• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2007년도 춘계학술대회 논문집
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• pp.368-370
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• 2007

AAO(Anodic Aluminum Oxidation) method has been known that it is practically useful for the fabrication of nano-structures and makes it possible to fabricate the highly ordered nano masters on large surface and even on the 2.5 or 3D surface at low cost comparing to the expensive e-beam lithography or the conventional silicon processing. In this study, by using the multi-step anodizing and etching processes, highly ordered nano patterned master with concave shapes was fabricated. By varying the processing parameters, such as initial matter and chemical conditions; electrical and thermal conditions; time scheduling; and so on, the size and the pitch of the nano pattern can be controlled. Consequently, various alumina/aluminum nano structures can be easily available in any size and shape by optimized anodic oxidation in various aqueous acids. The resulting good filled uniform nano molded structure through hot embossing molding process shows the validity of the fabricated nano pattern masters.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2014년도 추계학술대회 논문집
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• pp.104-105
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• 2014

마이크로 패턴된 Au 전극사이에 얼라인된 Tellurium (Te) 나노리본들이 의도한 모양과 배열방식을 가지고 리쏘그래피 패턴 전해증착 (Lithographically patterned nanowier electrodepositon, LPNE) 방법에 의해 4인치 Si wafer 배치로 합성되었다. 합성된 Te 나노리본은 수 센티미터의 길이를 가지고, 그 두께와 폭 역시 작업 전극으로 사용되는 Si wafer위에 증착된 Ni의 두께와 전해증착 시간에 의해 쉽게 제어될 수 있다. $3{\mu}m$의 간격을 갖는 Au 전극 사이에 얼라인된 두께 ~100nm의 Te 나노리본들은 전해증착에 의해 그 폭이 제어되었고, 각각의 다른 폭을 갖는 증착된 하나의 Te 나노리본들의 IV 및 FET 측정을 통하여 나노리본 폭의 변화에 따른 전기적 특성 (비저항, FET 이동도 및 FET 캐리어 농도)이 평가되었다.

• 전기화학회지
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• 제22권2호
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• pp.69-78
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• 2019

리튬 금속 음극은 낮은 환원 전위, 고에너지 밀도로 인해 흑연을 대체할 차세대 음극재로 재조명 받고 있다. 하지만, 충방전시 리튬 금속 표면에서의 반복적인 산화/환원 반응에 의해 리튬 덴드라이트가 형성되며 이로 인해 수명특성이 급격하게 저하되고 더 나아가 내부 단락(Internal Short-circuit)과 같은 안전성 문제로 인해 상용화되기에는 어려운 실정이다. 이를 해결하기 위해 본 연구 그룹에서는 리튬 금속에 미세 패턴을 형성하여 전류 밀도를 제어함으로써 덴드라이트 형성을 제어하였으나, 고전류밀도에서는 리튬 덴드라이트의 형성을 완벽하게 제어할 수는 없었다. 본 연구에서는 미세 패턴화된 리튬 금속 전극에 전해질 첨가제 Vinylene Carbonate(VC)를 도입하여 고율 충방전 시 미세 패턴화된 리튬 금속 전극의 덴드라이트 형성 억제를 극대화하고자 하였다. 미세 패턴화된 리튬 금속 전극과 VC 첨가제의 시너지 효과로 인해 높은 전류 밀도에서의 리튬 덴드라이트가 비교적 치밀하게 형성되는 것을 확인할 수 있었다. 이로 인해 300사이클 동안 88.3%의 용량유지율을 보였으며, 기존의 미세 패턴화된 리튬 금속 전극에 대비하여 수명특성이 약 6배 이상 향상된 것을 확인할 수 있었다.

• Macromolecular Research
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• 제17권3호
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• pp.197-202
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• 2009

Solution-based, direct-write patterning by an automated, computer-controlled, inkjet technique is of particular interest in a wide variety of industrial fields. We report the construction of three-dimensional (3D), micro-patterned structures by polymer inkjet printing. A piezoelectric, drop-on-demand (DOD) inkjet printing system and a common polymer, PVA (poly(vinyl alcohol)), were explored for 3D construction. After a systematic preliminary study with different solvent systems, a mixture of water and DMSO was chosen as an appropriate solvent for PVA inks. The use of water as a single solvent resulted in frequent PVA clogging when the nozzles were undisturbed. Among the tested polymer ink compositions, the PVA inks in a water/DMSO mixture (4/1 v/v) with concentrations of 3 to 5 g/dL proved to be appropriate for piezoelectric DOD inkjet printing because they were well within the proper viscosity and surface tension range. When a dot was printed, the so-called 'coffee-ring effect' was significant, but its appearance was not prominent in line printing. The optimal polymer inkjet printing process was repeated slice after slice up to 200 times, which produced a well-defined, 3 D micro-patterned surface. The overall results implied that piezoelectric DOD polymer inkjet printing could be a powerful, solid-freeform, fabrication technology to create a controlled 3D architecture.

• 한국표면공학회지
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• 제52권6호
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• pp.357-363
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• 2019

We investigated a synthesis yield and diameter distribution of single-walled carbon nanotubes (SWNTs) with respect to the growth position in a horizontal chemical vapor deposition (CVD) chamber. Thin films and line-patterned Fe films (0.1 nm thickness) were prepared onto ST-cut quartz substrates as catalyst to compare the growth behavior. The line-patterned samples showed higher growth density and parallel alignment than those of the thin film catalyst samples. In addition, line density of the aligned SWNTs at central region of the chamber was 7.7 tubes/㎛ and increased to 13.9 tubes/㎛ at rear region of the CVD chamber. We expect that the enhanced amount of thermally decomposed feedstock gas may contribute to the growth yield enhancement at the rear region. In addition, the lamina flow in the chamber also contribute to the perfect alignment of the SWNTs based on the value of gas velocity, Reynold number, and Knudsen coefficient we employed.

