• Journal of the Korean institute of surface engineering
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• v.30 no.2
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• pp.111-120
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• 1997

The growth kinetion of $CuCl_x$ layer on Cu was investigated using $Cl_2$ gas with/without plasma. The etching kinetics ofit was also studied, in which PEt3 gas as well as $Cl_2$ gas were used. when plasma and DC bias were applied, not only the growth rate of $CuCl_x$ layer but also the surface concentration of Cl in $CuCl_x$ layer drastically increased. The growth mode is divided into three regimes, where the thinkness $CuCl_x$ layer ise proportional to t, lo9g $T^{1/2}$ , respectively, whether plasma, is applied or not. These three regime. It is also identified that the eath rate of Cu is drastically increased as the $Cl_2$ pressure is increased. However, when plasma and DC bias were applied, the etching rate is decreased, and ClCu-P-U layer is formed. in addition, as the etching time is increased, the surface concentration of Cl is increased and $CuCl_2$ formed partially.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.44-45
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• 2010

We are currently conducting studies on culturing and biocompatibility assessment of various cells such as neural stem cells and induced pluripotent stem cells(IPS cells) on carbon nanotube (CNT), on nerve regeneration electrodes, and on silicon wafers with a focus on developing nerve integrated CNT based bio devices for interfacing with living organisms, in order to develop brain-machine interfaces (BMI). In addition, we are carried out the chemical modification of carbon nanotube (mainly SWCNTs)-based bio-nanosensors by the plasma ion irradiation (plasma activation) method, and provide a characteristic evaluation of a bio-nanosensor using bovine serum albumin (BSA)/anti-BSA binding and oligonucleotide hybridization. On the other hand, the researches in the case of "novel plasma" have been widely conducted in the fields of chemistry, solid physics, and nanomaterial science. From the above-mentioned background, we are conducting basic experiments on direct irradiation of body tissues and cells using a micro-spot atmospheric pressure plasma source. The device is a coaxial structure having a tungsten wire installed inside a glass capillary, and a grounded ring electrode wrapped on the outside. The conditions of plasma generation are as follows: applied voltage: 5-9 kV, frequency: 1-3 kHz, helium (He) gas flow: 1-1.5 L/min, and plasma irradiation time: 1-300 sec. The experiment was conducted by preparing a culture medium containing mouse fibroblasts (NIH3T3) on a culture dish. A culture dish irradiated with plasma was introduced into a $CO_2$-incubator. The small animals used in the experiment involving plasma irradiation into living tissue were rat, rabbit, and pick and are deeply anesthetized with the gas anesthesia. According to the dependency of cell numbers against the plasma irradiation time, when only He gas was flowed, the growth of cells was inhibited as the floatation of cells caused by gas agitation inside the culture was promoted. On the other hand, there was no floatation of cells and healthy growth was observed when plasma was irradiated. Furthermore, in an experiment testing the effects of plasma irradiation on rats that were artificially given burn wounds, no evidence of electric shock injuries was found in the irradiated areas. In fact, the observed evidence of healing and improvements of the burn wounds suggested the presence of healing effects due to the growth factors in the tissues. Therefore, it appears that the interaction due to ion/radicalcollisions causes a substantial effect on the proliferation of growth factors such as epidermal growth factor (EGF), nerve growth factor (NGF), and transforming growth factor (TGF) that are present in the cells.

• Journal of the Korean Vacuum Society
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• v.11 no.2
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• pp.127-134
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• 2002

Recently, Plasma display panel(PDP) has been in the spotlight as one of the next generation flat-panel-display device. The luminance and luminous efficiency improvement is the hot issues for making a plasma display into a large flat panel device. In this paper, We suggest a new penning gas mixture, in order to find the optimum mixture gas in plasma display panel. The optimum gas composition has been found by the partial pressure of inert gases(such as Af and Kr added to matrix of He(70%)-Ne(27%)Xe(3%) and Ne(96%)-Xe(4%)). The influences of Ar or Kr addition to Ne(96%)-Xe(4%) and He(70%)-Ne(27%)-Xe(3%) mixture gases are experimentally investigated for AC Plasma Display Panel. When rare As(0.01%-0.03%) or Kr(0.01%-0.03%) is added Ne-Xe and He-Ne-Xe mixture gases, the luminance increases over 10%-20% and luminous efficiency increases over 10%-20% at 200 Torr. It is sure that luminance and efficiency are improved by Penning effect. Also, This influence of Penning effect is shown by increased wall charge(10%-25%). In addition to the result, firing voltage and minimum sustain voltage was approximately decreased by 2V-3V.

