• Proceedings of the KSME Conference
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• 2007.05b
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• pp.2333-2337
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• 2007

The practical studies on the method of particle contamination control for yield enhancement in the cleanroom were carried out. The method of the contamination control was considered, which is composed of data collection, data analysis, improvement action, verification, and implement control. The composition analysis for data collection and data analysis was used in the cellular phone module packaging lines. And this method was evaluated by the variation of yield loss between before and after improvement action. In case that the composition analysis was applied, the critical sources were selected and yield loss reduction through improvement actions was also investigated. From these results, it is concluded that the composition analysis is effective solutions for particle contamination control in the cleanroom.

• Journal of Korean Society for Atmospheric Environment
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• v.12 no.4
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• pp.377-387
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• 1996

This study was carried out to monitor the visibility including measurement and analysis of the various parameters such as particle size distribution, chemical composition, and meteorotical conditions to understand the characteristics and causes of this phenomenon. According to the analysis of intensive sampling, $SO_4^{2-}, NO-3^-, Cl^-, NH_4^+$ ion concentration increased together with the mass concentration around 1 $\mu$m in the case of low visibility. $(NH_4)_2SO_4, NH_4NO_3$, and $NH_4Cl$ were thought to be the major components of fine particles. The statistical analysis showed that the scattering effect of particle was 81.2%, the absorption effect was 14.9%. Therefore, these effects were the major factors to reduce the visibility. In conclusion, the visibility was reduced by the fine particle of sulfate (18.6%), nitrate (14.2%), organic carbon (10.8%), element carbon (25.8%), and residual (24.8%) during this study.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.31 no.6 s.261
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• pp.522-530
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• 2007

The practical studies on the method of particle contamination control for yield enhancement in the cleanroom were carried out. The method of the contamination control was proposed, which are composed of data collection, data analysis, improvement action, verification, and implement control. The partition check method and the composition analysis for data collection and data analysis were respectively used in the main board and the cellular phone module production lines. And these methods were evaluated by the variation of yield loss between before and after improvement action. In case that the partition check method was applied, the critical process step was selected and yield loss reduction through improvement actions was observed. While in case that the composition analysis was applied, the critical sources were selected and yield loss reduction through improvement actions was also investigated. From these results, it is concluded that the partition check and the composition analysis are effective solutions for particle contamination control in the cleanroom production lines.

• Korean Journal of Mineralogy and Petrology
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• v.36 no.4
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• pp.345-353
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• 2023

This study aimed to investigate the differences in the commercial powder products of the Yeongdong illite based on sales specifications, specifically examining the mineralogical composition, particle size, and chemical composition according to mesh size. The goal was to understand the characteristics of illite powder products and utilize them as a mineralogical database for exploring various applications. Commercial illite powder samples obtained from two mines were subjected to various experiments, including X-ray diffraction (XRD) analysis, laser diffraction particle size analysis, and scanning electron microscopy analysis, X-ray fluorescence analysis. The XRD analysis revealed that the illite powder products from the two mines mainly consisted of illite/muscovite, quartz, and feldspar, indicating similar constituent minerals matching with those of ores for each mine. Laser diffraction particle size analysis indicated the difference in particle size distribution depending on the product specifications, with particle size uniformity tending to increase with increasing mesh sizes. Scanning electron microscopy analysis showed variations in particle shape and size based on specifications. The size of illite particles did not vary significantly with product specifications, with noticeable changes observed mainly in the particle sizes of quartz and feldspar. Furthermore, although there were some differences in chemical composition among the samples from different mines, no significant variations were observed according to specifications. Based on these results, when considering the application of commercial illite powder, it is essential to carefully select it with the consideration of its specifications to account for characteristic variations. The findings of this study present support the great potential of various application fields of commercial illite powder, contributing to industrial utilization and the development of new technologies.

• Journal of Korean Society for Atmospheric Environment
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• v.15 no.2
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• pp.175-182
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• 1999

Scanning electron microscopy (SEM) has played an important role in receptor modeling area because it is a powerful tool for characterizing individual particles. The purpose of the study was to classify individual diesel particles base on statistical analysis and image analysis by SEM/EDX (energy dispersive x-ray analyser). The diesel particles were sampled by both a modified CVS 75 mode and a high speed mode with a chassis dynamometer. The SEM/EDX system provides various physical parameters including particle's particle diameter and chemical information. Thus density and mass of the diesel particle were estimated cased on its chemical composition and further fractal dimensions of the diesel particle were obtained by the Hurst exponent method. The fractal dimension in the sample of modified CVS 75 mode was higher than the high speed mode. Finally, mass fractions for a diesel vehicle as a source profile were estimated cased on a particle class concept.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.7
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• pp.747-753
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• 2004

In this paper, nanocrystalline indium tin oxide (ITO) particles were fabricated by using synthesis without harmful elements. The synthetic method is to eliminate the chloridic and nitridic elements which are included in the current wet type synthetic method. Therefore, it is possible to lower synthetic temperature below 600 $^{\circ}C$ to eliminate the harmful elements. Accordingly, fine particle can be achieved by applying the process. Particle size, surface area, crystal structure, and composition ratio of the synthesized nanocrystalline ITO particle by using the method were analyzed with high resolution transmission electron microscopy (HRTEM), BET surface area analyzer, X-ray diffraction (XRD), and energy dispersion spectroscopy (EDS). As a result, its particle size is less than 10 nm, and the surface area exceeds 100 m$^2$/g. The XRD analysis indicates that the cystal structure of the powder is cubic one with orientation of <222>, <400>, <440>. Also, the analysis of the composition demonstrates that the around 8 wt% tin is uniformly included in In$_2$O$_3$ lattice of the nanoparticle.

