• 센서학회지
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• 제11권4호
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• pp.191-199
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• 2002

This paper presents the design concept, theoretical investigation, and fabrication of a six-degree of freedom (6-DOF) turbulent flow micro sensor utilizing the piezoresistive effect in silicon. Unlike other flow sensors, which typically measure just one component of wall shear stress, the proposed sensor can independently detect six components of force and moment on a test particle in a turbulent flow. By combining conventional and four-terminal piezoresistors in Si (111), and arranging them suitably on the sensing area, the total number of piezoresistors used in this sensing chip is only eighteen, much fewer than the forty eight piezoresistors of the prior art piezoresistive 6-DOF force sensor.

• Journal of Mechanical Science and Technology
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• 제18권5호
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• pp.789-797
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• 2004

The nanoscale sensing and manipulation have become a challenging issue in micro/nano-robotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in micro robotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a micro robotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation.

• 센서학회지
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• 제14권4호
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• pp.237-243
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• 2005

Strain gauge type load cell is used widely as weight sensor. However, it has problems such as noise, power consumption, high cost and big size. Semiconductor type piezoresistive pressure sensor is practically used in recent for low hysteresis, good linearity, small size, light weight and strong on vibration. In this paper, we have fabricated the piezoresistive pressure sensor and packaged the miniature weight sensor. We packaged the miniature weight sensor by flip-chip bonding between die and PCB for durability, because the weight sensor is directly contacted on a physical solid distinct from air and oil pressure. We measured the characteristics of the weight sensor, which had the output of $10{\sim}80$ mV on the weight range of $0{\sim}2$ kg. In the result, we could fabricate the weight sensor with an accuracy of 3 %FSO linearity.

• 한국소음진동공학회논문집
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• 제23권12호
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• pp.1082-1089
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• 2013

3-Axis sensor measurement system is needed for measuring ride quality of elevator. But because 3-Axis piezoelectric accelerometer is expensive. We developed 3-Axis sensor system which is suitable for measuring ride quality of elevator using cheap MEMS sensor. There are two types of MEMS sensor that are piezoresistive and capacitive type. The excellence of piezoresistive type in characteristic of frequency response and noise is confirmed compare to capacitive type as a result of this paper's experiment and reference. 3-Axis system using MEMS sensor needs MEMS's proper frequency response characteristic. Additionally noise characteristic of sensor and circuit, stiffness of assembly are needed for deciding frequency range and accuracy of amplitude.

• 전기학회논문지
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• 제58권3호
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• pp.573-577
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• 2009

Piezoresistive pressure sensor have become the successfully-commercialized MEMS product and the related technologies have been well developed over the past decades. Regarding the design methodology, however, the coupled-physics FEM analyses of the transducer itself and the signal-processing circuitry design based on the conventional EDA are separated and both of the analyses were sequentially processed for the full design of the pressure sensor. For the fast and effective R&D, new design methodology is proposed in this paper where the FEM results are linked to the EDA environment and therefore most of the design works can be done in the EDA environments, which means the time-consuming FEM analyses can be minimized. In order to verify the proposed approach, a typical piezoresistive pressure sensor having the silicon diaphragm and piezoresistors was modeled and analyzed based on the proposed methodology. The verification results showed that the simulated results were matched well with the measured data within the 7% difference while the simulation time was reduced less than 5% compared to the conventional methodology. Through the proposed approach, various types of the piezoresistive pressure sensors can be developed in more effective way.

• 센서학회지
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• 제14권3호
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• pp.156-159
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• 2005

Liposomes are microscopic spherical vesicles that form when lipids are hydrated and have been widely used for biochemical assay, drug delivery and molecular imaging. In particular, they are well known for artificial cell membranes to study cellular functions such as cell fusions and membrane proteins. Here, we firstly report the detection of liposomes by the highly sensitive microfabricated piezoresistive cantilever sensor chip and the phosphatidylserine recognition protein C2A which is chemically immobilized on the sensor surface. The signal created from the bending motion of piezoresistive cantilever after the liposome attachment has been monitored in real time.