• Bulletin of the Korean Chemical Society
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• 제32권10호
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• pp.3735-3737
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• 2011

We report a simple method for fabricating ZnO gas sensors via a sonochemical route and their $H_2$ gas sensing properties. Vertically aligned ZnO nanorod arrays as a sensing material were synthesized on a Pt-electrode patterned alumina substrate under ambient conditions. The advantage of the proposed method is a high speed of processing. The gas sensor based on ZnO nanorod arrays with large specific surface area showed a high response to $H_2$ and a detection limit of 70 ppm at $250^{\circ}C$. Also, their response and recovery time were relatively short and a complete regeneration was observed. A mechanism for sensing $H_2$ gas on the surface of ZnO nanorods is proposed.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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• pp.305-308
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• 2002

Field emission from single-walled carbon nanotubes (SWNTs) aligned on a patterned gold surface is reported. The SWNTs emitters were prepared at room temperature by a self-assembly monolayer technique. SWNTs were cut into sub-micron length by sonication in an acidic solution. Cut SWNTs were attached on the gold surface by the reaction between the thiol groups and the gold surface. The field emission measurement showed that the turn-on field was 4.8 $V/{\mu}m$ at the emission current density of 10 ${\mu}A/cm^2$. The current density was 0.5 $mA/cm^2$ at 6.6 $V/{\mu}m$. This approach provides a novel route for fabricating CNT-based field emission displays.

• KSBB Journal
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• 제24권6호
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• pp.515-520
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• 2009

This study presented facile method of cell patterning using fabricated PDMS patterns on polyelectrolyte coated surface. This basic principle is the fabrication of functional surface presenting two orthogonal surfaces such as cell adhesive and repellent properties. Cell adhesive surface was firstly fabricated with simple coating of polyelectrolyte multilayer. And then, the desired patterns of PDMS for the prevention of nonspecific binding of cells were transferred onto the previously formed thin film of polyelectrolyte multilayer. Thus, we could prepare novel functional surface simultaneously containing PDMS and polyelectrolyte region. As expected, the PDMS regions showed effective prevention of nonspecific binding of cell and the other region, exposed polyelectrolyte area, provided cell adhesive environment. The height of formed PDMS structure was about 100 nm. Based on this method, cell patterning can be successfully obtained with various pattern shapes and sizes. Therefore, we expect that this simple method will be useful platform technology for the development of cell chip, cell based assay system, and biochip.

• Macromolecular Research
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• 제17권8호
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• pp.568-574
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• 2009

We investigated the sintering and consolidation phenomena of silver nanoparticles under various thermal treatment conditions when they were patterned by a contact printing technique on polyimide substrate films. The sintering of metastable silver nanoparticles commenced at 180 $^{\circ}C$, where the point necks were formed at the contact points of the nanoparticles to reduce the overall surface area and the overall surface energy. As the temperature was increased up to 250 $^{\circ}C$, silver atoms diffused from the grain boundaries at the intersections and continued to deposit on the interior surface of the pores, thereby filling up the remaining space. When the consolidation temperature exceeded 270 $^{\circ}C$, the capillary force between the spherical silver particles and polyimide flat surface induced the permanent deformation of the polyimide films, leaving crater-shaped indentation marks. The bonding force between the patterned silver metal and polyimide substrate was greatly increased by the heat treatment temperature and the mechanical interlocking by the metal particle indentation.

• 마이크로전자및패키징학회지
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• 제21권3호
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• pp.67-71
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• 2014

본 연구에서는 Si(111) 기판을 이용하여 고품질의 GaN 박막을 성장하기 위하여 다양한 패턴을 갖는 Si 기판을 제작하였다. Si(111) 기판위에 이온 스퍼터(ion-sputter)를 이용하여 Pt 박막을 증착한 후 열처리(thermal annealing)하여 Pt 금속 마스크를 형성하고 유도 결합 플라즈마 이온 식각(inductively coupled plasma-reactive ion etching, ICP-RIE) 공정을 통하여 기둥(pillar)형태의 나노 패턴된 Si(111) 기판을 제작하였고 리소그래피 공정을 통하여 마이크로 패턴된 Si(111) 기판을 제작하였다. 일반적인 Si(111) 기판, 마이크로 패턴된 Si(111) 기판 및 나노 패턴된 Si(111) 기판위에 유기화학기상증착(metal organic chemical vapor deposition, MOCVD) 방법으로 GaN 박막을 성장하여 표면 특성과 결정성 및 광학적 특성을 분석하였다. 나노 패턴된 Si(111) 기판위에 성장한 GaN 박막은 일반적인Si(111) 기판과 마이크로 패턴된 Si(111) 기판위에 성장한 GaN 박막보다 표면의 균열과 거칠기가 개선되었다. 나노 패턴된 Si(111) 기판위에 성장한 GaN (002)면과 (102)면에 x-선 회절(x-ray diffraction, XRD) 피크의 반폭치(full width at half maximum, FWHM)는 576 arcsec, 828 arcsec으로 다른 두 기판위에 성장한 GaN 박막 보다 가장 낮은 값을 보여 결정성이 향상되었음을 확인하였다. Photoluminescence(PL)의 반폭치는 나노 패턴된 Si(111) 기판위에 성장한 GaN 박막이 46.5 meV으로 다른 기판위에 성장한 GaN 박막과 비교하여 광학적 특성이 향상되었음을 확인하였다.