• Title/Summary/Keyword: Planar process

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The Effects of Etch Process Parameters on the Ohmic Contact Formation in the Plasma Etching of GaN using Planar Inductively Coupled $CH_4/H_2/Ar$ Plasma (평판 유도 결합형 $CH_4/H_2/Ar$ 플라즈마를 이용한 GaN 건식 식각에서 공정변수가 저항성 접촉 형성에 미치는 영향)

  • Kim, Mun-Yeong;Tae, Heung-Sik;Lee, Ho-Jun;Lee, Yong-Hyeon;Lee, Jeong-Hui;Baek, Yeong-Sik
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.49 no.8
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    • pp.438-444
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    • 2000
  • We report the effects of etch process parameters on the ohmic contact formation in the plasma etching of GaN. Planar inductively coupled plasma system with $CH_4/H_2/Ar$gas chemistry has been used as etch reactor. The contact resistance and the specific contact resistance have been investigated using transfer length method as a function of RF bias power and %Ar gas concentration in total flow rate. AES(Auger electron spectroscopy) analysis revealed that the etched GaN has nonstoichiometric Ga rich surface and was contaminated by carbon and oxygen. Especially large amount of carbon was detected at the sample etched for high bias power (or voltage) condition, where severe degradation of contact resistance was occurred. We achieved the low ohmic contact of $2.4{\times}10^{-3} {\Omega}cm^2$ specific contact resistance at the input power 400 W, RF bias power 150 W, and working pressure 10mTorr with 10 sccm $CH_4$, 15 sccm H2, 5 sccm Ar gas composition.

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A Study on Thermal Characteristics of Carbon-Organic Surface Heating Element with Electrodeless Lamp of a Freezer (냉동고 무전극램프 적용 탄소-유기소재 면상발열체의 열 특성에 관한 연구)

  • Lee, Min-Sang;Back, Seong-Hun;Kang, Sung-Soo
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.19 no.1
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    • pp.1-10
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    • 2020
  • This study deals with the fabrication and thermal characterization of planar heating elements attached to the backside of the reflector used in the electrodeless lamp of a freezer. We tried to solve the problem of the local heat generation of the linear heating element that occurs about 50℃. The homogeneous dispersion and manufacturing excellence of the planar heating element produced were confirmed through SEM and EDS. In addition, the test specimens was prepared according to the change in the ratio of carbon fiber to the basis weight of the planar heating element, and a sample having a basis weight of 50g/㎡ having a content ratio of carbon fiber of 70% was selected. That sample showed low surface resistance of 4.3Ω/sq and high temperature of about 81℃ at 6V. Durability was confirmed by performing repeated bending evaluation of 3000 cycles for the sample. Large area test specimens were prepared to be applied to the actual reflector, insulated by EVA film and analyzed for their thermal characteristics. From 13V application, the temperature of the linear heating element was higher than 50℃ and the average temperature of 68℃ was maximum at 18V.

Planar Type Flexible Piezoelectric Thin Film Energy Harvester Using Laser Lift-off

  • Noh, Myoung-Sub;Kang, Min-Gyu;Yoon, Seok Jin;Kang, Chong-Yun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.489.2-489.2
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    • 2014
  • The planar type flexible piezoelectric energy harvesters (PEH) based on PbZr0.52Ti0.48O3 (PZT) thin films on the flexible substrates are demonstrated to convert mechanical energy to electrical energy. The planar type energy harvesters have been realized, which have an electrode pair on the PZT thin films. The PZT thin films were deposited on double side polished sapphire substrates using conventional RF-magnetron sputtering. The PZT thin films on the sapphire substrates were transferred by PDMS stamp with laser lift-off (LLO) process. KrF excimer laser (wavelength: 248nm) were used for the LLO process. The PDMS stamp was attached to the top of the PZT thin films and the excimer laser induced onto back side of the sapphire substrate to detach the thin films. The detached thin films on the PDMS stamp transferred to adhesive layer coated on the flexible polyimide substrate. Structural properties of the PZT thin films were characterized using X-ray diffraction (XRD) and scanning electron microscopy (SEM). To measure piezoelectric power generation characteristics, Au/Cr inter digital electrode (IDE) was formed on the PZT thin films using the e-beam evaporation. The ferroelectric and piezoelectric properties were measured by a ferroelectric test system (Precision Premier-II) and piezoelectric force microscopy (PFM), respectively. The output signals of the flexible PEHs were evaluated by electrometer (6517A, Keithley). In the result, the transferred PZT thin films showed the ferroelectric and piezoelectric characteristics without electrical degradation and the fabricated flexible PEHs generated an AC-type output power electrical energy during periodically bending and releasing motion. We expect that the flexible PEHs based on laser transferred PZT thin film is able to be applied on self-powered electronic devices in wireless sensor networks technologies. Also, it has a lot of potential for high performance flexible piezoelectric energy harvester.

