• Korean Journal of Acupuncture
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• 제24권3호
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• pp.105-116
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• 2007

Objectives : This study was performed to determine whether a pulse analyzer using array piezoresistive sensor was useful to characterize the variables of pulse wave of hypertentive patients (HT) , compared with those of healthy subjects. Methods : One hundred twenty two subjects participated in this study. Sixty nine subjects had hypertension and fifty three subjects had no specific history or disease associated with hypertension. We used automatic pulse analyzer with array piezoreslstive sensor. Results : Calibrated in Chon, no specific differences was between HT group and the healthy group. Calibrated in Gwan. sum of pulse pressure (SPP) of HT group was higher than that of the healthy group. Calibrated in Cheek, mean of height of main peak (Mm) and height of main peak (h1) of HT group were higher than those of the healthy group. Conclusions : Pulse analyzer was useful to determine the risk degree or development possibility of hypertension.

• 대한기계학회논문집B
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• 제27권9호
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• pp.1248-1255
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• 2003

Pressure coefficient in a rotating discharge hole was measured to gain insight into the influence of rotation on the discharge characteristics of rotating discharge holes. Pressures inside the hole were measured by a telemetry system that had been developed by the authors. The telemetry system is characterized by the diversity of applicable sensor type. In the present study, the telemetry system was modified to measure static pressure using piezoresistive pressure sensors. The pressure sensor is affected by centrifugal force and change of orientation relative to the gravity. The orientation of sensor installation for minimum rotating effect and zero gravity effect was found out from the test. Pressure coefficients in a rotating discharge hole were measured in longitudinal direction as well as circumferential direction at various rotating speeds and three different pressure ratios. From the results, the behaviors of pressure coefficient that cannot be observed by a non-rotating setup were presented. It was also shown that the discharge characteristics of rotating discharge hole is much more influenced by the Rotation number irrespective of pressure ratio.

• 센서학회지
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• 제6권6호
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• pp.430-436
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• 1997

SDB웨이퍼를 사용한 압저항 형태의 50 G용 가속도 센서를 실리콘 마이크로머시닝을 사용하여 제조하였다. 이 형태의 가속도 센서는 진동하는 사각형의 매스와 4개의 빔으로 구성되어 있다. 이 구조는 RIE를 이용한 건식식각과 KOH 용액을 이용한 습식식각을 이용하여 제조되었다. 정사각형의 보상구조가 매스 가장자리의 언더에칭에 기인하는 변형을 보상하기 위해 사용되었다. 제조된 센서는 인가된 가속도에 대하여 선형적인 출력전압특성을 보여주고 감도는 0에서 10 G까지 약 $88{\mu}V/V{\cdot}g$이었다.

• Journal of Magnetics
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• 제18권2호
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• pp.173-177
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• 2013

Cantilever-detected high-frequency electron spin resonance (ESR) is a powerful method of sub-terahertz and terahertz ESR spectroscopy for a tiny magnetic sample at low temperature. In this technique, a small magnetization change associated with ESR transition is detected as deflection of a sample-mounted cantilever. So far, we have succeeded in ESR detection at 370 GHz using a commercial piezoresistive microcantilever. The spin sensitivity was estimated to ${\sim}10^{12}$ spins/gauss. In order to further increase the sensitivity, we adopt a fiber-optic-based detection system using a Fabry-Perot interferometer in place of piezoresistive system. Fabry-Perot cavity is formed between an optical-fiber end and microcantilever surface, and a change in the interference signal, corresponding to the cantilever deflection, is sensitively detected. This system is suitable for low-temperature and high-magnetic-field experiments because of its compact setup and less heat dissipation. In this study, performance of Fabry-Perot interferometer is evaluated, and its application to cantilever-detected ESR measurement is described.

• 반도체디스플레이기술학회지
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• 제2권4호
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• pp.19-22
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• 2003

In this paper, Si anisotropic etching characteristics of tetramethylammonium hydroxide (TMAH)/ammonium persulfate (AP) solutions were investigated to realize the optimum structure of a diaphragm for the piezoresistive pressure sensor application. Due to its low toxicity and its high compatibility with the CMOS processing, TMAH was used as Si anisotropic etchants. The variations of Si etch rate on the etching temperature, TMAH concentration, and etching time were obtained. With increasing the etching temperature and decreasing TMAH concentrations, the Si etch rate is increased while a significant non-uniformity exists on the etched surface because of formation of hillocks on the <100> surface. With the addition of AP to TMAH solution, the Si etch rate is increased and an improvement in flatness on the etching front is observed. The Si etch rate is also maximized with increasing the number of addition of AP to TMAH solution per one hour. The Si square diaphragms of 20$\mu\textrm{m}$ thickness and 100-400 $\mu\textrm{m}$ one-side length were fabricated successfully by adding AP of (5/6)g to 800 ml TMAH solution every 10 minutes.

