• 폴리머
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• 제25권2호
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• pp.302-310
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• 2001

무전해도금법을 이용하여 구리/PET 필름 복합재료를 제조하였으며 에칭방법과 촉매액의 조성 및 acceleration 방법을 달리하여 PET 필름과 무전해도금된 구리 피막간의 접착력을 향상시키고자 하였다. HCl 용액으로 에칭된 PET 필름은 NaOH에 의한 것보다 더욱 세밀하게 에칭되어져 구리와 PET 필름간의 접착력은 향상되었으나 전자파 차폐효과는 유사한 경향을 보였다. 촉매액의 조성변화에 따른 영향을 살펴본 결과 PdCl$_2$:SnCl$_2$의 몰비가 1:4에서 1:16으로 증가할수록 PET 필름 위에 적층된 Pd/Sn 콜로이드 입자들의 크기가 감소하며 고르게 분포되는 경향을 보였다. 따라서 이들의 몰비가 증가할수록 구리도금이 균일하고 조밀하게 이루어져 접착력 및 차폐효과가 증가하였다. 또한 NaOH보다 HCl로 acceleration한 경우 촉매 입자의 크기가 작고 더 균일하게 분포되어 우수한 접착력과 도금물성을 나타내었다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 추계학술대회 논문집 학회본부 A
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• pp.442-445
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• 1999

In this work, to detect of hydrogen in DI water in the generator area of nuclear power plants was fabricated Pd/Pt gate MISFET sensor using Pd membrane. $H_2$ permeation through Pd accounts for external mass transfer, surface adsorption and desorption, transitions to and from the bulk metal, and diffusion within the metal. The identification of pinholes in the generator area of plant is an important safety consideration, as hydrogen build-up gives rise to explosion. For this type of application the sensor needs to be isolated in DI water, accordingly, a Pd membrane was used to separate the DI water. The hydrogen in the DI water was then absorbed on the Pd thin film and diffused into the oil through the thin film. The Pd/Pt gate MISFET sensor, encapsulated by oil, will thereby detect permeated hydrogen.

• 한국광학회지
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• 제18권6호
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• pp.389-394
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• 2007

단일모드 광섬유를 이용한 수소센서의 특성을 이론 및 실험으로 분석하였다. 검출 소재로 팔라듐(Pd:palladium) 필름을 이용하였고 광섬유와 Pd 사이의 접착력을 강화하기 위해 니켈(Ni) 필름을 사용하였다. 제작된 센서의 반응감도와 반응시간은 팔라듐 박막의 두께에 크게 의존하였다. 단일모드 광섬유 끝단에 접착층으로 5 nm 두께의 Ni 박막과 감응막으로 10 nm 두께의 Pd가 코팅된 센서는 0.6 dB의 반사도의 변화와 $3{\sim}5$초의 반응시간을 보였다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2000년도 하계학술대회 논문집 C
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• pp.1779-1781
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• 2000

Pd doped $SnO_2$ thin film sensors were prepared on alumina substrate by rf magnetron sputtering method. The sensitivity of thin film was investigated by varying the heat-treatment temperature, film thickness and gas species. The thin film heat-treated at 600$^{\circ}C$ and film thickness of 5000${\AA}$ showed the highest sensitivity at an operating temperature of 400$^{\circ}C$.

• 한국자기학회지
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• 제6권6호
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• pp.405-410
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• 1996

방사광 광전자분광법을 이용하여 $Co_{x}Pd_{100-x}$ 합금박막들(x = 0, 25, 40, 65)의 가전자띠 스펙트럼들을 측정하고, Co 3d 전자와 Pd 4d 전자들에 의한 각각의 부분스펙트럼 무게분포(partial spectral weight distribution : PSW)를 결정하였다. Co-Pd 합금박막에서의 Co 3d PSW는 수직자기이방성을 나타내는 영역에 해당하는 Co 함량 25% 이하에서 순수 Co 박막의 스펙트럼과 상당히 다른 구조를 보인 반면, Co 함량이 약 40% 이상이 되면 순수 Co 박막의 PES스펙트럼과 거의 일치하였다. Co 함량이 25% 이하의 Co 3d PSW에서 관찰된 페르미준위 근처의 봉우리 구조와 결합에너지 2 eV 근처의 어깨구조는 혼성에 의한 Co 3d 전자구조의 변화를 반영한다. 따라서 Co 3d 전자와 Pd 4d 전자 간의 혼성상호작용이 수직자기이방성의 결정에 중요한 역할을 하는 것으로 추측되었다. Co-Pd 합금박막에서의 Pd 4d PSW는 순수 Pd 스펙트럼에 비하여 그 폭이 넓고, 주 봉우리의 결합에너지가 크며, 페르미준위에서의 스펙트럼의 세기가 작게 관찰되었다. 그리고 Pd 함량이 감소함에 따라 Pd 4d PSW의 반치폭이 증가하였는데, 이러한 결과는 Co-Pd 합금이 형성될 때의 무질서 효과 또는 Co 3d 전자와 Pd 4d 전자간의 혼성상 호작용으로 인한 Pd 4d 전자구조의 변화를 반영하는 것으로 추측되었다.

