• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07a
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• pp.177-180
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• 2002

Thickness dependence of crystallographic orientation of diol based sol-gel derived PZT(52/48) films on dielectric and piezoelectric properties was investigated The thickness of each layer by one time spinning was about 0.2 $\mu\textrm{m}$, and crack-free films was successfully deposited on 4 inches Pt/Ti/SiO$_2$/Si substrates by 0.5 mol solutions in the range from 0.2 $\mu\textrm{m}$ to 3.8 $\mu\textrm{m}$. Excellent P-E hysteresis curves were achieved without pores or any defects between interlayers. As the thickness increased , the (111) preferred orientation disappeared from 1$\mu\textrm{m}$ to 3 $\mu\textrm{m}$ region, and the orientation of films became random above 3 $\mu\textrm{m}$. Dielectric constants and longitudinal piezoelectric coefficient d$\_$33/, measured by pneumatic method were saturated around the value of about 1400 and 300 pC/N respectively above the thickness of 0.8 7m. A micromachined piezoelectric cantilever have been fabricated using 0.8 $\mu\textrm{m}$ thickness PZT (52/48) films. PZT films were prepared on Si/SiN$\_$x/SiO$_2$/Ta/Pt substrate and fabricated unimorph cantilever consist of a 0.8 fm thick PZT layer on a SiNx elastic supporting layer, which becomes vibration when ac voltage is applied to the piezoelectric layer. The dielectric constant (at 100 kHz) and remanent polarization of PZT films were 1050 and 25 ${\mu}$C/$\textrm{cm}^2$, respectively. Electromechanical characteristics of the micromachined PZT cantilever in air with 200-600 $\mu\textrm{m}$ lengths are discussed in this presentation.

• Journal of the Korean Ceramic Society
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• v.32 no.10
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• pp.1131-1138
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• 1995

Variations of piezoelectric properties and compressive strength of Sr-doped PZT ceramics were investigated with poling direction. The electro-mechanical coupling constants (k31 and k33) were increased linearly with increasing poling strength. The volume fraction of intergranular fracture also increased with incresing poling strength due to weakening of grain boundaries by domain rearrangement during poling process. The internal stresses induced from the poling at 2.5 kV/mm parallel and perpendicular to the poling direction poled were 405 MPa and 89 MPa, respectively. The compressive strength of the specimen poled parallel to the poling direction was higher than that perpendicular to the poling direction.

• Proceedings of the KIEE Conference
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• 1997.07d
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• pp.1323-1325
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• 1997

The necessity of this work is described with present problems in the application of computer simulation methods to electrical material research. Author proposes and develops method which can calculate properties such as dielectric and piezoelectric constants for ZnO. The method based on ab-initio method. It is found that these properties can be calculated with a good precision by this method.

• Journal of the Korean Ceramic Society
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• v.25 no.2
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• pp.125-130
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• 1988

The characteristics of the PZT/PMM and PZT/Butadiene composites with 3 dimensional network structure have been investigated as a function of the PZT volume fraction. The dielectric constants of the PZT composites increased linearly as the PZT volume fraction increased. However, they are not significantly affected by the polymer compliance. The piezoelectric d33 coefficients of the PZT/Butadiene are largest than the PZT/PMM because of the high elastic compliance which promotes stress transfer. The values of the mechanical quality factor adn frequency factor of the PZT/PMM composite are slightly larger, while the planar coupling factor is smaller, than the PZT/Butadiene composite. These results are due to strong interaction and mechanical coupling between PZT and PMM.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.05a
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• pp.625-629
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• 1999

In this study, in order to develop high sensitivity and low noise acoustic emission sensor, we manufactured the Pb(Zr, Ti)O$_3$ ceramics with the addition of WO$_3$ wt% to search for its required characteristics. Dielectric constant was increased as a function of the increase of WO$_3$ wt%. The Pb(Zr, Ti)O$_3$ (EC-65) ceramics added with 0.1lwt% WO$_3$ showed excellent dielectric constant and piezoelectric constants of 1931 and 199.55$\times$10$^{-12}$ (C/N), respectively. Accordingly It was shown as the composition ceramics suitable for AE sensor.

