• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.707-710
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• 2004

Chemical mechanical polishing (CMP) process has been widely used to planarize dielectric layers, which can be applied to the integrated circuits for sub-micron technology. Despite the increased use of CMP process, it is difficult to accomplish the global planarization of in the defect-free inter-level dielectrics (ILD). In this paper, we have investigated slurry properties and CMP performance of silicon dioxide (oxide) as a function of different temperature of slurry. Thermal effects on the silica slurry properties such as pH, particle size, conductivity and zeta potential were studied. Moreover, the relationship between the removal rate (RR) with WIWNU and slurry properties caused by changes of temperature were investigated. Therefore, the understanding of these temperature effects provides a foundation to optimize an oxide CMP Process for ULSI multi-level interconnection technology.

• Journal of Industrial Technology
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• v.7
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• pp.27-47
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• 1987

Fine anthracite is very difficult to upgrade by conventional processes such as gravity concentration or froth flotation, because large quantities of fine coals are generated at the mining and preparation stages and a significant portion of these fine coals are mixed with gangue minerals. This study, therefore, was carried out for the purpose of improving recovery of low ash clean coal, effective beneficiation of low-grade coking coal and removal of sulphur from high-sulphur coals by employing the method of selective agglomeration using oil or polystrene flocculants, for coals which are generally hydrophobic in nature will be extracted by using flocculants. Studies were performed by varying solid concentration, concetration of bridging liquid, mixing speed and mixing time, balling speed and balling time, dispersant dosage, flocculant dosage, pulp pH, and particle size. The results were : when the methods of the oil agglomeration and selective flocculation were employ(in the two process the sample was ground to the size of -74 micron), 1) ash content of the agglomerated coal was 9.85, 7.83%, 2) combustibel recovery of it was 98.5%, 93.5%, respectively. It was observed in selective flocculation that polystyrene is an effective flocculant for coal, De-entrapment of shale from the concentrate flocculated by mechanical agitation was necessary for substantional reductions in final ash content.

• Proceedings of the KSME Conference
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• 2000.11b
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• pp.532-537
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• 2000

The purpose of this study is to determine the performance of a commercial air cleaner in removing tobacco smoke indoors. Following injection of tobacco smoke in a room, decay rates for particle concentrations were obtained far mass concentration at each point. The size distribution of the tobacco smoke particles was approximately $1.266{\mu}m$ in mass median diameter with a geometric standard deviation of 1.313. The air cleaner consisted of an electrostatic filtration unit and a fan operated at a flow rate of 5.98 CMM. The collection efficiency for $>1\;{\mu}m$ was more than 99%. Without air cleaner operation, tobacco smoke concentration ratio in room decreased to 30% of initial values within 30 minutes and with air cleaner operation, decreased to 90% of initial values in the test chamber, volume $51.27\;m^3$. Without air cleaner operation, tobacco smoke concentration ratio in room decreased to 10% of initial values within 30 minutes and with air cleaner operation, decreased to 30-70% of initial values in the test chamber, volume $149.2\;m^3$.

• Proceedings of the Korean Society of Marine Engineers Conference
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• 2006.06a
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• pp.149-150
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• 2006

Displayed result that handle particle contaminant and hydrospace organism included in number of ballast that is happened in ship using automatic back washing filter. Reason that remove first contaminant that is included in number of ballast is that heighten processing effect of after processing process. of the filter. Another advantage is to drop oft the solids with controlling revolution of drum screen in pretreatment filtration process. The fact that it is easy to attach and detach a several type of screen for getting the expected water quality is another advantage. Filter rotation speed at 1.0rpm is filter resistance 3.0bar and 3.0rpm is filter resistance 2.8bar. Filter out impurities from ballast water over 6.0rpm is filter resistance 2.6bar and 10rpm is filter resistance 2.5bar. Filtration system removal aquatic organism over $80{\mu}m$ in ballast water. This study shows that the filtration treatment system has a potential for the treatment of ballast water.

• Membrane and Water Treatment
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• v.11 no.4
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• pp.247-255
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• 2020

Sand filter is a key unit process for particle removal in water purification treatments. Its long-standing use is due to on-site customized retrofit. Proper selection of filter media is one of the retrofit approaches to improve filter performance. This study described a series of controlled laboratory column tests and examined the effects of media property on filtration and backwash. When sand media of 0.51 mm in effective size was replaced by sand of 0.60 mm, the filter run increased up to 5 times in the given bed depth. The change of media property required an increase of backwash rate by 0.05 m/min to satisfy the requirement of bed expansion, more than 20%. When the anthracite was changed with lower effective size and uniformity coefficient, correlation with sand in the filter bed could be satisfied within the permissible error between media and bulk characteristics. Besides, this selection resulted in a well-stratified configuration of media layers after bed expansion. The column study showed that the correlation of property between the dual media had a significant effect on the filter productivity and backwash interval.

