• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.05b
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• pp.34-37
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• 2001

As the integrated circuit device shrinks to smaller dimensions, chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the inter-metal dielectrics (IMD) layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. To prevent agglomerated slurry particle from inflow, we installed 0.5${\mu}m$ POU (point of use) filter, which is depth-type filter and has 80% filtering efficiency for the $1.0{\mu}m$ size particle. In this paper, we studied the relationship between defect generation and pad count to understand the exact efficiency of the slurry filtration, and to find out the appropriate pad usage. Our preliminary results showed that it is impossible to prevent defect-causing particles perfectly through the depth-type filter. Thus, we suggest that it is necessary to optimize the flow rate of slurry to overcome depth type filters weak-point, and to install the high spray of de-ionized Water (DIW) with high pressure.

• Proceedings of the KIEE Conference
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• 2005.10b
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• pp.334-336
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• 2005

According as quality of life improves, pursuit of agreeable iife became realistic problem. Specially, noise had been appraised to element that infiuence in human life directly and indirectly Therefore, necessity of study about noise control is increased for better labor conditions and agreeable habitat. In this paper, implementation of active mufflers using recursive LMS algorithms is presented. Analyze exhaust pipe noise of a gasoline and Diesel car and use adaptation IIR filter algorithm that stability is solidified and controled exhaust pipe noise of a car. computer simulation is performed to show the effectiveness of a proposed algorithm.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.20 no.1
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• pp.13-16
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• 2011

It is a tendency where the number of the restaurant is increasing recently with advancement of the food service industry. In comparison, Noxiousness fine MIST and the removal are passively done in about offensive odor which occurs meat products processing as emitting like that in the atmosphere. Because adherence lamination in the exhaustion line pipe has need of a periodic cleaning and change, it must discontinue the business of long time. In this paper, The technique development on fine MIST, dust of offensive odor and filtering which occur meat products processing prevents adherence/lamination of fine MIST in exhaustion line pipe. And the source prevents the environmental matter which is emitted in the atmosphere under maximizing boil offensive odor and the filtering effect of noxiousness MIST.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.41 no.3
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• pp.39-44
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• 2004

Fiber Bragg grating sensors are fabricated by core index modulation using UV laser and phasemask. Bragg wavelength of the grating is changed by the external strain. In this paper, a signal processing system of fiber Bragg grating sensor has studied in the optical wavelength domain. The system is based on the sweep semiconductor light source that consists of SLD, F-P tunable filter and etalon filter. The hysteresis effects of PZT in the F-P tunable filter are compensated. The long term measurement stability is obtained by controlling the temperature of F-P tunable filter and the SLD. We compare the strain data from fiber Bragg grating sensor and that from strain gauge at concrete hume pipe. We also get very good results for the long gauge displacement using fiber Bragg grating sensor which are identical to the data with short gauge length ordinary displacement sensor.

• Transactions of the Korean Society of Automotive Engineers
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• v.24 no.5
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• pp.538-548
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• 2016

The purpose of this study is to identify the possibility of effective tuning works, understand the characteristics of tuning engine, and analyse the basic data of engine tuning inspection corresponding to the safe operation and environment of a driving gasoline car. The effects of tuning on the characteristics of performance and exhaust emissions under a wide range of engine speeds are experimentally investigated by the actual driving car with a four-cycle, four-cylinder DOHC, turbo-intercooler, water-cooled gasoline engine operating at four types of non-tuning, tuning 1, 2 and 3. The tuning parts in the gasoline engine are the intake manifold, intake pipe and air filter. In the experiment, the output, torque and air-fuel ratio of the five-speed automatic transmission vehicles were measured at the chassis dynamometer(Dynojet 224xLC) with one person on board. The exhaust emissions of $NO_X$, THC, CO, $O_2$ and $CO_2$, and excess air ratio(${\lambda}$) at the other chassis dynamometer(DASAN-MD-ASM-97-KR-HD) were also measured by the idle/constant-speed mode(ASM2525 mode) test method. It is found that the actual air-fuel ratios of non-tuning and tuning engines were shown to be lower than the stoichiometric air-fuel ratio with increasing engine speed, and the actual air-fuel ratio of non-tuning engine was slightly higher than those of tuning engines when the engine speed is more than 4000 rpm. The output was significantly increased by the tuning whereby the maximum output of tuning engine was more increased to approximately 117.64% than that of non-tuning engine. In addition, CO, THC and $NO_X$ emissions of non-tuning and tuning engines measured by the constant-speed test mode were all satisfied with the inspection standards. CO emission was increased, while THC and $NO_X$ emissions were reduced by tuning.

