• Transactions on Electrical and Electronic Materials
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• 제17권4호
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• pp.222-226
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• 2016

This paper investigated the trench process, unified field limit ring, and other products for the development of a 500 V-level unified trench gate power MOSFET. The optimal base chemistry for the device was found to be SF₆. In SEM analysis, the step process of the trench gate and field limit ring showed outstanding process results. After finalizing device design, its electrical characteristics were compared and contrasted with those of a planar device. It was shown that, although both devices maintained a breakdown voltage of 500 V, the Vth and on-state voltage drop characteristics were better than those of the planar type.

• 한국광학회지
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• 제18권3호
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• pp.185-189
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• 2007

평판형 AWG(Arrayed Waveguide Grating) 기술을 이용한 새로운 CWDM(Coarse Wavelength Division Multiplexer) 소자의 제작기술을 제안한다. 슬랩 도파로 입력단에 나팔형태를 갖는 도파로에 대하여 광전파방법(BPM)에 의한 전산모사 결과와 투과대역이 평탄화된 20 nm 간격의 CWDM 소자의 제작 결과를 보고한다. $0.75{\triangle}%$의 박막을 사용하였으며, 소자의 삽입손실은 가우시안 형태에 대하여 3.5 dB와 평탄화된 형태에 대하여 4.8 dB를 각각 얻었으며, 3 dB 대역폭은 각각 10 nm 및 13 nm 이상의 결과를 얻었다.

• Architectural research
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• 제14권4호
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• pp.143-152
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• 2012

A form-finding procedure is presented for planar tensegrity structures. Notably, a simple decision criteria is proposed to select the desirable candidate position vector from the unitary matrix produced by the eigenvalue decomposition of force density matrix. The soundness of the candidate position vector guarantees faster convergence and produces a desirable form of tensegrity without any member having zero-length. Several numerical examples are provided to demonstrate the capability of the proposed form-finding process.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 하계학술대회 논문집 C
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• pp.1364-1366
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• 1997

Planar type magnetized inductively coupled plasma etcher has been built. The density and temperature of Ar plasma are measured as a function of rf power, external magnetic field, and pressure. The oxide etch rate and selectivity to polysilicon are measured as the above mentioned conditions and self-bias voltage.

• 센서학회지
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• 제6권3호
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• pp.237-244
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• 1997

A new planar-type microsensor, which had a platinum heater and a sensing layer on the same plane was fabricated on silicon substrate with stress-relieved PSG(phosphosilicate glass)/$Si_{3}N_{4}$(800nm/150nm) diaphragm. The proposed planar-type microsensor could be fabricated by simple silicon process using only 3 masks for photolithography process compared with 5 or 6 masks of the typical micro-gas sensor. The thermal properties of the microsensor from thermal simulation were compared with those of the fabricated microheater. Although there are some discrepancy between the simulation result and the result from the fabricated microheater, the thermal simulation by FEM was proved to be an useful method to evaluate the thermal properties of microheater. The sensing characteristics of the fabricated microsensor with the planar-type heater were investigated also.

• 한국정밀공학회지
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• 제33권7호
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• pp.601-606
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• 2016

In this paper, an energy harvester is developed that has advantages regarding piezoelectric noise minimization, mass production, and an easily available environmental energy source, electromagnetic induction, as well as low-frequency bandwidth and high amplitude. A process for fabricating a three-dimensional multilayered planar coil using micro-electro-mechanical systems (MEMS) on a flexible printed circuit board FPCB is introduced. Optimal shape and size were calculated via internal resistance and inductance, and a prototype was fabricated through the MEMS procedure while considering the possibility of mass production. Although the internal resistance matched the designed value, the electromotive force generated did not reach the intended amount. The main reason for the decrease in efficiency was the low area of coil outskirt exposed to the magnetic field while there was relative motion between the magnet and the coil.

• 로봇학회논문지
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• 제7권2호
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• pp.101-112
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• 2012

It is well-known that when singularities are located within the workspace of the parallel mechanism (PM), the usefulness of its workspace is significantly deteriorated. To handle this problem, we suggest an optimal design method which leads to more useful and larger workspace of the PM by taking its singularity locations into consideration in design process. Kinematic models of three selected planar PMs, a 5R type PM, a 3-RPR type planar PM, and a 3-RRR type planar PM, are derived via screw theory and their singularity analyses are conducted. Then workspace optimal designs for those three PMs are conducted to verify that the suggested design method leads more useful and larger workspace in which deterioration by singularity is minimal.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집
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• pp.206-209
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• 2002

With the progress of semiconductor processing technology, avalanohe photodiodes (APDs) based on InP/InGaAs are used for high-speed optical receiver modules. Planar-type APDs give higher reliability than mesa-type APDs. However, Planar-type APDs are struggled with a problem of intensed electric field at the junction curvature, which causes edge breakdown phenomena at the junction periphery. In this paper, we focused on studying the effects of junction curvature for APDs performances by different etching processes followed by single diffusion to from p-n junction. The performance of each process is characterized by observing electric field profiles and carrier generation rates. From the results, it can be understood to predict the optimum structure, which can minimize edge breakdown and improve the manufacturability.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2002년도 학술대회지
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• pp.353-356
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• 2002

Planar laser induced fluorescence(PLIF) has been widely used to obtain two dimensional fuel distribution. Preliminary investigation was performed to measure quantitative air excess ratio distribution in an engine fueled with LPG. It is known that fluorescence signal from acetone as a fluorescent tracer is less sensitive to oxygen quenching than other dopants. Acetone was excited by KrF excimer laser (248nm) and its fluorescence image was acquired by ICCD camera with a cut-of filter to suppress Mie scattering from the laser light. For the purpose of quantifying PLIF signal, an image processing method including the correction of laser sheet beam profile was suggested. Raw images were divided by each intensity of laser energy and profile of laser sheet beam. Inhomogeneous fluorescence images scaled with the reference data, which was taken by a calibration process, were converted to air excess ratio distribution. This investigation showed instantaneous quantitative measurement of planar air excess ratio distribution for gaseous fuel.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 1997년도 춘계학술대회논문집
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• pp.183-187
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• 1997

A membrane element is regarded as more preferable rather than other elements in the sense of its computing efficiency and the merit with respect to contact treatment. However, it cannot consider the bending effect during the deformation. Moreover, due to the characteristics of rolling process, sheet metal has anisotropy with respect to the direction in the plane. To take the bending effect into account, a modified membrane element was introduced and improved to consider planar anisotropic characteristics with the aid of Hill's quadratic criterion.