• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.123-128
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• 2005

A novel tri-mode ultraprecision positioning system for machine tools and measuring machine is proposed. The basic coarse mode uses a Twist-roller Friction Drive (abbr. TFD), and controls several tens of millimeters of the machine-table travel with nanometer order of positioning resolution. The fine mode also utilizes the TFD with a fine adjusting mechanism. The resolution of the fine mode is in the range of sub-nanometer. For realizing picometer positioning, the ultra-fine mode is executed by using an active aerostatic guideway. On the bearing surface of this active guideway, several Active Inherent Restrictors (abbr. AIRs) are embedded for controlling the table position. An AIR unit consists of a piezoelectric actuator having a through hole, one end of the hole on the bearing surface acts as an inherent restrictor. Owing to the aerostatic mechanism of the AIR, the deformation of the piezoelectric actuator in the AIR unit causes much reduced table displacement. Such motion reduction is effective for ultraprecision positioning. Current positioning resolution of the ultra-fine mode is 50pm, however the final goal of the positioning resolution is expected to be in the order of picometer.

• Journal of the Korean Applied Science and Technology
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• v.14 no.2
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• pp.87-91
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• 1997

서로 다른 씨클로펜타디엔 유도체가 ${\pi}$-결합된 최초의 비스무스 화합물인 ${\eta}^5-C_5(CH_3)_5Bi({\eta}^5-C_5H_5)_2$이 디펜타메틸씨클로펜타디에닐 비스무스디메틸아미드 $Cp{\ast}_2BiNMe_2[Cp{\ast}=C_5(CH_3)_5]$와 씨클로펜타디에닐 모노머와의 반응으로 합성되었다. 반응조건은 에테르 용매하에 -78$^{\circ}C$ 반응온도 조건하에서 얻어졌다. 합성된 반응물을 노르말 헥산 용매에서 재결정시킨 결과, 검은색 결정이 60% 수율로 얻어졌다. 그리고 재결정시킨 반응물을 190K에서 X-선 단결정 구조 분석 방법에 의해 그 구조를 밝혔다. 그 결과 결정계의 격자계는 I2/a, a=1756.00 picometer, b=906.00 picometer, c=2211.00 picometer, ${\beta}$=104.04, Z=8로 확인되었다. 여기서 a, b, c는 결정�Ю� 상수이고, ${\beta}$는 결정격자 상수인 b와 c간의 각도이며, Z는 단위 결정 격자당 분자의 갯수이다.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.4
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• pp.11-15
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• 2008

Metrology tools with the ability to measure spindle motion error on the order of a nanometer are required due to recent advances in nanotechnology. We propose a direct measurement method for the radial motion error of a precision spindle using a regular crystalline lattice and a scanning tunneling microscope (STM). A highly oriented pyrolytic graphite (HOPG) crystal combined with an STM is used as a two-dimensional reference scale. The measurement principle and the preliminary experimental results are discussed in this article. The preliminary experimental results demonstrated that the proposed method has the capability to incorporate a two-dimensional encoder to measure the spindle motion error.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.80-84
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• 2007

We propose a new displacement measurement method using a phase modulation homodyne interferometer and a tunable laser diode as a light source to determine an arbitrary length with a resolution in the order of 10 pm. In the proposed instrument, the displacement of a movable mirror in the interferometer can be converted to a frequency shift of the tunable laser diode. We discuss the principles of the proposed method, the instrumentation, and the experimental results, and compare the proposed method with two commercial displacement sensors. The commercial sensors used are a heterodyne interferometer, the interpolation error of which is also measured, and a capacitive sensor.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.32-37
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• 2007

This paper proposes a dual-mode ultra precision positioning system for machine tools and measuring machines. The objective was to position a machine table with a picometer order of resolution, i.e., pico-positioning. A twist-roller friction drive (TFD) was used in coarse-mode positioning. The TFD, which was driven by an AC servomotor, is a kind of lead screw in mechanical terms, and several centimeters of machine table movement was controlled with a nanometer order of positioning resolution. To eliminate lateral vibration caused by the TFD, an active aerostatic coupling driven by piezoelectric actuators was inserted between the TFD and the machine table. This active aerostatic coupling was also applied as a feed drive device for fine-mode positioning; in the fine mode, the positioning resolution was 50 pm. Factors influencing pico-positioning, such as how noise from displacement sensors and vibrations in the aerostatic guideway affect positioning resolution, are discussed.