• Steel and Composite Structures
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• v.27 no.4
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• pp.465-477
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• 2018

In this research, vibration and smart control analysis of a concrete foundation reinforced by $SiO_2$ nanoparticles and covered by piezoelectric layer on soil medium is investigated. The soil medium is simulated with spring constants and the Mori-Tanaka low is used for obtaining the material properties of nano-composite structure and considering agglomeration effects. With considering first order shear deformation theory, the total potential energy of system is calculated and by means of Hamilton's principle in three displacement directions and electric potential, the six coupled equilibrium equations are obtained. Also, based an analytical method, the frequency of system is calculated. The effects of applied voltage, volume percent and agglomeration of $SiO_2$ nanoparticles, soil medium and geometrical parameters of structure are shown on the frequency of system. Results show that with applying negative voltage, the frequency of structure is increased.

• Advances in nano research
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• v.8 no.2
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• pp.169-182
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• 2020

This study presents the hygro-thermo-electromagnetic mechanical vibration attributes of elastically restrained piezoelectric nanobeam considering effects of beam surface for various elastic non-ideal boundary conditions. The nonlocal Eringen theory besides the surface effects containing surface stress, surface elasticity and surface density are employed to incorporate size-dependent effects in the whole of the model and the corresponding governing equations are derived using Hamilton principle. The natural frequencies are derived with the help of differential transformation method (DTM) as a semi-analytical-numerical method. Some validations are presented between differential transform method results and peer-reviewed literature to show the accuracy and the convergence of this method. Finally, the effects of spring constants, changing nonlocal parameter, imposed electric potential, temperature rise, magnetic potential and moisture concentration are explored. These results can be beneficial to design nanostructures in diverse environments.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.34-34
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• 2003

Piezoelectric or magnetostrictive materials, known as smart materials, have been researched widely for sensors or actuators in micro system technology. In our research, thick sol-gel lead zirconate titanate(Pb(Zr$\sub$1-x/Ti$\sub$x/)O$_3$) films were fabricated and their characteristics were investigated f3r angular rate sensor applications. The thickness of the PZT films is 1.5${\mu}$m, which is required by a vibration angular rate sensor for a good actuation and sensing. The remnant polarization of the PZT flms is 12.0 ${\mu}$C/$\textrm{cm}^2$. The electromechanical constants of PZT thin film showed the value of susceptance(B) of 4800${\mu}$ s at capacitance of 790pF. The PZT films were applied to the vibration angular rate sensor structure and the vibration of 1.78 ${\mu}$m in amplitude at the resonant frequency of 35.8㎑ was obtained by driving voltage of 5V$\sub$p-p/ of bulk piezoelectric materials with out of phase signal through voltage and inverting amplifier.

• Advances in materials Research
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• v.12 no.4
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• pp.309-330
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• 2023

The humid thermal vibration characteristics of a nonhomogeneous thermopiezoelectric nonlocal plate of polygonal shape are addressed in the purview of generalized nonlocal thermoelasticity. The plate is initially stressed, and the three-dimensional linear elasticity equations are taken to form motion equations. The problem is solved using the Fourier expansion collocation method along the irregular boundary conditions. The numerical results of physical variables have been discussed for the triangle, square, pentagon, and hexagon shapes of the plates and are given as dispersion curves. The amplitude of non-dimensional frequencies is tabulated for the longitudinal and flexural symmetric modes of the thermopiezoelectric plate via moisture and thermal constants. Also, a comparison of numerical results is made with existing literature, and good agreement is reached.

• Journal of Korean Vacuum Science & Technology
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• v.3 no.2
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• pp.126-129
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• 1999

PbTio3 is a promising material with perovskite structure for pyroelectric sensor applications with its superior pyroelectric properties, low dielectric constants, and low piezoelectric constants. Growth of pyroelectric thin films in general, needs relatively higher temperatures than those of conventional Si semiconductor processing However, low growth temperature is advantageous for the device integration. We report the low temperature (350$^{\circ}C$) growth of PbTio3 thin films by 3-gun DC magnetron reactive sputtering. The effects of substrate temperature, Pb-flux, and total pressure on crystalinity and preferred orientation of PbTio3 thin films are reported.