• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2003년도 춘계학술대회 논문집
• /
• pp.1614-1617
• /
• 2003

Actuator being used in the ship supplies engine with air. When actuator is out of order, engine is not operated. This out of order is due to fracture of piston or rotating of spindle in the case of plastic deformation of parallel part in locking plate. For this reason, locking plate must be guaranteed enough strength. Therefor in this paper, the effects of changes with the clearance of between spindle and parallel part, the contact height of parallel part and spindle, the side circle diameter of parallel part and the width of locking plate in the designated torque are investigated. The result of this investigation shows the relation between locking plate and spindle.

• 한국전기전자재료학회논문지
• /
• 제17권4호
• /
• pp.448-452
• /
• 2004

The micromachined variable optical attenuator(VOA) was presented in the paper. The VOA has two single mode fiber(SMF) aligned with free space and symmetric parallel plate actuator with microshutter, which can control a amount of light by driving the actuator. In the paper, analysis on driving performances of the VOA was performed and can be reduced threshold voltage through the decreasing displacement actuating range. This paper presents a VOA that is fabricated using bosch deep silicon etching process with silicon on insulator(SOD wafer. The VOA consists of driving electrode, ground electrode, actuating microshutter, and mechanical stopper. In this VOA, actuating shutter is driven by electrostatic force and the threshold voltage is close to 28V, 46V come along with the spring width of 5${\mu}{\textrm}{m}$, 7${\mu}{\textrm}{m}$ respectively. Attenuation range is measured from 2.4㏈ to 16.7㏈.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2001년도 춘계학술대회 논문집
• /
• pp.848-853
• /
• 2001

Electrostatic actuation was adopted for ease of fabrication. We proposed a new driving scheme that uses the vector sum of force generated by comb-finger and by parallel plate. The moving and fixed electrodes are arranged to maximize the driving force. In this paper, an electrostatic field analysis is performed by Maxwell analysis tool for micro actuators. From the analysis, a comb-parallel type micro-actuator with 4${\mu}{\textrm}{m}$ width, 6${\mu}{\textrm}{m}$ overlap and 45${\mu}{\textrm}{m}$ height could be designed. In order to compare the new type of actuator with the conventional comb type of actuator, we arranged that both types have the same area and the same number of actuators. To make a high aspect ratio structure, we are developing fabrication process using SU-8 and electro-plating.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2006년도 추계학술대회 논문집
• /
• pp.311-312
• /
• 2006

• 한국유체기계학회 논문집
• /
• 제15권3호
• /
• pp.46-50
• /
• 2012

Plasma actuator makes parallel flow on the wall surface by the interaction between plasma and neutral air particles. Dielectric barrier discharge (DBD) plasma actuator is widely studied as one type of plasma actuators, which consists of one electrode exposed to the environmental gas and the other encapsulated by a dielectric material. This paper is experimentally focused on the performance of DBD plasma actuator mounted on a flat plate, which depends on kinds of the electrode materials, their thicknesses and the supplied voltage including its frequency. We measured the velocity magnitudes of the induced flow by a stagnation probe as a performance parameter of the plasma actuators. The velocity profiles of the flow induced by the plasma actuators are similar in all measurement cases. The magnitude of the induced velocity is strongly influenced by the thickness of the electrodes and the frequency of the input voltage. The performance of DBD plasma actuators is related to the electric properties of the electrode materials such as the ionization energy and the electrical resistivity.

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 2005년도 ICCAS
• /
• pp.2290-2295
• /
• 2005

In this paper, it is developed simulator system of 3 D.O.F parallel robot for educate of expertness. This simulator system is composed of three parts ? 3 D.O.F parallel robot, controller (hardware) and software. First, basic structure of the robot is 3 active rotary actuator that small geared step motor with fixed base. An input-link is connected to this actuator, and this input-link can connect two ball joints. Thus, two couplers can be connected to the input-link as a pair. An end-plate, which is jointed by a ball joint, can be connected to the opposite side of the coupler. A sub-link is produced and installed to the internal spring, and then this sub-link is connected to the upper and bottom side of the coupler in order to prevent a certain bending or deformation of the two couplers. The robot has the maximum diameter of 230 mm, 10 kg of weight (include the table), and maximum height of 300 mm. Hardware for control of the robot is composed of computer, micro controller, pulse generator, and motor driver. The PC used in the controller sends commands to the controller, and transform signals input by the user to the coordinate value of the robot by substituting it into equations of kinematics and inverse kinematics. A controller transfer the coordinate value calculated in the PC to a pulse generator by transforming it into signals. A pulse generator analyzes commands, which include the information received from the micro controller. A motor driver transfer the pulse received from the pulse generator to a step motor, and protects against the over-load of the motor Finally, software is a learning purposed control program, which presents the principle of a robot operation and actual implementation. The benefit of this program is that easy for a novice to use. Developed robot simulator system can be practically applied to understand the principle of parallel mechanism, motors, sensor, and various other parts.