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Development of Thermal Performance Prediction for Large Planar Military Antenna with Multi-Cooling Channels (다중 냉각유로가 적용된 수랭식 군사용 대면적 안테나의 열성능 예측 기술)

  • YeRyun Lee;SungWook Jang;PilGyeong Choi;NohJin Kwak;JunJung Park
    • Journal of the Korea Institute of Military Science and Technology
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    • v.27 no.1
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    • pp.43-50
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    • 2024
  • Large planar military antenna boasts a range of electrical components, including TRA(Transmit-Receive Assembly), signal processors, etc. which engage in computations and calculations. These processes generate a significant amount of heat, leading to unforeseen consequences for the equipment. To mitigate these adverse effects, it's imperative to implement a cooling system that can effectively reduce heat-related issues. Given the antenna's intricate nature and the multitude of components it houses, a two-step estimation process is necessary. The first step involves a comprehensive model calculation to determine the total flow characteristics, while the second step entails a thermal analysis of individual TRA set. In this study, we depicted an antenna set using simplified 3D models of its components, considering their material and thermal properties. The sequential analysis process facilitated the calculation of branched flow rates, providing insights into the individual TRA. This approach also allowed us to design a cooling system for the TRA set, assessing its thermal stability in high-temperature environments. To ensure the optimal performance of TRA, breaking down the analysis into stages based on the cooling system's structure can assist operators in predicting numerical results more effectively.

Reconstruction of 3D Volume of Talairach Brain Atlas (Talairach 뇌지도의 3차원 볼륨 재구성)

  • 백철화;김태우
    • Journal of Biomedical Engineering Research
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    • v.20 no.4
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    • pp.409-417
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    • 1999
  • Talairach atlas consists of three orthogonal sets of coronal, sagittal, and axial slices. This atlas has recently an important role as a standard brain atlas in diagnosing disease related with brain function and analyzing cause of brain disease. The 3D digital volume data set reconstructed from the atlas is widely applied to visualization and quantitative analysis of results processed in the digital computer. This paper represented application method of bi-linear interpolation technique, proposed tri-planar interpolation algorithm for 3D volume data reconstruction of Talairach atlas. And we implemented Talairach atlas editor and discussed problems in volume reconstruction of Talairach atlas. The bi-linear method was applied to only one set of the slices and considered the on intensity value in the interpolation process. The tri-planar technique concurrently uses three orthogonal sets of slices with the same information of brain structures. Talairach atlas editor visualized three sets. of atlas slices on the same coordinate and had editing function. Using the atlas editor, we represented problems in volume reconstruction by showing inconsistency of brain structures among three sets of atlas slices.

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Vector mechanics-based simulation of large deformation behavior in RC shear walls using planar four-node elements

