• 한국표면공학회지
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• 제54권6호
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• pp.365-370
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• 2021

In this research, we proceeded with research on plasma resistance of the cleaning process of APS(Atmospheric Plasma Spray)-Y₂O₃ coated parts used for semiconductor and display plasma process equipment. CF₄, O₂, and Ar mixed gas were used for the plasma environment, and respective alconox, surfactant, and piranha solution was used for the cleaning process. After APS-Y₂O₃ was exposed to CF₄ plasma, the surface changed from Y₂O₃ to YF₃ and a large amount of carbon was deposited. For this reason, the plasma corrosion resistance was lowered and contamination particles were generated. We performed a cleaning process to remove the defect-inducing surface YF₃ layer and carbon layer. Among three cleaning solutions, the piranha cleaning process had the highest detergency and the alconox cleaning process had the lowest detergency. Such results could be confirmed through the etching amount, morphology, composition, and accumulated contamination particle analysis results. Piranha cleaning process showed the highest detergency, but due to the very large thickness reduction, the base metal was exposed and a large number of contaminated particles were generated. In contrast, the surfactant cleaning process exhibit excellent properties in terms of surface detergency, etching amount, and accumulated contamination particle analysis.

• 한국입자에어로졸학회지
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• 제18권4호
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• pp.137-145
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• 2022

As many studies on the harmfulness of fine dust have been reported, awareness of its seriousness is spreading. Recently, interest in indoor air quality as well as air pollution is increasing, and research on measures to block fine dust flowing into the room from the outside is being conducted. The clothing company is launching functional clothing to prevent fine dust attached to clothing from entering the room through outdoor activities. However, it is difficult to confirm whether there is actually fine-dust blocking performance, and there is no evaluation standard. In this study, the contamination rate caused by fine dust was quantitatively compared through image processing after contamination of the outer fabric for 4 types of commercially available functional clothing with fine-dust blocking effect. The difference in particle contamination according to the material of the outer fabric was analyzed by comparing the surface resistance, and it was found that the higher the surface resistance of the outer fabric material, the more fine dust was attached. The analysis method of this study is expected to be able to quantitatively compare and evaluate the fine-dust blocking performance of functional clothing.

• 대한기계학회논문집B
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• 제27권1호
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• pp.25-31
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• 2003

Airborne contaminant particles are intruded into optical disk drives(ODD) due to the flow caused by disk rotation and can be adhered to lens or disk surfaces, which causes decrease of laser power and increase of read/write errors. Such a phenomenon can be more serious as the space between the disk and the lens is reduced fur high-density storage devices. The purpose of this paper is to understand design parameters to reduce the particle intrusion into an ODD. Suggestions are made to prevent the particle intrusion that can decrease the stability of an ODD and also prevent the potential heat build-up problem. The sealing effect of drive and the forced injection of clean air (using HEPA filter) into the drive minimizes intrusion of the outside air and dusts in an ODD remarkably. Moreover it is proved by experiments that the installation of a heatproof pad to isolate heat generation part (PCB) from information read/write sections and the forced injection of dust-free air reduce the gas temperature inside the drive as well as the amount of particles intruded.

• 대한기계학회논문집B
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• 제28권8호
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• pp.976-983
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• 2004

In high-density hard disk drives, the slider should be made to fly close to the magnetic recording disk to generate better signal resolution and at an increasingly high velocity to achieve better data rate. The slider disk interaction in CSS (contact-start-stop) mode is an important source of particle generation. Contamination particles in the hard disk drive can cause serious problems including slider crash and thermal asperities. We investigated the number and the sizes of particles generated in the hard disk drive, operating at increasing disk rotational speeds, in the CSS mode. CNC (condensation nucleus counter) and PSS (particle size selector) were used for this investigation. In addition, we examined the particle components by using SEM (scanning electron microscopes), AES (auger electron spectroscopy), and TOF-SIMS (time of flight-secondary ions mass spectrometry). The increasing disk rotational speed directly affected the particle generation by slider disk interaction. The number of particles that were generated increased with the disk rotational speed. The particle generation rate increased rapidly at motor speeds above 8000 rpm. This increase may be due to the increased slider disk interaction. Particle sizes ranged from 14 to 200 nm. The particles generated by slider disk interaction came from the lubricant on the disk, coating layer of the disk, and also slider surface.

