarbon gas plasma were nearly the same . This seems to be due to the high volatility of byproducts, that is, $SiF_4 and CO_2$ etc..

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 추계학술대회논문집B
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• pp.247-254
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• 2000

The base pressure of vacuum vessel of the KSTAR (Korea Superconducting Tokamak Advanced Research) Tokamak is to be a ultra high vacuum, $10^{-6}{\sim}10^{-7}Pa$, to produce clean plasma with low impurity containments. For this purpose, the KSTAR vacuum vessel and plasma facing components need to be baked up to at least $250^{\circ}C,\;350^{\circ}C$ respectively, within 24 hours by hot nitrogen gas from a separate baking/cooling line system to remove impurities from the plasma-material interaction surfaces before plasma operation. Here by applying the implicit numerical method to the heat balance equations of the system, overall temperature distributions of the KSTAR vacuum vessel and plasma facing components are obtained during the whole baking process. The model for 2-dimensional baking analysis are segmented into 9 imaginary sectors corresponding to each plasma facing component and has up-down symmetry. Under the resulting combined loads including dead weight, baking gas pressure, vacuum pressure and thermal loads, thermal stresses in the vacuum vessel during bakeout are calculated by using the ANSYS code. It is found that the vacuum vessel and its supports are structurally rigid based on the thermal stress analyses.

• 한국자동차공학회논문집
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• 제20권2호
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• pp.70-77
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• 2012

The selective catalytic reduction(SCR) system used to reduce NOx in diesel engines requires an NO/$NO_2$ ratio of about 1 in exhaust emissions to realize the fast SCR mode at temperatures lower than $300^{\circ}C$. This study investigated the characteristics of a plasma system as a pre-active apparatus for the fast SCR reaction mode of an SCR system. Plasma was generated by the pulse corona discharge(PCD) method with a four-channel wire-cylinder reactor. This study showed that plasma was easily generated in the exhaust gas by the PCD system, and the peak voltage of the normal state condition for plasma generation was generally 12 kV. The PCD system easily converted NO into $NO_2$ at lower temperatures and the NO/$NO_2$ conversion ratio increased with the discharge current for plasma generation. But the PCD system could not convert NO into $NO_2$ at higher engine speeds and higher engine loads due to the lack of oxygen in exhaust gas. The PCD system also activated the diesel oxidation catalysts(DOC) system to reduce CO emissions.