  • Zhang, Hongmei;Shan, Yufei;Duan, Yuanfeng;Yun, Chung Bang;Liu, Song
    • Structural Engineering and Mechanics
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    • v.74 no.1
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    • pp.1-18
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    • 2020
  • For the large deformation of shear walls under vertical and horizontal loads, there are difficulties in obtaining accurate simulation results using the response analysis method, even with fine mesh elements. Furthermore, concrete material nonlinearity, stiffness degradation, concrete cracking and crushing, and steel bar damage may occur during the large deformation of reinforced concrete (RC) shear walls. Matrix operations that are involved in nonlinear analysis using the traditional finite-element method (FEM) may also result in flaws, and may thus lead to serious errors. To solve these problems, a planar four-node element was developed based on vector mechanics. Owing to particle-based formulation along the path element, the method does not require repeated constructions of a global stiffness matrix for the nonlinear behavior of the structure. The nonlinear concrete constitutive model and bilinear steel material model are integrated with the developed element, to ensure that large deformation and damage behavior can be addressed. For verification, simulation analyses were performed to obtain experimental results on an RC shear wall subjected to a monotonically increasing lateral load with a constant vertical load. To appropriately evaluate the parameters, investigations were conducted on the loading speed, meshing dimension, and the damping factor, because vector mechanics is based on the equation of motion. The static problem was then verified to obtain a stable solution by employing a balanced equation of motion. Using the parameters obtained, the simulated pushover response, including the bearing capacity, deformation ability, curvature development, and energy dissipation, were found to be in accordance with the experimental observation. This study demonstrated the potential of the developed planar element for simulating the entire process of large deformation and damage behavior in RC shear walls.

The Crack Behavior in the Planar Solid Oxide Fuel Cell under the Fabricating and Operating Temperature (제조 및 작동온도에서 평판형 고체연료전지에 발생한 균열 거동)

  • Park, Cheol Jun;Kwon, Oh Heon;Kang, Ji Woong
    • Journal of the Korean Society of Safety
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    • v.29 no.4
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    • pp.34-41
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    • 2014
  • The goal of this study is to investigate some crack behaviors which affect the crack propagation angle at the planar solid oxide fuel cell with cracks under the fabricating and operating temperature and analyze the stresses by 3 steps processing on the solid oxide fuel cell. Currently, there are lots of researches of the performance improvement for fuel cells, and also for the more powerful efficiency. However, the planar solid oxide fuel cell has demerits which the electrode materials have much brittle properties and the thermal condition during the operating process. It brings some problems which have lower reliability owing to the deformation and cracks from the thermal expansion differences between the electrolyte, cathode and anode electrodes. Especially the crack in the corner of the electrodes gives rise to the fracture and deterioration of the fuel cells. Thus it is important to evaluate the behavior of the cracks in the solid oxide fuel cell for the performance and safety operation. From the results, we showed the stress distributions from the cathode to the anode and the effects of the edge crack in the electrolyte and the slant crack in the anode. Futhermore the crack propagation angle was expected according to the crack length and slant angle and the variation of the stress intensity factors for the each fracture mode was shown.

Design of a Planar Log-Spiral Antenna for Testing Plane-Wave Shielding Effectiveness (평면파 차폐효과 시험용 평판형 로그 스파이럴 안테나 설계)

  • Chung, Yeon-Choon
    • Journal of IKEEE
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    • v.23 no.3
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    • pp.762-767
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    • 2019
  • The plane-wave shielding effectiveness is typically measured for horizontal and vertical polarizations using a linearly polarized antenna. However, this typical measurement method results in big evaluation fees due to very long measurement time as well as huge idle space for maintenance, these problems is more severe especially in large shielded enclosures such as EMP protection facilities to be built in indoor buildings and underground. This paper describes the design and fabrication process and results of a planar log-spiral antenna applicable to the evaluation of the electromagnetic shielding effectiveness of a large EMP protection facility. Since the proposed antenna has a circular polarization, there is no need to separately measure the horizontal and vertical polarizations. Therefore, the measurement time can be shortened by more than 1/2, and further, its small volume with a planar structure can reduce greatly idle space required for the maintenance.

2.2 “ QVGA LTPS LCD Panel integrated with Ambient light Sensor

  • Weng, Chien-Sen;Chao, Chih-Wei;Tseng, Hung Wei;Peng, Chia-Tien;Lin, Kun-Chih;Gan, Feng-Yuan
    • 한국정보디스플레이학회:학술대회논문집
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    • 2007.08b
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    • pp.1319-1322
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    • 2007
  • Planar PIN photodiode is compatible with LTPS process, and its fabrication requires no additional manufacturing process. In this study we design the optimum dimension of PIN diodes with two nitride layers to improve the efficiency of PIN diodes. The PIN photo sensor shows very good sensitivity to ambient light illuminance.

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