• Title/Summary/Keyword: Particle measurement

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Measurement of Monodisperse Particle Charging in Unmagnetized and Magnetized Plasmas (자화된 플라즈마 내에서의 단분산 입자의 하전량 특정)

  • 한장식;안강호;김곤호
    • Journal of the Semiconductor & Display Technology
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    • v.1 no.1
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    • pp.35-40
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    • 2002
  • Understanding of charging properties of a small particle is necessary to control the particle contamination and to improve productivity of the electronic device in the plasma aided semiconductor manufacturing processes. In this study, the effects of both magnetic field and particle size on the charging properties are experimentally investigated in collisional dusty plasmas. The experiments carried out in the system consisted of a monodisperse particle generation system, a DC magnetized plasma generation system and a charge measurement system. The plasma chamber is made of cross-shape Pyrex surrounded by magnetic bucket (composed of 12 permanent magnetic bar) to confine the plasma. DC magnetic field up to 250G are applied to the plasma zone by external magnetic coil. Previous work shows the charging effect clearly increase with increasing the size of the particle and plasma density, as it was expected.

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A Study on Particle Diffusion to Develop Faraday Cup Array of Particle Beam Mass Spectrometer System (Faraday cup array 개발을 위한 Particle Beam Mass Spectrometer 시스템 내에서의 입자 확산 연구)

  • Mun, Ji-Hun;Shin, Yong-Hyun;Kim, Tae-Sung;Kang, Sang-Woo
    • Particle and aerosol research
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    • v.8 no.1
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    • pp.29-35
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    • 2012
  • The Faraday cup electrode of different size has been developed and evaluated to investigate the diffusion effect of particles by Brownian motion in a particle beam mass spectrometer(PBMS). Particles which focused and accelerated by aerodynamic lens are charged to saturation in an electron beam, and then deflected electrostatically into a Faraday cup detector for measurement of the particle current. The concentration of particles is converted from currents detected by Faraday cup. Measurements of particle current as a function of deflection voltage are combined with measured relationships between particle velocity and diameter, charge and diameter, and mass and diameter, to determine the particle size distribution. The particle currents were measured using 5, 10, 20, 40 mm sized Faraday cup that can be move to one direction by motion shaft. The current difference for each sizes as a function of position was compared to figure out diffusion effect during transport. Polystyrene latex(PSL) 100, 200 nm sized standard particles were used for evaluation. The measurement using 5 mm sized Faraday cup has the highest resolution in a diffusion distance and the smaller particles had widely diffused.

Comparison of particle size distribution and particle number concentration measured by APS 3321 and Dust Monitor 1.108 (APS 3321과 Dust Monitor 1.108을 이용한 입자 크기분포 및 수농도 측정결과 비교)

  • Lim, Kyoung-Soo;Park, Hyun-Seol
    • Particle and aerosol research
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    • v.5 no.2
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    • pp.63-70
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    • 2009
  • The size distribution and number concentration of atmospheric aerosol were measured and compared using APS 3321 and Dust Monitor 1.108. The particle size distribution and number concentration measured by two devices were also compared at a particle generation system of standard PSL and fly ash. The number concentration of atmospheric aerosol measured by APS was higher than that by Dust Monitor in particle size range of less than $3.0{\mu}m$, but there was good accordance between them in particle size range of over $3.0{\mu}m$. In the particle generation system of PSL and fly ash, different measurement results were shown because the particle concentration was higher than that of atmospheric aerosol. The number concentration measured by Dust Monitor was higher than that by APS in most particle size ranges. However, the peak concentration of PSL particles measured by Dust Monitor was lower than that by APS. The difference of the collection efficiency in a scrubber by APS and Dust Monitor measurement was less than 10%, but in the particle size of $1.5{\mu}m$, it was over 20%.

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Improvement of Image Processing Algorithm for Particle Size Measurement Using Hough Transform (Hough 변환을 이용한 입경 측정을 위한 영상처리 알고리즘의 개선)

  • Kim, Yu-Dong;Lee, Sang-Yong
    • Journal of ILASS-Korea
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    • v.6 no.1
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    • pp.35-43
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    • 2001
  • Previous studies on image processing techniques for panicle size measurement usually have focused on a single panicle or weakly overlapped particles. In the present work, the image processing algorithm for particle size measurement has been improved to process heavily-overlapped spherical-particle images. The algorithm consists of two steps; detection of boundaries which separate the images of the overlapped panicles from the background and the panicle identification process. For the first step, Sobel operator (using gray-level gradient) and the thinning process was adopted, and compared with the gray-level thresholding method that has been widely adopted. In the second, Hough transform was used. Hough transform is the detection algorithm of parametric curves such as straight lines or circles which can be described by several parameters. To reduce the measurement error, the process of finding the true center was added. The improved algorithm was tested by processing an image frame which contains heavily overlapped spherical panicles. The results showed that both the performances of detecting the overlapped images and separating the panicle from them were improved.

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Study on the Influence of Mixing Effect to the Measurement of Particle Size Distribution using DMA and CPC (혼합효과가 DMA와 CPC를 이용한 입자분포 측정에 미치는 영향에 관한 연구)

  • Lee, Youn-Soo;Ahn, Kang-Ho;Kim, Sang-Soo
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.27 no.3
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    • pp.326-333
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    • 2003
  • In the measurement using DMA and CPC in series, there is some time delay for particles classified in DMA to detect in CPC. During this time, the DMA time-response changes due to the velocity profile of sampling tube and the diffusion of particles in the volume that exists between the DMA exit and the detector of ultra-fine CPC. This is called mixing effect. In the accelerated measurement methods like the TSI -SMPS, the size distribution is obtained from the correlation between the time-varying electrical potential of the DMA and the corresponding particle concentrations sampled in DMA. If the DMA time -response changes during this delay time, this can cause the error of a size distribution measured by this accelerated technique. The kernel function considering this mixing effect using the residence time distribution is proposed by Russell et al. In this study, we obtained a size distribution using this kernel to compare to the result obtained by the commercial accelerated measurement system, TSI -SMPS for verification and considered the errors that result from the mixing effect with the geometric mean diameters of originally sampled particles, using virtually calculated responses obtained with this kernel as input data.

