• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.11a
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• pp.371-375
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• 2001

The concept of a new linear motor that uses piezo-stack actuator is demonstrated. The working principle is far different from the conventional inchworm motor. This motor is based on the self-moving cell concept. The linear motor has three cells and each cell is constructed with one piezo-stack actuator and a shell structure. A cell train is constructed by connecting these cells and the cell train is fitted into a guide way with a proper interference. The cell train moves along the guide way, by activating each cell in succession. The moving motion of the motor is tested. Since this linear motor uses piezo-stack actuator with unified clamping cell, it can produce fast speed, high resolution and large push force.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.11a
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• pp.649-654
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• 2003

This paper is focused on the research of the ultra precision linear motor by using piezo stack actuators. The development of linear motor which can be controlled nano or micro scale is necessary for the precision manufacturing. Self-moving-cell principle is used for the design of linear motor Self-moving-cell linear motor is consisted of three cell structures, and each cell has two shells and one piezo-stack actuator. Each cell can do clamping and moving by two shell structures. The shell structure deformation by piezo stack actuator can move the linear motor by losing the clamping between the shall and guideway. This paper presents the design, manufacturing and test of the motor.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.38 no.9
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• pp.869-874
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• 2010

Recently, a piezo actuator based linear motor has been actively studied because of its higher power density, compactness and quick response. However, the characteristic of small displacement makes the application of a piezo actuator limitative. In order to overcome this limitation, some actuation mechanisms using a piezo actuator are designed by bi-metal composite or more than two piezo actuators. Therefore, it enables to generate large displacement and have high resolution. In the proposed piezo motor, we have designed a bi-directional linear motor that can be operated by only one piezo actuator. In addition, it is activated with low frequency of the applied voltage, since, we utilize first mode shape of structure of motion generator to vibrate. Finally, moving direction can be simply controlled by changing the ratio of input frequency to natural frequency of structure of motion generator.

• The Bulletin of The Korean Astronomical Society
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• v.44 no.2
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• pp.57.3-57.3
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• 2019

Space applications of the motion have been served with DC motors for decades. But their functionality with a gearbox and lubricants and their weights are always an issue for its application. A piezo-motor has an advantage on the direct driving with higher accuracy, smaller size, and no-EMI. We use the piezo-motor to rotate a filter wheel directly in a balloon-borne coronagraph launched on September 2019. The piezo-motor works well in a temperature range from -10 to 40 Celsius with high reliability and high positioning / tilt accuracy (~0.1degree) with a photo-encoder. We verify its functionality for 7 days. In this talk, we report the design, test processes of the filter wheel including its balloon flight result.

• Nuclear Engineering and Technology
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• v.55 no.8
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• pp.3114-3120
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• 2023

A high-accuracy magnetic field measurement device based on a cyclotron is being developed for accelerator mass spectrometry (AMS). In this study, a magnetic field measurement device consisting of a Hall probe sensor, piezo-motor, and step motor was developed to measure the magnetic field of the AMS cyclotron magnet. The Hall probe sensor was calibrated to achieve positional accuracy by using polar coordinates. The measurement results between the ratchet gear and piezo-motor, which are the instruments used for driving the measurement device, were analyzed. The measurement result of the device with a piezo-motor exhibits a difference of 5 Gauss (0.04%) as compared with the simulation result.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.437-441
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• 1995

In this paper, the ultra precision positioning system for servo motor and piezo actuator using dual servo loop control has been developed. For positioning system having long distance with ultra precision, the combination of global stage and micro stage is required. Servo moter and ball screw are used as a master stage and piezo acuator as a fine stage. By using this system, an positional precision witin .+-. 30nm has been achieved at dual servo loop control. When using micro stage, an positional precision within .+-. 10nm has been achieved. This result can be applied to develop semiconductor equipment such as wafer stepper.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.3 s.96
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• pp.154-163
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• 1999

In this paper, an ultra precision positioning system has been developed using dual servo loop control. For positioning system having long distance with ultra precision , the combination of global stage and micro stage was required. A servo motor based ball screw is used as a global stage and the piezo actuator as a micro stage. For the improvement of positional precision, the digital Chebyshev filter is implemented in the developed to dual servo system. Therefore, the positional repeatability has been achieved within ${\pm}$ 10 mm, and this technique can be applied to develop precision semiconductor equipments such as lithography steppers and probers.

• Proceedings of the KIEE Conference
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• 2004.11c
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• pp.754-756
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• 2004

The ultrasonic piezo motor is a new type motor that has an excellent performance and many useful features that electromagnetic motors do not have. But, it suffers from severe system non-linearities and parameter variations especially during speed control. Therefore, it is difficult to accomplish satisfactory control performance by using the conventional PID controller. In this paper, to achieve the precise control, we analyzed response time & change with a driving time, and proposed PD controller combined with neural network. The backpropagation algorithm is used to train a given trajectory. The effectiveness of the used method is confirmed by experiments. The effectiveness of the used method is confirmed by experiments using the ultrasonic motor made in Korea.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11b
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• pp.414-417
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• 2001

Recently, developments of device using characteristics of ceramics as a new technical material is in progress. While doing so, Ultrasonic motor which is a part of research & development of piezo-actuator by piezo-effects is being used in the various applications. So, we fabricated a flat-type $L_{1}-B_{8}$ mode Ultrasonic motor and measured the operation characteristics of its. The size of USM is 80*20*1.5[$mm^{3}$](length*width*thickness) and is constructed with stator by piezo-ceramics and stainless elastic body and rotator by bearings. As results of experiments, the fastest speed of revolution(v), the maximum torque(T) and the efficiency( $\eta$ ) were 37.5[cm/sec], 5.0[ $mN{\cdot}m$ ] and 1.17[%] respectively when 27.9[kHz], 150[gf], 50[V] were applied. So, we think this $flat-type_{1}-B_{8}$ mode Ultrasonic motor is able to be used for applications in forwarding device of a paper or electric card and so on.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.6 no.2
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• pp.165-171
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• 2005

The ultrasonic piezo motor is a new type motor that has an excellent performance and many useful features that electromagnetic motors do not have. But, it suffers from severe system non-linearities and parameter variations especially during speed control. Therefore, it is difficult to accomplish satisfactory control performance by using the conventional PID controller. In this paper, to achieve the precise control for linear type ultrasonic motor was analyzed as a function of response time and change with a driving time. Also, we propose controller that combines STEP controller and PD controller that have error of ${\mu}m$ about liner type ultrasonic motor.