• 청정기술
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• 제24권3호
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• pp.157-165
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• 2018

본 연구에서는 초임계 이산화탄소와 공용매 첨가물을 이용하여 실리콘 웨이퍼 표면의 $Si_3N_4$ 파티클을 제거하는 기술을 조사하였다. 우선, 몇 가지 계면활성제와 첨가제에 관한 초임계 이산화탄소 용해도 및 파티클 분산성 평가를 통하여 초임계 공정에 대한 적합성을 확인하였다. 다양한 변수를 조정하여 파티클 세정 실험을 진행하여 최적의 제거 조건을 확립하였다. 실험에 사용된 계면활성제는 파티클 제거 효과가 떨어졌으며, 실험 후 이차 오염물이 형성됨을 확인하였다. 반면 trimethyl phosphate는 IPA공용매와 미량의 HF와 혼합된 세정 첨가제로서 초임계 이산화탄소에 5 wt%로 포함한 유체로 온도 $50^{\circ}C$, 압력 2000 psi에서 $15mL\;min^{-1}$의 유속으로 4분 간 세정한 결과, 85%의 파티클 제거 효율을 나타내었다.

• 한국입자에어로졸학회지
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• 제14권4호
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• pp.121-133
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• 2018

In this study, we developed a flat-plate type wet electrostatic precipitator that generates stable corona discharge compared to wire type discharge electrode. In order to compare the particle removal efficiency according to the shape of the discharge electrode such as the variation of the horizontal and vertical distance between spiked edges, and the variation of the height of discharge pin support were tested. As a result, when the horizontal distance between spiked edges was increased up to 36 mm, the vertical distance between spiked edges was increased up to 54 mm, and the height of the discharge pin support was increased up to 76 mm, the removal efficiency of PM10 was maintained at approximate 60.0%. Furthermore, the removal efficiency of particles over $5{\mu}m$ was about 80% or more. When the flow rate was 4 m/s, the gap between collection plates was 60 mm, and -14 kV was applied to the discharge electrode. The particle removal efficiency of the flat-plate type electrostatic precipitator was maintained when the horizontal and vertical distance between spiked edges, and the height of the discharge pin support was below a certain level. Those variables may be the important design factors for the shape of the discharge electrode. Therefore, when designing the electrostatic precipitator with multiple channels, the horizontal and vertical distance between spiked edges, and the height of discharge pin support must be selected in consideration of the weight of the discharge electrode and the processing cost.

• 한국입자에어로졸학회지
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• 제19권2호
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• pp.43-53
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• 2023

In this study, the ventilation system of the enclosed conveyor belt for coal transportation was evaluated, and the particle removal efficiency according to the ventilation conditions was identified using computational fluid dynamics and particle behavior analysis. The most effective way to remove dust generated inside the closed conveyor belt is to adjust the position of the exhaust port of the duct so that the air is exhausted around the rear of the conveyor belt. And this method seems to work for another narrow and long spaces where air enters in one direction. In addition, when the air flow rate of the each duct was less than 300 CMM, it was efficient to increase the flow rate of the duct located at the rear of the conveyor belt, and when the flow rate of the each duct was higher than 300 CMM, it was efficient to increase the flow rate of the duct located at the front of the conveyor belt.

• 한국지하수토양환경학회지:지하수토양환경
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• 제18권7호
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• pp.18-24
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• 2013

The influences of various operating parameters on physico-chemical techniques were evaluated to remediate petroleum-contaminated sandy soil including S/L ratio, kinetic, and effect of soil particle size. The simple extraction using tap water removed only 20.6% of total petroleum hydrocarbon (TPH), and addition of NaOH enhanced the removal of TPH to approximately 30%. To meet the regulation levels, a surfactant, sodium dodecyl sulfate, was added, and the removal of TPH increased to 4 times. Probably, the carbonate minerals affected chemical aging and soprtion of petroleum, which inhibited the extraction of TPH. The soil with smaller particle size contained more TPH, and the removal of TPH was obstructed with smaller particle size. However, NaOH addition increased the removal of TPH in the smaller particles. The physico-chemical properties of soil influenced greatly the removal of petroleum even in sandy soil.

• Environmental Engineering Research
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• 제15권4호
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• pp.225-230
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• 2010

In order to treat soil contaminated with high percentages of water and petroleum, the combined microwave and thermal desorption process was studied, which was composed of the consecutive connection of two pre-treatment processes. For the thickness of the contaminated soil layer on the transfer conveyor belt, the optimal total petroleum hydrocarbon (TPH) removal rate was studied with respect to the duration of microwave exposure in the consecutive process combined with thermal desorption. The TPH removal rate when the contaminated soil layer thickness was 1 cm at 6 kW of microwave power was 80%. The removals rates for 2 and 3 cm soil layer thicknesses were both 70%. Under identical experimental conditions, the TPH removal rate for the microwave pre-treatment, when considering the soil particle size, was over 70%. The lowest TPH removal rate was achieved with a particle diameter of 2.35 mm. For contaminated soil with 30% water content, 6 kW and a thermal desorption temperature of $600^{\circ}C$ were the optimal operational conditions for the removal of THP. However, considering the fuel consumption cost, 4 kW and a thermal desorption temperature of $300^{\circ}C$ would be the most economic conditions.