The Measurement of Soot Particle Temperatures Using a Two-Color Pyrometry and Modulated LII Signals (Modulated LII 신호와 이색법을 이용한 매연입자 온도 계측)

  • Nam, Youn-Woo;Lee, Won-Nam
    • 한국연소학회:학술대회논문집
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    • 2006.10a
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    • pp.110-116
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    • 2006
  • A new measurement technique based on a two-color pyrometry and modulated LII signals to measure local soot particle temperatures has been proposed and examined experimentally. The theoretical review suggests that modulated LII signals of soot particles is suitable for a two-color pyrometry as long as the temperature increase due to laser heating remains relatively small. The modulated LII signals from ethylene and propylene diffusion flames were simultaneously measured at 550 and 750 nm by a dual measurement system that consists of optical fibers, PMT and lock-in amps. The local soot particle temperatures of diffusion flames could be obtained using a two-color pyrometry and modulated LII signal based new technique.

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Study on Temperature Field Measurement of Fluid using Phophor Particle (Sr,Mg)2SiO4:Eu2+ (인광입자(Sr,Mg)2SiO4:Eu2+를 이용한 액체의 온도장 측정에 관한 연구)

  • Song, Dong Jin;Lee, Hyunchang
    • Journal of the Korean Society of Visualization
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    • v.17 no.3
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    • pp.59-65
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    • 2019
  • Phosphor particles ((Sr,Mg)2 SiO4:Eu2+ were suspended in deionized water in quartz cuvette and used for measuring liquid temperature field by using two-color-ratio method. In the temperature range of 23~77℃, it showed the relative error from 2.4% to 4% and the temperature sensitivity of 0.65 %/℃ at 30℃ and 0.95 %/℃ at 77 ℃. This performance is comparable to measurement techniques using thermographic liquid crystal or laser induced fluorescence or other thermographic phosphor particle. Among investigated potential error sources, the particle number density affected the intensity ratio and the temperature, but the effect of laser fluence was not evident.

A Study on the Nano-particles Emission Exhausted from Diesel Passenger Vehicle According to Using Biodiesel (바이오디젤 사용에 따른 경유승용차의 나노입자 배출특성 연구)

  • Kwon, Sang-Il;Lee, Chang-Sik
    • Journal of ILASS-Korea
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    • v.12 no.1
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    • pp.65-70
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    • 2007
  • This paper is to investigate the characteristics of exhaust emissions and nano-particle emission from diesel passenger vehicle according to using biodiesel fuel as an alternative fuel. In this work, the particulate matters (PM) of exhaust emissions in diesel engine were investigated by number of particles and mass measurement. The mass of the total PM was measured using the standard gravimetric measurement method, the total number concentrations were measured on a ECE15+EUDC driving cycle using Condensation Particle Counter (CPC). Total PM emission was reduced $2{\sim}38%$ and number concentration was reduced $1{\sim}27%$ according to increasing blended ratio of biodiesel with diesel fuel. Total PM emission was reduced more than particle number emission because volatile particles were measured in total PM but were not measured in particle number emissions.

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Development of Digital Particle Holographic System for Measurements of the Characteristics of Spray Droplets (분무 액적 특성 계측을 위한 디지털 입자 홀로그래피 시스템의 개발)

  • Yan, Yang;Kang, Bo-Seon
    • Journal of ILASS-Korea
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    • v.15 no.2
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    • pp.53-60
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    • 2010
  • This study presents development of digital particle holographic system and its application to spray field to measure three-dimensional velocities and sizes of spray droplets. A double exposure hologram recording system with synchronization system for time control was established and digital holograms can be recorded in a short time interval. To process recorded holograms, the correlation coefficient method was used for focal plane determination of particles. To remove noises and improve the quality of holograms and reconstructed images, the Wiener filter was adopted. The two-threshold and image segmentation methods were used in binary image transformation. For particle pairing, the match probability method was adopted. The developed system was applied to spray field and three-dimensional velocities and sizes of spray droplets were measured. The measurement results of digital holographic system were compared with those made by laser instruments, PDPA(Phase Doppler Particle Analyzer), which proved the feasibility of in-line digital particle holographic system as a good measurement tool for spray droplets.

Discussion of Problems During the Application of the On-line Particle Counter In Water Treatment Process (정수처리 공정에서 연속식 입자계수기의 적용성 검토에 관한 연구)

  • Moon, Seong-Yong;Kim, Seung-Hyun
    • Journal of Korean Society of Water and Wastewater
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    • v.19 no.2
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    • pp.214-220
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    • 2005
  • Errors may occur due to analysis methods and water quality during the application of the on-line particle counter In water treatment process. Errors caused by analysis methods include particle destruction by shear force due to inflow speed and tube friction, as well as interruption by screening, bubbles and contaminants. Since errors happen frequently because of these factors, it is necessary to examine and evaluate such errors during the application of a particle counter. Errors can be large due to screening and bubbles. Measurement values are effective for water analysis after filtration process. However, because of screening, only measurement values for particles above $7{\mu}m$ are valid for water with a turbidity between 3-10NTU. As particle numbers around $10{\mu}m$ increase a lot after ozone treatment, sufficient pretreatment process is necessary. Physical conditions should keep stable for inflow to decrease errors caused by shear force.