• 대한기계학회논문집A
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• 제31권4호
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• pp.417-424
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• 2007

This paper reports fabrication and characterization of a pressure sensor using a pitch-based carbon fiber. Pitch-based carbon fibers have been shown to exhibit the piezoresistive effect, in which the electric resistance of the carbon fiber changes under mechanical deformation. The main structure of pressure sensors was built by performing backside etching on a SOI wafer and creating a suspended square membrane on the front side. An AC electric field which causes dielectrophoresis was used for the alignment and deposition of a carbon fiber across the microscale gap between two electrodes on the membrane. The fabricated pressure sensors were tested by applying static pressure to the membrane and measuring the resistance change of the carbon fiber. The resistance change of carbon fibers clearly shows linear response to the applied pressure and the calculated sensitivities of pressure sensors are $0.25{\sim}0.35 and 61.8 ${\Omega}/k{\Omega}{\cdot}bar$ for thicker and thinner membrane, respectively. All these observations demonstrated the possibilities of carbon fiber-based pressure sensors.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 제38회 하계학술대회
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• pp.1914-1915
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• 2007

The period and strength of the pulse on the radial artery are important physiological factors, and they have been used to diagnosis in both Western and Eastern countries for a long time and has been developed as a unique method of diagnosis at each countries. Recently, there are a lot of systems which can give diagnosis information by recording the pulse wave and analyzing the characteristics of the pulse shape. This study describes the Pulse-Wave Measurement System which is able to measure the pulse wave signal using piezoresistive sensor and the pulse wave signal measured by the developed system is transmitted to a computer on the basis of the USB Driver. It has finally shown the the pulse wave signal measured by the sender is appeared to the host PC in real time. The Pulse-Wave Measurement System used the piezoresistive sensor to measure the pulse wave signal and the differential amplifier(AD620) to amplify the pulse wave signal which is small signal. And it used the ADC to convert analog to digital for the measured analog signal and the interface with a computer. It transmitted the measured pulse signal through USB transmission module to the host computer and Labview tool shows it. This Pulse-Wave measurement system will afford comvenience of detecting pulse wave to user related to oriental medicine.

• 센서학회지
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• 제32권6호
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• pp.470-474
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• 2023

In this study, a diaphragm-type pressure sensor was developed using multi-layer(four-layer) graphene produced at 1 nm thickness by thermally transferring single-layer graphene produced by chemical vapor deposition (CVD) to a 6" silicon wafer. By measuring the gauge factor, we investigated whether it was possible to produce a pressure sensor of consistent quality. As a result of the measurement, the pressure sensor using multilayer graphene showed linearity and had a gauge factor of about 17.5. The gauge factor of the multilayer graphene-based pressure sensor produced through this study is lower than that of doped silicon, but is more sensitive than a general metal sensor, showing that it can be sufficiently used as a commercialized sensor.

• 센서학회지
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• 제33권3호
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• pp.173-178
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• 2024

Development of pressure sensors for harsh environments with high pressure, humidity, and temperature is essential for many applications in the aerospace, marine, and automobile industries. However, existing materials such as polymers, adhesives, and semiconductors are not suitable for these conditions and require materials that are less sensitive to the external environment. This study proposed a pressure sensor that could withstand harsh environments and had high durability and precision. The sensor comprised a piezoresistor pattern and an insulating film directly formed on a stainless-steel membrane. To achieve the highest sensitivity, a pattern design method was proposed that considered the stress distribution in a circular membrane using finite element analysis. The manufacturing process involved depositing and etching a dielectric insulating film and metal piezoresistive material, resulting in a device with high linearity and slight hysteresis in the range of a maximum of 40 atm. The simplicity and effectiveness of this sensor render it a promising candidate for various applications in extreme environments.

• 마이크로전자및패키징학회지
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• 제25권1호
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• pp.35-40
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• 2018

Nd:YAG Laser를 이용하여 polyimide film에 탄화(carbonization)를 진행하여 Carbon을 생성하여 저가의 센서를 간단한 제조과정으로 만들었다. 이를 통하여 유연한 저가형 압저항 센서의 특성에 관한 연구를 수행하였다. 기존에 많은 연구들이 Polyimide에 $10.6{\mu}m$의 파장을 가지는 $CO_2$ laser를 이용하여 carbonization을 하여 센서를 제작하였다. 본 논문에서는 polyimide film에 $1.064{\mu}m$의 파장을 가지는Nd:YAG laser를 이용하여 carbonization(탄화공정)을 진행하였다. 또한 Nd:YAG laser를 사용하여 polyimide film위에 직접 탄화시키며 carbon을 생성하는 최적의 전력밀도($W/cm^2$)과 속도(scan rate) 조건 조합을 찾아 해상도를 높였다. $CO_2$ laser를 사용하였던 기존의 선행연구에서는 carbon생성의 최소 선폭이 $140{\sim}220{\mu}m$의 길이를 가졌지만, 본 연구에서는 카본의 생성되는 선폭이 $35{\sim}40{\mu}m$으로 축소시켰다. 이번 연구에서 제작된 센서의 초기 면저항은 $100{\sim}300{\Omega}/{\square}$ 이였다. 곡률 반경 21 R 로 인장을 하였을 때 저항이 30% 줄어들었고, 이를 통하여 계산된 게이지 팩터는 56.6이였다. 본 연구는 압저항 센서를 제조하기 위한 단순하고, 매우 유연하고 저렴한 공정을 제공한다.