• Title/Summary/Keyword: Pattern Fabrication

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Fabrication of Circulation Structures of Microfluidic Devices for Observation and Analysis of Micrometer-Scale Chemical Reactions (마이크로미터 단위 화학 반응 관찰 및 분석을 위한 미세 유량 제어 장치의 순환구조 제작 연구)

  • Jang, Wonjun;Lee, Namjong;Jung, Dawoon;Kim, Hong-Seok;Jung, Seung Chan;Han, Jae-Hee
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.35 no.4
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    • pp.342-347
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    • 2022
  • In-situ analyzation and detection of real-time chemical reactions can be a significant part in interpreting the underlying mechanism in very reactive chemical reactions. To do this, first we have designed a microfluidic device (MFD) pattern for observation of synthesis of hierarchical nanostructures based on graphene oxide (GO), conjugating the well-known coupling reaction by which the solution of 1-ethyl-3-(3-dimethylaminopropyl) carbodiimide (EDC)-mediated coupling is enhanced in the presence of n-hydroxysuccinimide (NHS) to make amide bonding, hereafter called as the EDC coupling. Then, we have manufactured microfluidic devices with multiple tens of micrometer-sized channels that can circulate those nanomaterials to be chemically reacted in the channels. These microfluidic devices were made by negative photo lithography and soft lithography. We showed the possibility of using Raman spectroscopy to reveal the basic mechanism of the energy storage applications.

Design and Process of Vertical Double Diffused Power MOSFET Devices (이중확산 방법에 의한 수직구조형 전력용 MOSFET의 설계 및 공정)

  • Yu, Hyun Kyu;Kwon, Sang Jik;Lee, Joong Whan;Kwon, Oh Joon;Kang, Young Il
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.23 no.6
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    • pp.758-765
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    • 1986
  • The design, fabrication and performance of vertical double diffused power MOSFET (VDMOS) were described. On the antimony (Sb) doped (~7x10**17 cm**-3) silicon substrate (N+), epitaxial layer(N-) was grown. The thickness and the resistivity of this layer were 32\ulcorner and about 12\ulcorner-cm, respectively. The P- channel length which was controlled by sequential P-/N+ double diffuison method was about 1~2 \ulcorner, and was processed with the self alignment of 21 \ulcorner width poly silicon. To improve the breakdown voltage with constant on-resistance (Ron) about 1\ulcorner, three P+ guard rings were laid out around main pattern. With chip size of 4800\ulcorner x4840 \ulcorner, the VDMOS has shown breakdown voltage of 410~440V, on-resistance within 1.0~1.2\ulcornerand the current capablity of more than 5A.

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Fabrication of Nonconductive Microscale Patterns on Ion Exchange Membrane by Laser Process (레이저 가공을 이용한 이온교환막 표면의 비전도성 마이크로 패턴의 제작)

  • Jinwoong Choi;Myeonghyeon Cho; Bumjoo Kim
    • Korean Journal of Materials Research
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    • v.33 no.2
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    • pp.71-76
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    • 2023
  • The electroconvection generated on the surface of an ion exchange membrane (IEM) is closely related to the electrical/chemical characteristics or topology of the IEM. In particular, when non-conductive regions are mixed on the surface of the IEM, it can have a great influence on the transfer of ions and the formation of nonlinear electroconvective vortices, so more theoretical and experimental studies are necessary. Here, we present a novel method for creating microscale non-conductive patterns on the IEM surface by laser ablation, and successfully visualize microscale vortices on the surface modified IEM. Microscale (~300 ㎛) patterns were fabricated by applying UV nanosecond laser processing to the non-conductive film, and were transferred to the surface of the IEM. In addition, UV nanosecond laser process parameters were investigated for obvious micro-pattern production, and operating conditions were optimized, such as minimizing the heat-affected zone. Through this study, we found that non-conductive patterns on the IEM surface could affect the generation and growth of electroconvective vortices. The experimental results provided in our study are expected to be a good reference for research related to the surface modification of IEMs, and are expected to be helpful for new engineering applications of electroconvective vortices using a non-conductive patterned IEM.

Dual-band Planar Monopole Antenna for Autonomous Vehicle (자율주행자동차를 위한 이중대역 평판 모노폴 안테나)

  • Yoon, Yonghyun
    • The Journal of Korea Institute of Information, Electronics, and Communication Technology
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    • v.12 no.4
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    • pp.343-348
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    • 2019
  • In this paper, a dual-band antenna is proposed for the autonomous vehicle as well as omni-directional. The proposed antenna operates in the 4G/LTE band (1,710~2,170MHz) and 5G/NR band (3,400~3,700MHz). In order to obtain the dual-band operation, the planar monopole antenna is proposed as the novel structure with single port of the 50ohm. To give the properties of dual-band, an additional antenna element with slit was added to the planar monopole antenna, and then a structural adjustment parameter was optimized for achieving the target performance in bands. The planar monopole antenna in the LTE band acts as the coupled feed for the added parasitic radiator in the 5G NR band. The proposed antenna has $38.5{\times}36.0{\times}1.0[mm^3]$ on a ground with diameter of 96mm. From the fabrication and measurement results, the impedance bandwidth (VSWR<2) of the proposed antenna covers 1,480~2,260MHz (LTE band: 1,710~2,170MHz) and 3,310~3,930MHz (5G NR band: 3,400~3,700MHz). The proposed planar monopole antenna also obtained the measured gain and radiation pattern of omni-directional radiation pattern in the anechoic chamber.