• Journal of the Korean Ceramic Society
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• v.26 no.6
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• pp.737-746
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• 1989

After Ba-ferrite powders synthesized hydrothermally and its heated powders were dissolved partially with HCl treatment time, the BaO/Fe2O3 mole ratio of dissolved solutions and powders were measured by AAS, also, lattice constants, particle morphology and magnetic properties in HCl treated, heated and no-heated Ba-ferrite powders were abtained by means of XRD, SEM and VSM, respectively. From above analysis results, the effect of Ba/Fe mole ration in suspension(as starting material) on the BaO/Fe2O3 composition and particle characteristics of products were investigated, and the effect of heat treatment on magnetic properties of products examined. The composition, lattice constant and crystal phase of products depend on the Ba/Fe mole ratio in suspension. Ba content in surface or outer part of Ba-ferrite powder is higher than inner and heterogeneous, and the excess Ba ions in the inner part of particle move into the outer by heating, so that the mole ratio of BaO/Fe2O3 in the more jinner approaches more to the stoichiometric composition 1 : 6. The crystallinity, coercivity and saturation magnetization of products are increased by heat treatment, and the heat-treated samples synthesized hydrothermally in lower temperature are appreciated to have better powder characteristics.

• Journal of Environmental Science International
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• v.22 no.1
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• pp.7-15
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• 2013

Aerosol characterization study for individual particle in Busan metropolitan industrial complex was carried out from December 2010 to August 2011. SEM(scanning electron microscope)-EDX(energy dispersive x-ray) analysis was used for the analysis of 600 single particles during the sampling periods to identify non-metallic aerosol particle sources. Average $PM_{10}$ concentration was 65.5 ${\mu}g/m^3$ in summer, 104.1 ${\mu}g/m^3$ in winter during the sample periods. And Average $PM_{2.5}$ concentration was 24.5 ${\mu}g/m^3$ in summer, 64.5 ${\mu}g/m^3$ in winter individually. Particle density, enrichment factor, correlation analysis, principle component analysis were performed based on chemical composition data. Particle density distribution was measured to 2~4 $g/cm^3$, and the density of $PM_{2.5}$ was measured above 3 $g/cm^3$. In general, the elements Si, Ca, Fe and Al concentrations were higher in all samples of individual particles. The non-ferrous elements Zn, Br, Pb, Cu concentrations were higher in summer than in winter. The concentrations were not changed with the seasons because of non-ferrous industry emission pattern.

• Asian Journal of Atmospheric Environment
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• v.4 no.3
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• pp.115-140
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• 2010

Great concerns about atmospheric aerosols are attributed to their multiple roles to atmospheric processes. For example, atmospheric aerosols influence global climate, directly by scattering or absorbing solar radiations and indirectly by serving as cloud condensation nuclei. They also have a significant impact on human health and visibility. Many of these effects depend on the size and composition of atmospheric aerosols, and thus detailed information on the physicochemical properties and the distribution of airborne particles is critical to accurately predict their impact on the Earth's climate as well as human health. A single particle analysis technique, named low-Z particle electron probe X-ray microanalysis (low-Z particle EPMA) that can determine the concentration of low-Z elements such as carbon, nitrogen and oxygen in a microscopic volume has been developed. The capability of quantitative analysis of low-Z elements in individual particle allows the characterization of especially important atmospheric particles such as sulfates, nitrates, ammonium, and carbonaceous particles. Furthermore, the diversity and the complicated heterogeneity of atmospheric particles in chemical compositions can be investigated in detail. In this review, the development and methodology of low-Z particle EPMA for the analysis of atmospheric aerosols are introduced. Also, its typical applications for the characterization of various atmospheric particles, i.e., on the chemical compositions, morphologies, the size segregated distributions, and the origins of Asian dust, urban aerosols, indoor aerosols in underground subway station, and Arctic aerosols, are illustrated.

• Journal of Korean Society for Atmospheric Environment
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• v.13 no.5
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• pp.345-353
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• 1997

The purpose of the study was to stastically classify individual PM-10 measured by SEM/EDX (scanning electron microscopy/energy dispersive x-ray analyzer). The SEM/EDX provided various physical parameters like optical diameter, as well as major 18 chemical information (Mg, Al, Si, P, S, Cl, K, Ca, Ti, V, Cr, Mn, Fe, Ni, Cu, Zn, Br, Pb) for a particle-by-particle basis. The total of 1,419 particles were analyzed for the study. Thus density and mass of each particle can be estimated based on its chemical composition. Further the study developed 4 semisource profiles including highway, oil boiler, incinerator, and soil emissions, where each sample was collected near the source in the ambient air The profiles developed were consisted of mass fractions and their uncertainties based on a particle class concept. To obtain mass fraction of each particle class, an agglomerative hierarchical cluster analysis was initially applied to create particle classes for each sample. Then uncertainties were calculated for each class based on the jacknife method. The 1,258 particles out of 1,419 (88.7%) were assorted in newly generated particle classes. The study provides opportunities to identify particle's source quantitatively and to develope various receptor models.