• 전기학회논문지
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• 제61권12호
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• pp.1843-1847
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• 2012

Piezo devices have large power density and simple structure. They can generate larger force than the conventional actuators. It has also wide bandwidth with fast response in a compact size. Thus the piezo devices are expected to be used widely in the future for small actuators with fast response time and large actuating force. However, the piezo actuators need high voltage with high driving current due to their large capacitive property. In this paper, we propose a simple method to drive piezo devices using voltage inversion circuit with coil inductance. Experiments with real circuit demonstrates that the proposed scheme can improve the energy efficiency very much.

• 전기학회논문지
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• 제62권8호
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• pp.1095-1100
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• 2013

Piezo devices have large power density and simple structure compared with conventional electrical motors. Thus they can generate larger forces than the conventional actuators with small size. Their resopnses to commands are also very fast and thus the bandwidths are very wide. Thus the piezo devices are expected to be used widely in the future for actuating devices requiring fast response and large actuating force with small size. However, the piezo actuators need high voltage with high driving current due to their large capacitive property. In this paper, proposed is a simple method to drive piezo devices using voltage inversion circuit with coli inductance. The coil inductance carries the charges in the piezo device to the opposite side, inverting the polarity of the applied voltage, thus saving the power to drive the device with AC voltages. Experiments with real circuit demonstrates that the proposed scheme can improve the energy efficiency very much.

• Nuclear Engineering and Technology
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• 제55권8호
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• pp.3114-3120
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• 2023

A high-accuracy magnetic field measurement device based on a cyclotron is being developed for accelerator mass spectrometry (AMS). In this study, a magnetic field measurement device consisting of a Hall probe sensor, piezo-motor, and step motor was developed to measure the magnetic field of the AMS cyclotron magnet. The Hall probe sensor was calibrated to achieve positional accuracy by using polar coordinates. The measurement results between the ratchet gear and piezo-motor, which are the instruments used for driving the measurement device, were analyzed. The measurement result of the device with a piezo-motor exhibits a difference of 5 Gauss (0.04%) as compared with the simulation result.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2013년도 춘계학술대회 논문집
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• pp.454-459
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• 2013

For the purpose of rapid development and superior design quality assurance, sophisticated finite element model for SOM(Spatial Optical Modulator) piezo actuator of MOEMS device has been developed and evaluated for the accuracy of dynamics and residual stress analysis. Parametric finite element model is constructed using ANSYS APDL language to increase the design and analysis performance. Geometric dimensions, mechanical material properties for each thin film layer are input parameters of FE model and residual stresses in all thin film layers are simulated by thermal expansion method with psedu process temperature. $6^{th}$ mask design samples are manufactured and $1^{st}$ natural frequency and 10V PZT driving displacement are measured with LDV. The results of experiment are compared with those of the simulation and validate the good agreement in $1^{st}$ natural frequency within 5% error. But large error over 30% occurred in 10V PZT driving displacement because of insufficient PZT constant $d_{31}$ measurement technology.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1991년도 한국자동제어학술회의논문집(국내학술편); KOEX, Seoul; 22-24 Oct. 1991
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• pp.528-532
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• 1991

Having very small linear displacement, piezoelectric actuators have been restricted in robotic application as positioning devices. In this paper, a mechanical amplifier was developed to enhance the displacement of piezoelectric actuator and the corresponding driving circuit was designed. This equipment was integrated as a robotic wrist having 2 D.O.F micropositioning capability. Each joint was analysed in mechanical and dynamic view points. Experimental result showed that this device has Some hysteresis but could be used as vibratory robotic wrist with relatively high frequency. For more fine positioning control, a closed loop approach must be taken into account.

• 한국전기전자재료학회논문지
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• 제23권3호
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• pp.250-259
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• 2010

The ability for energy harvesting via the piezoelectric effect was studied for a unimorph element such as piezo buzzer. A simple equivalent circuit was proposed to predict the energy generated based on the internal stress. Unimorphs with a metal-cavity were used as a driving device of the generation panel. Both the AC open voltage and DC output voltage as a function of pressure period and number of element were measured. For the unimorph generation circuit, DC output voltage varies with pressure period, reaching a maximum value at $470{\mu}F$. The maximum output voltage a according to load resistance was measured at $1M{\Omega}$. Data analysis of the DC output voltage and time constant indicated that number of piezoelectric element of optimum was 60~80. It was found that piezoelectric unimorph has the possibility to be used as the driving element of the electric generation.