Implementation of A Millimeter-Wave Multiflare-Angle Horn Antenna (밀리미터파 다중개구각 혼안테나 구현)

  • Oh, Kyung-Hyun;Kim, Ji-Hyung;Yang, Seung-Sik;Shin, Sang-Jin;Cho, Young-Ho;Lee, Byung-Ryul;Ahn, Bierng-Chearl
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.29 no.1
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    • pp.36-41
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    • 2018
  • This paper presents an implementation of a millimeter-wave(W band) multiflare-angle horn antenna. The proposed antenna is a multimode dual-polarized square horn having equal E- and H-plane beamwidths and consists of a multimode generating section, a four-square-waveguide exciter, orthomode transducers, and power combiners for the sum pattern formation. The antenna structure has been designed to allow for easy fabrication and the designed antenna has been fabricated to a precision of ${\pm}0.02mm$ by layer-by-layer machining and diffusion bonding. The input reflection coefficient and the radiation pattern of the fabricated antenna have been measured using a network analyzer and a far-field test facility. Measurements show that the proposed antenna has 17.7~18.3 dBi gain, $25.2{\sim}28.5^{\circ}$ beamwidth, and an input VSWR between 1.02~1.75, within ${\pm}0.5GHz$ from the center frequency.

Adiabatic Optical-fiber Tapers for Efficient Light Coupling between Silicon Waveguides and Optical Fibers (실리콘 도파로와 광섬유 사이의 효율적인 광 결합을 위한 아디아바틱 광섬유 테이퍼)

  • Son, Gyeongho;Choi, Jiwon;Jeong, Youngjae;Yu, Kyoungsik
    • Korean Journal of Optics and Photonics
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    • v.31 no.5
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    • pp.213-217
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    • 2020
  • In this study we report a wet-etching-based fabrication method for adiabatic optical-fiber tapers (OFTs), and describe their adiabaticity and HE11 mode evolution at a wavelength of 1550 nm. The profile of the fabricated system satisfies the adiabaticity properties well, and the far-field pattern from the etched OFT shows that the fundamental HE11 mode is maintained without a higher-order mode coupling throughout the tapers. In addition, the measured far-field pattern agrees well with the simulated result. The proposed adiabatic OFTs can be applied to a number of photonic applications, especially fiber-chip packages. Based on the fabricated adiabatic OFT structures, the optical transmission to the inversely tapered silicon waveguide shows large spatial-dimensional tolerances for 1 dB excess loss of ~60 ㎛ (silicon waveguide angle of 1°) and insertion loss of less than 0.4 dB (silicon waveguide angle of 4°), from the numerical simulation. The proposed adiabatic coupler shows the ultrabroadband coupling efficiency over the O- and C-bands.

THE INFLUENCE OF THE DIE HARDENER ON GYPSUM DIE (석고 다이에 대한 다이 강화제의 영향)

  • Kim, Young-Rim;Park, Ju-Mi;Song, Kwang-Yeob
    • The Journal of Korean Academy of Prosthodontics
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    • v.45 no.4
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    • pp.546-554
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    • 2007
  • Statement of problem: Die materials require abrasion resistance, dimensional stability with time, and high surface wettability for adequate material properties. Wear of gypsum materials is a significant problem in the fabrication of accurately fitting cast prosthetic devices. So It has been recommended that the use of die hardener before carving or burnishing of the wax pattern. Purpose: The purpose of this study was to compare the abrasion resistance and surface microhardness(Knoop) with 3 commonly used gypsum die materials(MG Crystal Rock, Super plumstone, GC $FUJIROCK^{(R)}$ EP) with and without the application of 2 die hardeners. Material and methods: Three die materials were evaluated for abrasion resistance and surface microhardness after application of 2 die hardeners(Die hardener and Stone die & plaster hardener). Thirty specimens of each gypsum material were fabricated using an impression of resin die(Pattern resin; GC Corporation, Japan) with 1-mm high ridges, sloped 90 degrees. Gypsum materials were mixed according to manufacturer's recommendations and allowed to set 24 hours before coating. Specimens were arbitrary assigned to 1 of 3 treatment subgroups (n=10/subgroup): no treatment(control), coated with Die hardener, and coated with Stone die & plaster hardener. Abrasion resistance(measured by weight loss) was evaluated using device in 50g mass perpendicular to the ridges. Knoop hardness was determined by loading each specimen face 5 times for 15 seconds with a force of 50g. A scanning electron microscope was used to evaluate the surface of specimens in each treatment subgroup. Conclusions: The obtained results were as follows: 1. 3 types of die stone evaluated in this study did not show significant differences in surface hardness and abrasive resistance(P<.05). 2. In the abrasive resistance test, there were no significant differences between GC $FUJIROCK^{(R)}$ EP and MG Crystal Rock with or without 2 die hardener(P<.05). 3. Super plumstone treated with Stone die & plaster hardener showed increased wear loss(P<.05) 4. Die hardener coatings used in this study decreased the surface hardness of the gypsum material(P<.05).

