• 상하수도학회지
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• 제18권5호
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• pp.666-672
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• 2004

Granular media filtration is used almost universally as the last particle removal process in conventional water treatment plants. Therefore, superb particle removal efficiency is needed during this process to ensure a high quality of drinking water. However, every particle can not be removed during granular media filtration. Besides the pattern of particle attachment is different depending on physicochemical aspects of particles and suspension. Filtration experiments were performed in a laboratory-scale filter using spherical glass beads with a diameter of 0.55 mm as collectors. A single type of particle suspension (Min-U-Sil 5) and pH control was used to destabilize particles. The operating conditions were similar to those of standard media filtration practice: a filtration velocity of 5 m/h. More favorable particles, i.e., particles with smaller surface charge, were well attached to the collectors especially during the early stage of filtration. This selective attachment of the lower charged particles caused the zeta potential distribution (ZPD) of the effluent to move to a more negative range. On the other hand, the ZPD of the effluent did not keep moving from less negative to more negative during the later stages of filtration, and this result was thought to be caused by two reasons: ripening effects and the detachment of flocs.

• 상하수도학회지
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• 제26권6호
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• pp.841-849
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• 2012

The effluent quality of phosphorus is strengthened by the national standard to conserve water resources to lessen the eutrophication threat. The soluble phosphate in the wastewater effluent can be removed using the converter slag as solid waste produced through the steel making process. The experiments for removal efficiencies and removal constants were performed for this research with the artificial wastewater following several different conditions, particle size, phosphate concentration and initial pH. The correlation coefficients of Freundlich adsorption isothem were 0.9505 for $PS_A$, 0.9183 for $PS_B$, respectively. The removal efficiency was 87-94 % for $PS_A$ and 90-96 % for $PS_B$ respectively. The pH of the wastewater was elevated to pH 11.8 for the initial pH 8.5, phosphate removal efficiency was the highest as 84 % ~ 98 %. In case of 10 mg/L of the intial phosphate, the removal efficiency was 96 ~ 98 %. The more initial pH increases, the higher the reaction rate constant is.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2011년도 춘계학술발표대회
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• pp.34.2-34.2
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• 2011

The demand for Ru has been increasing in the electronic, chemical and semiconductor industry. Chemical mechanical planarization (CMP) is one of the fabrication processes for electrode formation and barrier layer removal. The abrasive particles can be easily contaminated on the top surface during the CMP process. This can induce adverse effects on subsequent patterning and film deposition processes. In this study, a post Ru CMP cleaning solution was formulated by using sodium periodate as an etchant and citric acid to modify the zeta potential of alumina particles and Ru surfaces. Ru film (150 nm thickness) was deposited on tetraethylorthosilicate (TEOS) films by the atomic layer deposition method. Ru wafers were cut into $2.0{\times}2.0$ cm pieces for the surface analysis and used for estimating PRE. A laser zeta potential analyzer (LEZA-600, Otsuka Electronics Co., Japan) was used to obtain the zeta potentials of alumina particles and the Ru surface. A contact angle analyzer (Phoenix 300, SEO, Korea) was used to measure the contact angle of the Ru surface. The adhesion force between an alumina particle and Ru wafer surface was measured by an atomic force microscope (AFM, XE-100, Park Systems, Korea). In a solution with citric acid, the zeta potential of the alumina surface was changed to a negative value due to the adsorption of negative citrate ions. However, the hydrous Ru oxide, which has positive surface charge, could be formed on Ru surface in citric acid solution at pH 6 and 8. At pH 6 and 8, relatively low particle removal efficiency was observed in citric acid solution due to the attractive force between the Ru surface and particles. At pH 10, the lowest adhesion force and highest cleaning efficiency were measured due to the repulsive force between the contaminated alumina particle and the Ru surface. The highest PRE was achieved in citric acid solution with NaIO4 below 0.01 M at pH 10.

• 한국대기환경학회지
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• 제29권2호
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• pp.163-170
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• 2013

The fine-particles, moisture and variety of hazardous gases are produced during electronic manufacture process. Most of the fine-particles are 0.1~10 ${\mu}m$ in size and the hazardous gases such as HF, $SiH_4$, CO, $NH_3$, etc. seriously affect environment, human's body and manufacturing process. To remove these characterized gases and fine-particles, Water-Cyclone designed and tested for removal efficiency on fine-particles and $NH_3$ under -980Pa negative pressure condition. As a result, under 0.1~1.0 $m^3/min$ flow condition, the efficiency on 5 ${\mu}m$ particles was 80~96%, 10 ${\mu}m$ particles was 86~96%, and 20 ${\mu}m$ particles was 91~99%. Besides, the removal efficiency on soluble gas $NH_3$ was 56.5% at 0.5m3/min and 79.1% at 1.0m3/min under 500 ppm flow concentration and 70.0% at 1.0 $m^3/min$ under 1,000 ppm flow concentration. Therefore, on particles, as the flow rate and particle size increased, the collection efficiency rate was increased. On soluble gas, as the flow rate increased, the removal efficiency was increased under the same concentration.