• International Journal of Precision Engineering and Manufacturing
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• 제6권3호
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• pp.51-55
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• 2005

This study addresses the contamination sensitivity test of a typical fuel pump for an automotive vehicle. The objective of the study is to find the contamination sensitivity coefficient of a fuel pump on specific contaminant particle sizes so that an optimal fuel filter could be selected. To achieve the objective, the degradation of discharge flow rate of the fuel pump is measured under the experiments of various contaminants size ranges of ISO test dust up to $80\;{\mu}m$. The fundamental theory of contamination sensitivity is introduced and the contamination sensitivity coefficients are estimated using the experimental data. Maximum contamination sensitivity coefficient of $5\chi\;10^{-6}\;L/min{\cdot}Ea$ is found in the contaminant size range of $40\;{\mu}m\~50\;{\mu}m$. The magnified picture of the surface of vane disc reveals that the abrasive wear is the principal cause of discharge flow rate degradation. Hence, this study reveals that a high efficiency filter for contaminant particles especially in the size range of $30\;{\mu}m\~70\;{\mu}m$ especially should be used to maintain the service life of the fuel filter.

• Tribology and Lubricants
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• 제16권6호
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• pp.415-424
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• 2000

The use of magnetoresistive (MR) head requires much tighter control of particle contamination in a drive since loose particles on the disk surface will generate thermal asperities (TA). In this study, a spinoff test was performed to investigate the adhesion and removal capability of a particle to disk surface. Numerical simulation was also performed to investigate dominant factor of particle detachment and to support experimental results. It was shown that particles are detached from the disk surface by the moment derived from the centrifugal force and the drag force and that the centrifugal force and capillary force are the dominant force, which determines spin-off of a particle on the disk surface. Removal of particles smaller than several micrometers, which are the main source of TA generation, is extremely difficult since the adhesion forces exceed the centrifugal force. Lubricant types and manufacturing process also influence the particle removal. Lower bonding ratio and lower viscosity of the lubricant will help to increase the removal rate of the particles from the disk surface.

• 반도체디스플레이기술학회지
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• 제1권1호
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• pp.35-40
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• 2002

Understanding of charging properties of a small particle is necessary to control the particle contamination and to improve productivity of the electronic device in the plasma aided semiconductor manufacturing processes. In this study, the effects of both magnetic field and particle size on the charging properties are experimentally investigated in collisional dusty plasmas. The experiments carried out in the system consisted of a monodisperse particle generation system, a DC magnetized plasma generation system and a charge measurement system. The plasma chamber is made of cross-shape Pyrex surrounded by magnetic bucket (composed of 12 permanent magnetic bar) to confine the plasma. DC magnetic field up to 250G are applied to the plasma zone by external magnetic coil. Previous work shows the charging effect clearly increase with increasing the size of the particle and plasma density, as it was expected.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2007년도 동계학술발표대회 논문집
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• pp.600-605
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• 2007

In this study, the risk rates of different contamination sources of the Foreign material in a minienvironment were analyzed through CFD simulation. From the results, the ambient contamination sources mainly affect wafers in the FOUP, whereas the internal contamination sources mainly affect wafers laid on the robot arm in the minienvironment. And the purging plenum system is very useful in protecting the wafers in the FOUP from Foreign materials transferred from the FFU. However, this system is unable to protect the wafers on the robot arm from internal Foreign materials and the wafers in the FOUP from sources of the interface between the FOUP and the minienvironment.

• 설비공학논문집
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• 제18권9호
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• pp.745-752
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• 2006

DOS and NaCl aerosol particles were used to determine collection efficiencies of a 2-stage electrostatic wet scrubber with respect to particle size. The DOS and NaCl aerosols have geometric mean diameters of 0.1-3.0 urn, geometric standard deviations of $1.1{\sim}1.8$ and total number concentrations of $450{\sim}2,400\;particles/cm^3$. The tested operating variables for the electrostatic wet scrubber included air velocity and water injection rate. It was shown from the experimental results that particle collection efficiencies increased in the submicron particle size range when different polarities were applied on the water nozzle and corona wire, respectively. This increase in the collection efficiency is attributed to strong electrostatic attraction between the negative water droplets and positive submicron particles. The collection efficiencies also increased when water injection rate was increased or air velocity was decreased. Meanwhile, the pressure drop across the wet scrubber decreased by 90% compared with the existing mechanical wet scrubber. Finally, ammonia gas was used to determine gas removal efficiencies. It was observed that the gas removal efficiencies increased when the air velocity was decreased or the water injection rate was increased.

• 대한기계학회논문집B
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• 제39권3호
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• pp.253-260
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• 2015

클린룸 내부에서 발생한 오염은 복잡한 공정과 여러 가지 장비에 의해서 더욱 더 복잡한 형태를 나타내며, 다양한 오염 형태로 나타나게 된다. 이러한 경향으로 인해서 클린룸 내부에서 발생한 오염입자를 생산공정에 영향을 주지 않으면서 경제적이고 효율적으로 제어하기 위해서, 오염입자 분포에 대한 상세한 해석이 요구된다. 따라서 이러한 오염제어의 목적으로 오염원 추정법이 개발되었다. 본 논문에서는 기여도를 추정하기 위한 계산 가속화 방법으로 영역분할법을 제안하였다. 이 결과로부터 각 오염원의 오염 발생량을 정량적으로 예측할 수 있었다.