• Smart Structures and Systems
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• 제18권2호
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• pp.217-231
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• 2016

The present work aims to develop piezoresistive sensors of excellent piezoresistive response attributable to change in nanoscale structures of multi-wall carbon nanotube (MWNT) embedded in cement. MWNT was distributed in a cement matrix by means of polymer wrapping method in tandem with the ultrasonication process. DC conductivity of the prepared samples exhibited the electrical percolation behavior and therefore the dispersion method adopted in this study was deemed effective. The integrity of piezoresistive response of the sensors was assessed in terms of stability, the maximum electrical resistance change rate, and sensitivity. A composite sensor with MWNT 0.2 wt.% showed the lowest stability and sensitivity, while the maximum electrical resistance change rate exhibited by this sample was the highest (96 %) among others and even higher than those found in the literature. This observation was presumably attributed by the percolation threshold and the tunneling effect. As a result of the MWNT content (0.2 wt.%) of the sensor being near the percolation threshold (0.25 wt.%), MWNTs were close to each other to trigger tunneling in response of external loading. The sensor with MWNT 0.2 wt.% was able to maintain the repeatable sensing capability while sustaining a vehicular loading on road, demonstrating the feasibility in traffic flow sensing application.

• 센서학회지
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• 제33권3호
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• pp.165-172
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• 2024

In this study, we investigated the detection properties of piezoresistive carbon nanotubes/polydimethylsiloxane (CNT/PDMS) devices with porous structures under applied pressure. The device, having dimensions of 10 mm × 10 mm × 5 mm, was fabricated with a porosity of 74.5%. To fabricate piezoresistive CNT/PDMS devices, CNTs were added using two different methods. In the first method, the CNTs were mixed with PDMS before the fabrication of the porous structure, while in the second, the CNTs were coated after the fabrication of the porous structure. Various detection properties of the fabricated devices were examined at different applied pressures. The CNT-coated device exhibited stable outputs with lesser variation than the CNT-mixed device. Moreover, the CNT-coated device exhibited improved reaction properties. The response time of the CNT-coated device was 1 min, which was approximately about 20 times faster than that of the CNT-mixed device. Considering these properties, CNT-coated devices are more suitable for sensing devices. To verify the CNT-coated device as a real sensor, it was applied to the gripping sensor system. A multichannel sensor system was used to measure the pressure distribution of the gripping sensor system. Under various gripping conditions, this system successfully measured the distributed pressures and exhibited stable dynamic responses.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권2호
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• pp.147-152
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• 1999

Semiconductor piezoresistive type vibration sensor was fabricated by using semiconductor process and micromachining technology. To measure the micro electromagnetic force between coil and magnet, fabricated vibration sensor was used. Toapply micro electromagnetic force produced from the micro exciter, small-sized NdFeB permanent magnet was attached on the mass of the fabricated vibration sensor. The measured electromagnetic force are about 5~180dyne when the applied sinusoidal current of 1KHz in the range of 1.5~8mA. The measurement of micro electromagnetic forcewas performed by changing the distance between coil and magnet. Output characteristics of micro electromagnetic force according to the applied coil current were linear. Furthermore, output results were used to get the transfer constant that is important to decide the efficiency and the performance of the coil and magnet.

• 한국산업정보학회논문지
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• 제19권2호
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• pp.31-36
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• 2014

본 논문에서는 나노기술을 적용한 압저항형 온 습도복합센서를 개발하여 특성을 평가 분석 하였다. 온도 변화에 대한 출력 감도는 $20{\sim}80^{\circ}C$에 이르는 측정구간에서 약 0.75mV/$1^{\circ}C$의 출력 값을 보였다. 습도 변화에 대한 감도는 약 1.35mV/10%(RH)의 결과를 나타내었다. 이와 같은 결과에 의하여 본 논문에서 개발한 센서는 일반적인 생활 주거 환경에 적용이 가능함을 시사해 준다.