• 한국전기전자재료학회논문지
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• 제33권4호
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• pp.276-280
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• 2020

A linear piezoelectric actuator that utilizes the elliptical motion of the two tips of the actuator is proposed. This device is easy to fabricate owing to its simple structure, consisting of three piezo ceramic benders and is suitable for use in micro robotic applications. A π-shaped structure, which was composed of four piezo ceramic benders, was constructed. Two of the benders were positioned on the center of the actuator, and the joints were attached at the ends of the cantilever. The other two benders were positioned on the side of the actuator and were attached between the joint and the tips. The actuator structure was designed to obtain the first bending mode of the horizontal vibration and the vertical vibration at the same frequency, resulting in elliptical motions at the tips. When two sinusoidal wave voltages with a 90-degree phase difference were applied to the two pairs of the actuator benders, elliptical motions were obtained at the tips. The driving characteristics of the prototype actuator were then measured using a laser doppler vibrometer.

• International Journal of Aeronautical and Space Sciences
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• 제16권4호
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• pp.520-528
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• 2015

The piezoelectric-hydraulic actuator is a hybrid device that consists of a hydraulic pump driven by a piezo-stack coupled to a conventional hydraulic cylinder. The actuator is of compact size, but can produce a moderate energy output. Such hybrid actuators are currently being researched and developed in many industrialized countries due to the requirement for high performance and compact flight systems. In a previous study, we designed and manufactured a unidirectional hybrid actuator. However, the blocking force was not as high as expected. Therefore, in this study, we redesigned the pump chamber and hydraulic cylinder and also improved the system by removing the air bubbles. Two different types of piezo-stacks were used. In order to achieve bidirectional capabilities in the actuator, commercial solenoid valves were used to control the direction of the output cylinder. Experimental testing of the actuator in unidirectional and bidirectional modes was performed to examine performance issues related to driving frequency, bias pressure, reed valve thickness, etc. The results showed that the maximum blocking force was measured as 970.2N when the frequency was 185Hz.

• 한국전기전자재료학회논문지
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• 제28권2호
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• pp.69-74
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• 2015

Recently, energy harvesting technology is increasing due to the fossil fuel shortages. Energy harvesting is generating electrical energy from wasted energies as sunlight, wind, waves, pressure, and vibration etc. Energy harvesting is one of the alternatives of fossil fuel. One of the energy harvesting technologies, the piezoelectric energy harvesting has been actively studied. Piezoelectric generating uses a positive piezoelectric effect which produces electrical energy when mechanical vibration is applied to the piezoelectric device. Piezoelectric energy harvesting has an advantage in that it is relatively not affected by weather, area and place. Also, stable and sustainable energy generation is possible. However, the output power is relatively low, so in this paper, newly designed honeycomb shaped piezoelectric energy harvesting device for increasing a generating efficiency. The output characteristics of the piezoelectric harvesting device were analyzed according to the change of parameters by using the finite element method analysis program. One model which has high output voltage was selected and a prototype of the honeycomb shaped piezoelectric harvesting device was fabricated. Experimental results from the fabricated device were compared to the analyzed results. After the AC-DC converting, the power of one honeycomb shaped piezoelectric energy harvesting device was measured 2.3[mW] at road resistance 5.1[$K{\Omega}$]. And output power was increased the number of harvesting device when piezoelectric energy harvesting device were connected in series and parallel.

• 한국정밀공학회지
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• 제12권7호
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• pp.26-31
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• 1995

A new actuating mechanism suitable for a micro positioning device is developed using piezo-electric elements. The actuator can make a step movement of 0.5 .mu. m up to 3.5 .mu. m. The step size can be adjusted on demand. By repeating this step action, long distance movement is achieved. Precise positioning can be obtained by combining the coarse motion with the maximum step size and fine motion. Two types of fine motion have been proposed for a driving method. Firstly, feedback control bases on PID is applied. The experimental results for the two method are presented.