• 한국재료학회지
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• 제24권10호
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• pp.532-537
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• 2014

In this study, highly sensitive hydrogen micro gas sensors of the multi-layer and micro-heater type were designed and fabricated using the micro electro mechanical system (MEMS) process and palladium catalytic metal. The dimensions of the fabricated hydrogen gas sensor were about $5mm{\times}4mm$ and the sensing layer of palladium metal was deposited in the middle of the device. The sensing palladium films were modified to be nano-honeycomb and nano-hemisphere structures using an anodic aluminum oxide (AAO) template and nano-sized polystyrene beads, respectively. The sensitivities (Rs), which are the ratio of the relative resistance were significantly improved and reached levels of 0.783% and 1.045 % with 2,000 ppm H2 at $70^{\circ}C$ for nano-honeycomb and nano-hemisphere structured Pd films, respectively, on the other hand, the sensitivity was 0.638% for the plain Pd thin film. The improvement of sensitivities for the nano-honeycomb and nano-hemisphere structured Pd films with respect to the plain Pd-thin film was thought to be due to the nanoporous surface topographies of AAO and nano-sized polystyrene beads.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 E
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• pp.2399-2401
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• 1999

This paper indicate that phase resolved partial discharge pattern are investigated on PET films with semiconductor particle. In this study, we measured phase-resolved PD pattern and statistical parameter from PET specimens according to containing semiconductor particle. Measurement system is the conventional PD detector using digital signal processing technique. The relationship of semiconductor particle in PET film was discussed through the difference of $\psi$-q-n distribution and statistical analysis.

• 한국표면공학회지
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• 제50권5호
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• pp.411-420
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• 2017

In this paper, two methods of making the Pd-added $SnO_2$ ($Pd-SnO_2$) powder with pure tetragonal phase by the hydrazine method were suggested and compared in terms of crystal structure, surface morphology, and alcohol gas response. One of the addition methods is to use $PdCl_2$ as a Pd source, the other is to use Pd-based organic with oleylamine (OAM). When Pd concentration was increased from 0 to 5 wt%, the average grain size of $Pd-SnO_2$ made with Pd-OAM were decreased from 32 to 12 nm. In the case of using with $PdCl_2$, grain size of the $PdCl_2$ fell to less than 10 nm. However, agglomerated and extruded surface morphology was observed for the films with Pd addition over 4 wt%. The crack-free $Pd-SnO_2$ thick films were able to successfully fill the $30{\mu}m$ gap of patterned Pt electrodes by optimized ink dropping method. Also, the 2 wt% $Pd-SnO_2$ thick film made with PdCl2 showed gas responses ($R_{air}/R_{gas}$) of 3.7, 5.7 and 9.0 at alcohol concentrations of 10, 50 and 100 ppm, respectively. On the other hand, the prepared 3 wt% $Pd-SnO_2$ thick film with Pd-OAM exhibited very excellent responses of 3.4, 6.8 and 12.2 at the equivalent measurement conditions, respectively. The 3 wt% $Pd-SnO_2$ thick film with Pd-OAM has a specific surface area of $31.39m^2/g$.

• 한국세라믹학회지
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• 제25권6호
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• pp.623-630
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• 1988

As a function of the composition and content of frit, the electrical property of Ag and Ag/Pd thick film conductors were investigated with microstructure. With increasing sintering temperature in Ag-frit thick film conductors, electrical sheet resistivity decreased, but again increased above 80$0^{\circ}C$. And when frit contents is 5wt%, compact and homogenious microstructure can be obtained, then electrical sheet resistivity has minimum value. In Ag/Pd-frit film conductor, the electrical sheet resistivity decreased with increasing sintering temperature. The system which having frit with low softing point has lower sheet resistivity then to add high softening point frit.

• 센서학회지
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• 제15권2호
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• pp.120-126
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• 2006

Physicochemical and electrical properties for hydrogen gas sensors based on Pd-deposited $WO_3$ thin films were investigated as a function of Pd thickness, annealing temperature, and operating temperature. $WO_3$ thin films were deposited on an insulating material by thermal evaporator. XRD, FE-SEM, AFM, and XPS were used to evaluate the crystal structure, microstructure, surface roughness, and chemical property, respectively. The deposited films were grown $WO_3$ polycrystalline with rhombohedral structure after annealing at $500^{\circ}C$. The addition effect of Pd is not the crystallinity but the suppression of grain growth of $WO_3$. Pd was scattered an isolated small spherical grain on $WO_3$ thin film after annealing at $500^{\circ}C$ and it was agglomerated as an irregular large grain or diffused into $WO_3$ after annealing at $600^{\circ}C$. 2 nm Pd-deposited $WO_3$ thin films operated at $250^{\circ}C$ showed good response and recovery property.