• Proceedings of the Korean Vacuum Society Conference
• /
• 2013.02a
• /
• pp.149-149
• /
• 2013

반도체 공정 및 디스플레이 공정에서 발생하는 오염입자는 공정 불량을 일으키는 가장 큰 인 중의 하나이며, 수십 나노에서 수 백 나노의 크기를 갖는다. 최근 반도체 산업이 발전함에 따라 회로의 선폭이 점차 감소하고 있으며 오염입자의 임계 직경(critical diameter) 또한 작아지고 있다. 또한 디스플레이 산업에서는 패널이 대형화되고 공정이 발달함에 따라 입자에 의한 패널 오염이 이슈가 되고 있는 실정이다. 현재 반도체 및 디스플레이 산업에서 사용되는 측정방법으로는 레이저를 이용하여 공정 후 표면에 남아있는 오염입자를 측정하는 ex-situ 방법이 주를 이루고 있다. Ex-situ 방법을 이용한 오염입자의 제어는 웨이퍼 전체를 측정할 수 없을 뿐만 아니라 실시간 측정이 불가능하기 때문에 공정 모니터링 장비로 사용이 어려우며 오염입자와 공정 간의 상관관계 파악에도 많은 제약이 따르게 된다. 이에 따라 저압에서 in-situ 방법을 이용한 실시간 오염입자 측정 기술 개발이 요구되고 있다. 또한 입자의 크기 뿐 아니라 성분과 형상까지 측정할 수 있는 장치의 개발 요구가 높아지고 있는 실정이다. 이를 위해 입자의 크기 및 분포를 측정할 수 있는 Particle Beam Mass Spectrometer (PBMS)와 형상을 측정할 수 있는 Scanning Electron Microscope (SEM)의 기능을 통합하여 실시간으로 나노입자의 복합특성(크기, 성분, 형상)을 측정할 수 있는 장치를 개발하였다. 또한 기존 장치들의 문제점 중 하나가 실시간으로 교정이 불가능하다는 것이었는데 이 장치의 경우 실시간으로 측정되는 결과의 조합으로 실시간 교정까지도 가능한 장점을 가지고 있다.

• Transactions of the Korean Society of Automotive Engineers
• /
• v.12 no.6
• /
• pp.103-110
• /
• 2004

The major trend in global automotive market is changing drastically in the way that a vehicle FECPS(Front End Cooling Pack System) is designed and manufactured as an assembly part. The system can encompass many functions, be assembled into a vehicle as a module, and reduce the production cost as well as time. The FECPS consists of an impact beam, an aluminum condenser and a radiator, a carrier and a cooling fan with a BLDC motor. In order to predict the performance of a FECPS accurately, it is essential to properly model the air flow field through various heat exchangers, such as a condenser or a radiator. In this study, the flow field of the system is measured by a PIV(Particle Image Velocimetry) system. The result is compared with that measured with multi-channel anemometer.

• Journal of ILASS-Korea
• /
• v.3 no.4
• /
• pp.8-15
• /
• 1998

The spray characteristics of emulsified fuel of W/O type has been experimentally investigated. The mixture of light oil and water by using ultrasonic energy adding system is used as the emulsified fuel. The SMD of sprayed droplet of emulsified fuel is measured by using the particle size analyzer. Major parameters of the present experimental study are the volume fraction of water in emulsified fuel, $0\sim30%$ by 5%, injection pressure, $10kg_f/cm^2\sim18kg_f/cm^2$ by $2kg_f/cm^2$, and the measurement distance, $10\sim100mm$, between injection nozzle tip and analyzer beam. Compared with light oil, the SMD of emulsified fuel is larger gradually by increasing the volume fraction of water in emulsified fuel, heightening injection pressure and increasing the spray distance. Also, In considering the fact that the pattern of drop size distribution of emulsified fuel is alike that of light oil, the real time spray in coincidence with making emulsified fuel by adding ultrasonic energy can stabilize spray pattern without modificating the injection system used by now.

• Korean Journal of Optics and Photonics
• /
• v.12 no.6
• /
• pp.446-451
• /
• 2001

We made a laser induced grating spectrometer(LIGS) and measured the thermal grating signal generated in a $C_3$ $H_{8}$ flame. The thermal grating was formed in the C7Ha flame with two second-harmonic Nd:YAG pulse laser beams, and an LIGS signal was generated by Bragg scattering of a probe laser beam A $r^+.laser(488 nm). We found the modulation period of the signal depends linearly on the spacing of the grating set in the flame. We determined flame temperature by fitting the modulated signal and soot concentration with signal strength. Using this technique, we also obtained temperature profile and soot-particle distribution in a $C_3$ $H_{8}$ flame .e .

• Journal of the Korean Society for Precision Engineering
• /
• v.25 no.1
• /
• pp.138-144
• /
• 2008

Micro-machining of a brittle material such as glass, silicon, etc., is important in micro fabrication. Particularly, micro-abrasive jet machining (${\mu}-AJM$) has become a useful technique for micro-machining of such materials. The ${\mu}-AJM$ process is mainly based on the erosion of a mask which protects brittle substrate against high velocity of micro-particle. Therefore, fabrication of an adequate mask is very important. Generally, for the fabrication of a mask in the ${\mu}-AJM$ process, a photomask based on the semi-conductor fabrication process was used. In this research a rapid mask fabrication technology has been developed for the ${\mu}-AJM$. By scanning the focused UV laser beam, a micro-mask pattern was fabricated directly without photolithography process and photomask. Two kinds of mask patterns were fabricated using SU-8 and photopolymer (Watershed 11110). Using fabricated mask patterns, abrasive-jet machining of Si wafer were conducted successfully.