• 설비공학논문집
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• 제18권9호
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• pp.745-752
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• 2006

DOS and NaCl aerosol particles were used to determine collection efficiencies of a 2-stage electrostatic wet scrubber with respect to particle size. The DOS and NaCl aerosols have geometric mean diameters of 0.1-3.0 urn, geometric standard deviations of $1.1{\sim}1.8$ and total number concentrations of $450{\sim}2,400\;particles/cm^3$. The tested operating variables for the electrostatic wet scrubber included air velocity and water injection rate. It was shown from the experimental results that particle collection efficiencies increased in the submicron particle size range when different polarities were applied on the water nozzle and corona wire, respectively. This increase in the collection efficiency is attributed to strong electrostatic attraction between the negative water droplets and positive submicron particles. The collection efficiencies also increased when water injection rate was increased or air velocity was decreased. Meanwhile, the pressure drop across the wet scrubber decreased by 90% compared with the existing mechanical wet scrubber. Finally, ammonia gas was used to determine gas removal efficiencies. It was observed that the gas removal efficiencies increased when the air velocity was decreased or the water injection rate was increased.

• 한국의류학회지
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• 제34권4호
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• pp.653-662
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• 2010

This study investigates the effect of particle size on the detergency of particulate soil using an $\alpha-Fe_2O_3$ particle as the model. Monodispersed spherical $\alpha-Fe_2O_3$ particles were prepared by the hydrothermal aging of an acidic $FeCl_3$ and HCl solution. The $\xi$-potential of PET fiber was measured by the streaming potential method. The potential energy of interaction between the particle and fiber was calculated using the heterocoagulation theory for a sphere-plate model. The $\xi$-potential of PET fiber and potential energy of interaction between particles and fiber increased with a decreasing particle size in a DBS solution. However, in the nonionic surfactant solution, the $\xi$-potential signs of PET fiber and $\alpha-Fe_2O_3$ particles were (-) and (+), respectively; there was no repulsive power between the particles and substrate. The adhesion of particles to the fabric increased with increasing particle size in the anionic surfactant solution and their removal from the fabric increased with a decreasing particle size. The adhesion of particles to the fabric and their removal from the fabric was biphasic with a maximum and minimum at 0.1% concentration of the surfactant solution. In the nonionic surfactant solution the adhesion of particles to fabric and their removal from the fabric were greater than the ones in the anionic surfactant DBS solution.

• 한국입자에어로졸학회지
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• 제12권4호
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• pp.135-143
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• 2016

Removal of water contents in a gas is needed in industrial field of gas processing related on energy production/conversion, and environmental treatment. Inertial separators are economic devices for separating droplets from the gas stream. For accurate understanding of removal process in a curved vane mist eliminator, a numerical model including turbulent dispersion, evaporation and condensation of water vapor at surface of droplets is required. A two-stage curved vane mist eliminator has been modeled, and fluid flow of mixture of air and water vapor and droplet trajectories were solved simultaneously with taking into account two-way coupling. Removal efficiency of droplets with various inlet condition of relative humidities (RH, 40%, 90%, and 100%) were compared. As RH increased, the effect of evaporation decreased and inertial separation efficiencies of droplets obtained increased especially for droplets of diameter below 10 micrometers.

• 한국환경보건학회지
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• 제22권4호
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• pp.1-9
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• 1996

Experiments have been made to test the practical feasibility of using calcined manganese ore to desulfurize hot reducing gas. In this study, the effects of particle size of sorbents, temperature of sulfidation, flow rate and sorbent characteristics on the $H_2S$ removal efficiency of calcined manganese ore were investigated. Experimental results showed that the removal efficiency of $H_2S$ was optimum when the temperature was about 800$\circ$C and that the smaller particle size the higher the $H_2S$ removal efficiency. When the temperature was above 800$\circ$C, the reactivity of sorbent has lowered because agglomeration of sorbent increased intraparticle transport resistance, and this phenomenon was confirmed by SEM photographs. As the temperature increases, capacity for the $H_2S$ removal was increased but the equilibrium concentration of $H_2S$ was not affective.

• 한국레이저가공학회지
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• 제5권2호
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• pp.9-15
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• 2002

Basic principles and unique characteristics of laser-induced shock cleaning have been described compared to a conventional laser cleaning method and the removal of small tungsten particles from silicon wafer surfaces was attempted using both methods. It was found that the conventional laser cleaning was not feasible to remove the tungsten particles whereas a successful removal of the particles was carried out by the laser-induced shock waves. From the quantitative analysis using a surface scanner, the average removal efficiency of the particles was more than 98% where smaller particles were slightly more difficult to remove probably due to the increased adhesion force with a decrease of the particle size. It was also seen that the gap distance between the laser focus and the wafer surface is an important processing parameter since the removal efficiency is strongly dependent on the gap distance.