• 융복합기술연구소 논문집
• /
• 제1권2호
• /
• pp.16-24
• /
• 2011

The angular electrostatic microactuator using skewed electrode array (SEA) scheme was proposed. The moving and fixed electrodes are arranged to make the driving force perpendicular to the rotating moment of arm. By changing the electrode overlap length, the magnitude of electrostatic force and stable displacement will be changed. In order to optimize the design, electrostatic FE analysis were carried out and the empirical force model was established for SEA. Simulation was performed to make the comparison between conventional actuators and SEA. The proposed SEA generates actuating torque 2 times greater than a comb-drive and stable actuator displacement 40% greater than a parallel plate type actuator. The angular electrostatic microactuator using skewed SEA scheme was designed and fabricated using SoG process.

• 대한전기학회논문지:전기물성ㆍ응용부문C
• /
• 제49권9호
• /
• pp.546-551
• /
• 2000

A micromechanical switch that can be used as a logic gate is described in this paper. This switch consists of fixed input electrodes an output electrode Vcc/GND electrodes and movable plates suspended by crab-leg flexures. for mechanical switching of an electrical signal a parallel plate actuator which comes in contact with output electrode was used. Provided that movable plates are connected to Vcc and a low input voltage(ground signal) is applied to the fixed input electrodes the movable plates are pulled by an electrostatic force between the fixed input electrodes and the movable plates. the proposed micromechanical switch was fabricated by surface micromachining technology with$2\mum$ -thick poly-Si and the measured threshold voltage for ON/OFF switching was 23.5V.

• 융복합기술연구소 논문집
• /
• 제1권2호
• /
• pp.6-15
• /
• 2011

This paper reports the design and fabrication of a micro-electro-mechanical-system(MEMS)-based electrostatic angular microactuator for a dual-stage servo. The proposed actuator employs a novel electrode pattern named "skewed electrode array(SEA)" scheme. It is shown that SEA has better linearity than a parallel plate type actuator and stronger force than a comb-drive based actuator. The moving and the fixed electrodes are arranged to make the driving force perpendicular to the rotating moment of arm. By changing the electrode overlap length, the magnitude of electrostatic force and stable displacement will be changed. In order to optimize the design, an electrostatic FE analysis was carried out and an empirical force model was established for SEA. A new assembly method which will allow the active electrodes to be located beneath the slider was developed. The active electrodes are connected by inner and outer rings lifted on the base substrate, and the inner and outer rings are connected to platform on which the slider locates. Electrostatic force between active electrodes and platform can be used for exiting out of plane modes, so this provides the possibility of the flying height control. A microactuator that can position the pico-slider over ${\pm}0.5{\mu}m$ using under 20 volts for a 2 kHz fine-tracking servo was designed and fabricated using SoG process.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2004년도 하계학술대회 논문집 D
• /
• pp.2420-2422
• /
• 2004

In this paper, we developed a miniaturized humanoid having the new joint mechanism. In general, the high torque actuator and the joint mechanism having three coincided axes are important in development of the miniaturized humanoid. By using the swash plate, which is generally used in three axes rotor mechanism, we developed a new three-coincided-axes joint mechanism and a miniaturized humanoid having the joint mechanism at its hip and ankle joints. Since the joint mechanism has a pair of parallel drive motors for each axis, the driving torque of the joint mechanism is very high. Futhermore, thanks to the three-coincided-axes mechanism, the solution of the inverse kinematics is simple and computationally efficient, and the resulting walking behavior of the humanoid becomes natural.