• Steel and Composite Structures
• /
• v.33 no.3
• /
• pp.463-472
• /
• 2019

Initial thermo-elastic and steady state creep deformation of a rotating functionally graded simple blade is studied using first-order shear deformation theory. A variable thickness model for cantilever beam has been considered. The blade geometry and loading are defined as functions of length so that one can define his own blade profile and loading using any arbitrary function. The blade is subjected to a transverse distributed load, an inertia body force due to rotation and a distributed temperature field due to a thermal gradient between the tip and the root. All mechanical and thermal properties except Poisson's ratio are assumed to be longitudinally variable based on the volume fraction of reinforcement. The creep behaviour is modelled by Norton's law. Considering creep strains in stress strain relation, Prandtl-Reuss relations, Norton' law and effective stress relation differential equation in term of effective creep strain is established. This differential equation is solved numerically. By effective creep strain, steady state stresses and deflections are obtained. It is concluded that reinforcement particle size and form of distribution of reinforcement has significant effect on the steady state creep behavior of the blade.

• Korean Journal of Metals and Materials
• /
• v.47 no.5
• /
• pp.316-321
• /
• 2009

Co nanoparticles on silica substrates were fabricated by inducing a thin-film dewetting through two different processes-furnace annealing and pulsed-laser annealing. The effects of annealing temperature, film thickness and laser energy density on dewetting morphology and mechanism were investigated. Co thinfilms with thicknesses between 3 to 15 nm were deposited using ion-beam sputtering, and then, in order to induce dewetting, thermally annealed in furnace at temperatures between 600 and $900^{\circ}C$. Some as-deposited films were irradiated using a Nd-YAG pulsed-laser of 266 nm wavelength to induce dewetting in liquid-state. Films annealed in furnace agglomerated to form nanoparticles above $700^{\circ}C$, and those average particle size and spacing were increased with an increase of film thickness. On the laser annealing process, above the energy density of $100mJ/cm^2$, metal films were completely dewetted and the agglomerated particles exhibited greater size uniformity than those on the furnace annealing process. A detailed dewetting mechanism underlaying both processes were discussed.

• Nuclear Engineering and Technology
• /
• v.54 no.7
• /
• pp.2579-2585
• /
• 2022

Ceramics of quaternary garnets (Gd,Y)₃Al₂Ga₃O₁₂ doped with Ce, Tb have been fabricated and evaluated as prospective materials for indirect energy converters of α-and β-voltaic. Samples were characterized at excitation with an X-ray source and an intense 150 keV electron beam and showed good temperature stability of their emission and tolerance to irradiation. The role of X-rays accompanied the α-particle emitting in the increase of the conversion efficiency is clarified. The garnet-type structure of the matrix in the developed materials allows the production of quality crystalline mass with a light yield exceeding that of the commonly used YAG: Ce scintillator by a factor of two times.

• Smart Structures and Systems
• /
• v.28 no.6
• /
• pp.827-838
• /
• 2021

The dynamic displacement is considered to be an important indicator of structural safety, and becomes an indispensable part of Structural Health Monitoring (SHM) system for high-speed railway bridges. This paper proposes an indirect strain based dynamic displacement reconstruction methodology for high-speed railway box girders. For the typical box girders under eccentric train load, the plane section assumption and elementary beam theory is no longer applicable due to the bend-torsion coupling effects. The monitored strain was decoupled into bend and torsion induced strain, pre-trained multi-output support vector regression (M-SVR) model was employed for such decoupling process considering the sensor layout cost and reconstruction accuracy. The decoupled strained based displacement could be reconstructed respectively using box girder plate element analysis and mode superposition principle. For the transformation modal matrix has a significant impact on the reconstructed displacement accuracy, the modal order would be optimized using particle swarm algorithm (PSO), aiming to minimize the ill conditioned degree of transformation modal matrix and the displacement reconstruction error. Numerical simulation and dynamic load testing results show that the reconstructed displacement was in good agreement with the simulated or measured results, which verifies the validity and accuracy of the algorithm proposed in this paper.

• Nuclear Engineering and Technology
• /
• v.55 no.9
• /
• pp.3121-3125
• /
• 2023

Neutron conversion detectors that use ¹⁰B-enriched boron carbide are feasible alternatives to ³He-based detectors. We prepared boron carbide films at micron-scale thickness using direct-current magnetron sputtering. The structural characteristics of natural B₄C films, including density, roughness, crystallization, and purity, were analyzed using grazing incidence X-ray reflectivity, X-ray diffraction, X-ray photoelectron spectroscopy, time-of-flight secondary ion mass spectrometry, and scanning electron microscopy. A beam profile test was conducted to verify the practicality of the ¹⁰B-enriched B₄C neutron conversion layer. A clear profile indicated the high quality of the neutron conversion of the boron carbide layer.