Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Variable Optical Attenuator using Parallel Plate Electrostatic Actuator

평행 평판 정전형 구동기를 이용한 가변 광 감쇠기

  • 김태엽 (KIST 마이크로시스템 연구센터, 연세대학교 전기전자공학과) ;
  • 허재성 (KIST 마이크로시스템 연구센터) ;
  • 문성욱 (KIST 마이크로시스템 연구센터) ;
  • 신현준 (KIST 마이크로시스템 연구센터) ;
  • 이상렬 (연세대학교 전기전자공학과)
  • Published : 2004.04.01
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Abstract

The micromachined variable optical attenuator(VOA) was presented in the paper. The VOA has two single mode fiber(SMF) aligned with free space and symmetric parallel plate actuator with microshutter, which can control a amount of light by driving the actuator. In the paper, analysis on driving performances of the VOA was performed and can be reduced threshold voltage through the decreasing displacement actuating range. This paper presents a VOA that is fabricated using bosch deep silicon etching process with silicon on insulator(SOD wafer. The VOA consists of driving electrode, ground electrode, actuating microshutter, and mechanical stopper. In this VOA, actuating shutter is driven by electrostatic force and the threshold voltage is close to 28V, 46V come along with the spring width of 5${\mu}{\textrm}{m}$, 7${\mu}{\textrm}{m}$ respectively. Attenuation range is measured from 2.4㏈ to 16.7㏈.

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References

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