• Journal of the Society of Naval Architects of Korea
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• v.39 no.3
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• pp.57-63
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• 2002

This paper describes a control algorithm for the buffer of a deep-sea mining system, in which the buffer is connected to a long slender pipe and then to a surface ship on one end, and to a collector on sea floor through a flexible hose on the other end. A mathematical modeling is established for designing the controller for buffer thrusters, in which the dynamic response of the long pipe is taken into account based on the mode superposition method. The fluid loading acting on the pipe is estimated by using Morison's formula. For simplicity, the surface ship is assumed to be kept stationary, the reaction from the flexible hose is ignored and only the lateral motions are considered. In order to guide the buffer to react only to the low-frequency motion of the surface vessel, the FIR digital filter is introduced to a PID-based controller It can be shown numerically that the high frequency component of the ship's motion can be effectively filtered out by using the FIR low pass filter.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.4
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• pp.93-100
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• 2007

The flow velocity distribution at inlet and exit of Diesel Particulate Filter(DPF) by fabricating L-shape connector with the DPF was measured using a Pitot-tube and 2-D transverse machine. An adaptor designed for making the Pitot tube probe access to the inlet and exit of the DPF was connected with the inlet and exit flange of the DPF, respectively. The Pitot tube which was mounted in the 2-D positioning machine could access to the inlet and exit of the DPF through the rectangular window of the adaptor. The L-shape connector in the DPF inlet has a flow guide which is a perforated steel pipe. The flow velocity distribution at the inlet of the DPF showed a chaotic velocity distribution which is different from that with a diffuser type connector. The velocity distribution at the exit of the DPF showed a crown shape which is similar to that of the diffuser type connector. The velocity distribution at the exit of DPF showed different patterns according to the air flow rate.

• Magazine of the Korean Society of Agricultural Engineers
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• v.15 no.2
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• pp.3002-3006
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• 1973

The study on the drainage has been performed for long time in Korea. The 4th attempt of study on under-drainage by use P.V.C. suction pipe were made in 1971. Drainage method, soil temperature, growth of crop and yield were observed and compared with the 3 drained Plots and at the 3 undrained ones. Obtained results were as follows; 1. The soil temperatures in the drained plots were $1.8^{\circ}C$ higher than that in the undrained ones during the irrigation period. 2. 20% of increased yield were resulted from practicing of P.V.C. suction pipe drainage. 3. The annual net income per 1ha of paddy rice field with P.V.C. suction pipe drainge was 82,900 won.

• Journal of the Korean Society of Combustion
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• v.12 no.4
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• pp.8-13
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• 2007

Plasma assisted combustion is an old subject for the combustion society, but recently, the subject is refocused partly because techniques for non-thermal plasmas are progressed significantly, and partly because there are lots of applications which need to be overcome by a new reaction technology. In the present study, we have developed plasma assisted burner (plasma burner), which can be used as a heating source in a diesel particulate filter system. The burner can burn 20-60 cc/min of diesel fuel with 50 lpm of fresh air in an exhaust pipe of 2.0 liter diesel engine. Using 20 cc/min of diesel fuel, an exhaust temperature for 2.0 liter diesel engine can be raised up to around $600^{\circ}C$ for a wide range of engine speed (idle-3,000 rpm). The characteristics of the plasma burner are reported, and the possible operating mechanism of it will be discussed based on the effects of an electric field and a plasma on flames.

• 한국연소학회:학술대회논문집
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• 2007.05a
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• pp.202-206
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• 2007

Plasma assisted combustion is an old subject for the combustion society, but recently, the subject is refocused partly because techniques for non-thermal plasmas are progressed significantly, and partly because there are lots of applications which need to be overcome by a new reaction technology. In the present study, we have developed plasma assisted burner (plasma burner), which can be used as a heating source in a diesel particulate filter system. The burner can bum 20 - 60 cc/min of diesel fuel with 50 lpm of fresh air in an exhaust pipe of 2.0 liter diesel engine. Using 20 cc/min of diesel fuel, an exhaust temperature for 2.0 liter disel engine can be raised up to around $600^{\circ}C$ for the range of engine speeds is idle - 3,000 rpm. The characteristics of the plasma burner are reported, and the possible operating mechanism of it will be discussed based on the effects of an electric field and a plasma on flames.