• Korean Journal of Materials Research
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• v.8 no.8
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• pp.707-713
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• 1998

The influence of plasma carburizing process on the surface hardness of SCM415 low-alloy steel (0.15% C) was investigated under the various process conditions of gas composition. gas pressure, plasma current density. temperature and time. The effective case depth was found to depend on the amount of methan gas containing carbon. thus the deepest case depth and the uniform hardeness were obtained with the 100% methan gas. The case depth increased with the plasma current density. The effective plasma carburizing temperature of SCM415 steel was found to be higher than 85$0^{\circ}C$, and the case depth was proportional to the square root of carburizing time under the same current density. The bending fatigue strength of the plasma carburized specimen is' higher than those of as- received specimen or reheat-quenched specimen.

• 한국연소학회:학술대회논문집
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• 2014.11a
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• pp.195-198
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• 2014

$Fuel/N_2$ and fuel/air mixtures were treated with non-thermal DBD plasma and the changes in characteristics of laminar diffusion flame have been observed. Flame of $Fuel/N_2$ mixture generated more soot under plasma condition while less amount of soot was formed from fuel/air mixture flame. Luminescence spectrum and gas chromatography results confirmed that plasma energy converts a fraction of fuel molecules into radicals, which then form $C_2$, $C_3$, $C_4$ and higher hydrocarbon under no oxygen condition or turn into CO, $CO_2$ and $H_2O$ when oxygen is present.

• Journal of Powder Materials
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• v.4 no.4
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• pp.268-274
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• 1997

Characteristics of plasma nitriding and nitrocarburizing for steam treated sintered steels were studied. Fe-0.8%C powder containing Ni, Cu were sintered at 112$0^{\circ}C$ and steamed at 52$0^{\circ}C$. Temperature of plasma nitriding and nitrocarburizing was varied from 50$0^{\circ}C$ to $600^{\circ}C$. Gas mixture of nitriding was set at $N_2$ : $H_2$ =80:20 (vol.%), but $CH_4gas$ was added 1~2 vol.% for nitrocarburizing. Steam treatment for sintered steels brought not only the formation of oxide layer but also decarburizing near the surface. Decrease in hardness near the surface resulted from the formation of ferrite due to decarburizing. Thus, the low hardness was recovered not with plasma nitriding but with plasma nitrocarburixing. Wear resistance properties of steamed specimens and ni-trocarburized specimens were better than those of nitrided specimens according to the pin-on-disk wear test. On the other hand, the fatigue life of steamed specimen was shorter than that of nitrocaiburized specimen.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.9
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• pp.395-399
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• 2003

In this paper, physical phenomena which are related to the high temperature and high pressure arc plasma generated during the fault current interruption by SF6 gas circuit breakers are reviewed. In particular, in order to analyze nozzle ablation induced by the heats transferred to the surface of the poly-tetrafluoroethylene(PTFE) nozzle through arc radiation, a governing equation for the calculation of PTFE concentration is added to the governing equations for SF6 arc Plasma analysis. The proposed method is applied to the steady state analysis of $SF_6$ arc plasma generated by direct current taking account of the nozzle ablation and the results are presented.

• Journal of the Korean Chemical Society
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• v.35 no.6
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• pp.699-706
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• 1991

The moderate power (500 W) Microwave Induced Plasma was generated with helium gas and was used for the direct analysis of aqueous samples. Usually, the helium plasma obtained with a modified Beenakker type cavity forms a cylindrical one. Though, by the careful controls of gas flows, a "toroidal" shape plasma could be made but its analytical performances were found to be worse. Using the glass frit nebuliser, the detection limits for metal ions obtained were around 10~100 ppb and that for chloride was about 50ppm.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.4
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• pp.204-208
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• 2006

In this study, we investigated the ion energy distributions in a chlorine based inductively coupled plasma by quadrupole mass spectrometer with an electrostatic ion energy analyzer. Ion energy distributions are presented for various plasma parameters such as $BCl_3/Ar$ gas mixing ratio, RF power, and process pressure. As the $BCl_3/Ar$ gas mixing ratio and process pressure decreases, and RF power increases, the saddle-shaped structures is enhanced. The reason is that there are ionized energy difference between $BCl_3$ and Ar, change of plasma potential, alteration of mean free path. and variety of ion collision in the sheath.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.458-458
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• 2012

Fuel Cell is used stacking metal or polymer substrate. This hydro property of substrate surface is very important. Usually, surface property is hydrophilic. The surface oxidation of SUS is investigated through plasma treatments with an atmospheric-pressure dielectric barrier discharge (DBD) for increasing hydrophilic property. The plasma process makes an experiment under various operating conditions of the DBD, which operating conditions are treatment time, plasma gas mixture ratio, the plasma source supply frequency. Two kinds of SUS substrate, SUS-304 and SUS 316L, were used. Discharge frequency has a crucial impact on equipment performance and gas treatment. After the plasma treatment of a SUS plate, highly improved wettability was noted. But, when high oxygen supply, the substrate damaged seriously.