• 상하수도학회지
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• 제29권3호
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• pp.371-380
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• 2015

Particulate matters in a water distribution system are main causes of turbidity and discoloration of tap water. They could be removed by conventional or uni-directional flushing in a water distribution system. The behaviors and required flow velocity of particles are not well known for their flushing. A model water main and hydrant were made from transparent acrylic pipe of 30mm and 16mm in diameter, respectively. We analyzed the effect of flushing velocity, particle density, and particle diameter. We found that the existence of break-though velocities at which particles begin to be removed, and which are affected by their physical properties. The removal efficiencies seemed to be influenced by resuspension capabilities related to their upward movement from the bottom. Heavy particles like scale were hard to remove through upflow hydrant because the falling velocity, calculated using Stokes' law, was higher. Particle removal efficiencies of upward hydrant and downward drain showed minor differences. Additionally, the length between hydrant and control valve affected flushing efficiency because the particulate matters were trapped in this space by inertia and recirculating flow.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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• pp.571-572
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• 2006

Tungsten CMP needs interconnect of semiconductor device ULSI chip and metal plug formation, CMP technology is essential indispensable method for local planarization. This Slurry development also for tungsten CMP is important, slurry of metal wiring material that is used present is depending real condition abroad. It is target that this research makes slurry of efficiency that overmatch slurry that is such than existing because focus and use colloidal silica by abrasive particle to internal production technology development. Compared selectivity of slurry that is developed with competitor slurry using 8" tungsten wafer and 8" oxide wafer in this experiment. And removal rate measures about density change of $H_2O_2$ and Fe particle. Also, corrosion potential and current density measure about Fe ion and Fe particle. As a result, selectivity find 83:1, and expressed similar removal rate and corrosion potential and current density value comparing with competitor slurry.

• 한국수산과학회지
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• 제40권2호
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• pp.73-78
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• 2007

The suitability of a flexible fiber filter for removing suspended solid (SS) in a recirculating aquaculture system was evaluated. This study focused on variation in the performance with a change in filtering time, influent water quality, and filtering mode duration. The particle distribution diagram of the filter effluent showed that the number of particles bigger than $5-8{\mu}m$ decreased dramatically, and the removal efficiency exceeded 80%. Although the removal efficiencies of SS and chemical oxygen demand (COD) were dependent on the quality of the influent, the SS and COD concentrations of the effluent were not affected by the influent concentrations. This was despite the deterioration if water quality after feeding in the rearing tank. The performance of the filter was not affected by the filtering mode duration, feeding conditions, or filtering time. The SS concentration and turbidity of the recirculating-type rearing tank were 30% and 50% lower, respectively, than of the a non-recirculating-type rearing tank under the same operating conditions. The flexible fiber filter was applicable to a recirculating aquaculture system that uses plenty of seawater, based on its low filtering resistance $(2kg_f/cm^2)$, high flux $(330m^3/m^2/hr)$, and high fine particle removal efficiency (80%, $5-8{\mu}m$).

• 한국환경과학회지
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• 제11권9호
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• pp.955-960
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• 2002

The recycled washwater, which has different water quality and is produced about 5 to 20% of the total water volume treated, affects the unit operation of water treatment, especially coagulation process. However, the effects of recycled washwater on unit operation of water treatment have not been fully investigated. In this study, effects of recycled washwater on coagulation process were investigated to find the optimum coagulation condition by analyzing turbidity, $UV_{254}$, TOC removal efficiencies. In addition, effects of recycled washwater on residual Al after coagulation were studied by analyzing soluble and particulate Al. The size distribution and fractal dimension of coagulated also analyzed. The recycled washwater was lower pH than the raw water. And the recycled washwater had higher $UV_{254}$, TOC and residual Al concentration than the raw water. Residual Al concentration of recycled washwater was about 50 times higher than that of raw water. Optimum coagulant dosages on the blending recycled washwater and the raw water for turbidity, $UV_{254}$ and Al removal were lower than that on the raw water. However, TOC removal increased by increasing coagulant dosage. The size and fractal dimension of coagulated particle produced in the blending recycled washwater were larger, which imply faster settling velocity, than those produced in the raw water only.

• 한국환경보건학회지
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• 제29권3호
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• pp.86-90
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• 2003

In this study, lots of methods have been studing to utilize energy and decrease contaminated effluents. There has been great progress on IGCC (Integrated gasification combined cycle) to reduce thermal energy losses. The following results have been conducted from desulfurization experiments using waste shell to remove H$_2$S. Fixed bed desulfurization experiments, to obtain basic data for scale-up was indicated. Oyster was the best among the various sorbents, like the results of TGA. Especially, H$_2$S removal efficiency of uncalcined oyster was the highest. When use oyster as desulfurization sorbents, calcination process was not needed. Thus, high desulfurization efficiency would be expected. Fixed bed reactor experiments were indicated particle size of sorbents. These had influenced on desulfurization capacity. As smaller particle size was found better desulfurization capacity. Large capacity difference was found between 0.613 mm and 0.335 mm. But, differences between 0.335 mm and 0.241 mm was relatively small. As bed temperature increased, H$_2$S removal capacity increased. Therefore, both particle size and bed temperature should be considered to remove H$_2$S by sorbents.

• 상하수도학회지
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• 제21권1호
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• pp.131-138
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• 2007

A rainwater utilization facility consists of its catchment area, treatment facility, storage tank, supply facility and pipes in general. The rainwater storage tank which occupies the largest area of the facility has been usually considered quantitatively for determining the storage capacity. Hence, there is little information on water quality improvement by sedimentation in a rainwater storage tank in operation. In this study, we measured the rainwater quality in a rainwater storage tank in operation during late spring and summer, and showed water quality improvement of turbidity removal of 25~46% by sedimentation in a rainwater storage tank under a fixed water level without inflow and outflow after runoff ceased. It is necessary to have a considerable distance between the inlet and outlet of the tank and, if possible, it is recommended that the design should allow for an effective water depth of over 3 m and supply rainwater near the water surface. The operation method which increases the retention time by stopping rainwater supply for insuring low turbidity is recommended when the turbidity of rainwater runoff is high. And also more efficient operation and maintenance of the rainwater utilization facility is expected through the tailored design and operation of the facility considering particle removal and behavior.