Realization of the multi-phase level CGH according to the multi-channel encoding method using a PAL-SLM (PAL-SLM을 이용한 다채널 부호화 방법에 따른 다위상형 CGH의 광학적 구현)

  • Jung, Jong-Rae;Baek, Woon-Sik;Kim, Jung-Hoi;Kim, Nam
    • Korean Journal of Optics and Photonics
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    • v.15 no.4
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    • pp.299-308
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    • 2004
  • We proposed more efficient encoding methods that can design a multi-channel multi-level phase only computer-generated hologram(CGH) that can reconstruct many objects simultaneously without a conjugate image. We used a fabrication technique for the pixel oriented CGH for designing the pattern of the proposed multi-channel CGH. We investigated the difference of the optical efficiency(η), mean square error(MSE) and signal-to-noise ratio(SNR) of multi-channel CGHs that were designed by three kinds of encoding methods according to the number of quantization phase levels, and we estimated the performance of the pattern of the proposed multi-channel CGH. Generally, as the number of input objects' reference patterns stored in the CGH is increased, the reconstruction quality of the CGH is degraded. But we observed through computer simulation that the diffraction efficiency of the 1-ch CGH is 70%, and those of the 2-ch, 4-ch, 8-ch CGHs are 62%, 62% and 63%. Therefore we found that the diffraction efficiencies of the multi-channel CGHs using the newly proposed encoding method are similar to that of 1-ch CGH. We implemented the CGH optically using a liquid crystal spatial light phase modulator that consisted of a PAL-SLM efficiently coupled with a XGA type LCD by an optical lens and an LD for illuminating the LCD. We discussed the output images that are reconstructed from the PAL-SLM.

UV-nanoimprint Patterning Without Residual Layers Using UV-blocking Metal Layer (UV 차단 금속막을 이용한 잔류층이 없는 UV 나노 임프린트 패턴 형성)

  • Moon Kanghun;Shin Subum;Park In-Sung;Lee Heon;Cha Han Sun;Ahn Jinho
    • Journal of the Microelectronics and Packaging Society
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    • v.12 no.4 s.37
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    • pp.275-280
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    • 2005
  • We propose a new approach to greatly simplify the fabrication of conventional nanoimprint lithography (NIL) by combined nanoimprint and photolithography (CNP). We introduce a hybrid mask mold (HMM) made from UV transparent material with a UV-blocking Cr metal layer placed on top of the mold protrusions. We used a negative tone photo resist (PR) with higher selectivity to substrate the CNP process instead of the UV curable monomer and thermal plastic polymer that has been commonly used in NIL. Self-assembled monolayer (SAM) on HMM plays a reliable role for pattern transfer when the HMM is separated from the transfer layer. Hydrophilic $SiO_2$ thin film was deposited on all parts of the HMM, which improved the formation of SAM. This $SiO_2$ film made a sub-10nm formation without any pattern damage. In the CNP technique with HMM, the 'residual layer' of the PR was chemically removed by the conventional developing process. Thus, it was possible to simplify the process by eliminating the dry etching process, which was essential in the conventional NIL method.

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EVALUATION OF THERMAL DIFFUSION IN LOWER End PRIMARY MOLAR WITH THERMOGRAPHY AND FINITE ELEMENT ANALYSIS (Thermography와 유한요소분석법을 이용한 하악 제2유구치의 열확산도 평가)

  • Park, Hee-Seung;Kim, Yong-Kee;Kwon, Soon-Won;Kim, Jong-Soo
    • Journal of the korean academy of Pediatric Dentistry
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    • v.29 no.4
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    • pp.519-528
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    • 2002
  • It is not a rare occasion that certain dental procedures involving tooth reduction being peformed under inadequate water cooling due to a variety of reasons. This situation could possibly inflict the critical insult to the pulpal tissue of indicated tooth. The purpose of this experiment was to study the pattern of diffusion of external heat produced during routine dental procedures into the pulpal tissue. 30 stone blocks containing three lower second primary molars were used for certain restorative procedures and the temperature of the indicated tooth surface was measured by thermography(Inframetrics 600) and further used as a baseline data for the finite element analysis model fabrication designed in order to evaluate the pattern of thermal diffusion. The ranges of highest surface temperature measured from several dental procedures under water cooling and non-water cooling were $30.8^{\circ}C{\sim}43.6^{\circ}C$ and $51.2^{\circ}C{\sim}103.4^{\circ}C$ respectively. Among procedures studied, crown preparation showed the highest value and amalgam removal showed the lowest. Comparisons between data measured under water cooling and non-water cooling conditions have shown the statistically significant difference(p<0.05). All the non-cooling conditions have shown the relatively larger increment of temperature change at the pulp horn area than the cooling conditions. The results of this study strongly indicate that the water coolant is the essential element in restorative procedures for the maintenance of healthy pulp. Further related studies involving more procedures and conditions are recommended.

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