Properties of ZnO thin film grown on $Al_2O_3$ substrate pretremented by nitrogen ion beam
(이온빔으로 질화처리된 사파이어기판위에 성장한 ZnO박막의 특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2004.07a
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- pp.413-416
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- 2004