• Nuclear Engineering and Technology
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• v.34 no.5
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• pp.494-501
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• 2002

Radioactive Corrosion Products (CRUD) which are generated by the neutron activation of general corrosion products at the nuclear power plant are the major source of occupational radiation exposure. Most of the CRUD has a characteristic of showing strong ferrimagnetisms. Along with the new development and production of permanent magnet (rare earth magnet) which generates much stronger magnetic field than the conventional magnet, new type of magnetic filter that can separate CRUD efficiently and eventually reduce radiation exposure of personnel at nuclear power plant is suggested. This separator consists of inner and outer magnet assemblies, coolant channel and container surrounding the outer magnet assembly. The rotational motion of the inner and outer permanent magnet assemblies surrounding the coolant channel by driving motor system produces moving alternating magnetic fields in the coolant channel. The CRUD can be separated from the coolant by the moving alternating magnetic field. This study describes the results of preliminary experiment performed with the different flow rates of coolant and rotation velocities of magnet assemblies. This new magnetic filter shows better performance results of filtering the magnetite at coolant (water). How rates, rotating velocities of magnet assemblies and particle sizes turn out to be very important design parameters.

• Membrane and Water Treatment
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• v.8 no.1
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• pp.73-88
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• 2017

Adsorption kinetics of aqueous ferric ion ($Fe^{3+}$) onto bio-natural rice grains (BRG) have been studied in a batch system. The influence of contact time (0-180 minutes), the dosage of BRG adsorbent (10, 20, 40, and $60gL^{-1}$), and ambient temperature (27, 37, 47, and $57^{\circ}C$) for the adsorption system have been reported. The equilibrium time achieved after 20 minutes of adsorption contact time. The maximum removal of ferric ion is 99% by using $60gL^{-1}$ of BRG, $T=37^{\circ}C$, and $50mgL^{-1}$ ferric ion solution. Adsorption kinetic and diffusion models, such as pseudo-first order, pseudo-second order, and Weber-Morris intra-particle diffusion model, have been used to describe the adsorption rate and mechanism of the ferric ion onto BRG surface. The sorption data results are fitted by Lagergren pseudo-second order model ($R^2=1.0$). The kinetic parameters, rate constant, and sorption capacities have been calculated. The new information in this study suggests that BRG could adsorb ferric ion from water physiosorption during the first 5 minutes. Afterward, the electrostatic interaction between ferric ion and BGR-surface could take place as a very weak chemisorptions process. Thus, there is no significant change could be noticed in the FTIR spectra after adsorption. I recommend producing BGR as a bio-natural filtering material for removing the ferric ion from water.

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.7 s.94
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• pp.1649-1657
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• 1993

This paper reports on a proof-of-concept experimental investigation focused on evaluating the vibration characteristics and control of smart hollow cantilever beams filled with an electro-rheological(ER) fluid. The beams are considered to be of uniform viscoelastic materials and modelled as a viscously-damped harmonic oscillator. Electric field-dependent natural frequencies, loss factors and complex moduli are evaluated and compared among three different beams : two types of different volume fraction of ER fluid and one type of different particle concentration of ER fluid by weight. Modal characteristics of the beams are observed in both the absence and the presence of electric potentials. It is also shown that by constructing active control algorithm the removal of structural resonances and the suppression of tip deflection are obtained. This result provides the feasiblility of ER fluids as an active vibration control element.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.27 no.6
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• pp.736-743
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• 2003

A process of 3-D particle image velocimetry, called here, as '3-D stereo PIV' was developed for the measurement of an illuminated slied section field of 3-D complex flows. The present method includes modeling of camera by a calibrator based on the homogeneous coordinate system, transfromation of the oblique-angled image to the right-angled image, identification of 2-D velocity vectors by 2-D cross-correlation equation, stereo matching of 2-D velocity vectors of two cameras, accurate calculation of 3-D velocity vectors by homogeneous coordinate system, removal of error vectors by a statistical method followed by a continuity equation criterior, and finally 3-D animation as the post processing. An experimental system was also used for the application of the proposed method. Three analog CCD cameras and an Argon-Ion Laser(300mW) for illumination were adopted to capture the wake flow behind a bluff obstacle.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.658-663
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• 2003

A process of 3-D stereo particle image velocimetry(PIV)was developed for the measurement of an illuminated sliced section field of 3-D complex flows. The present method includes modeling of camera by a calibrator based on the homogeneous coordinate system, transformation of the oblique-angled image to the right-angled image, identification of 2-D velocity vectors by 2-D cross-correlation equation, stereo matching of 2-D velocity vectors of two cameras, accurate calculation of 3-D velocity vectors by homogeneous coordinate system, removal of error vectors by a statistical method followed by a continuity equation criteria, and finally 3-D display as the post processing. An experimental system was also used for the application of the proposed method. Two high speed digital CCD cameras and an Argon-Ion Laser for the illumination were adopted to clarify the time-dependent characteristics of the leading edge extension(LEX) in a highly swept shape applied to a delta wing found in modern air-fighters.