• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.510-510
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• 2012

반도체, 디스플레이, 태양광 등의 공정에서 사용되는 웨이퍼의 크기가 증가하고, 생산률이 플라즈마의 밀도에 비례한다는 연구 결과가 발표되면서 대면적 고밀도 플라즈마 소스 개발에 대한 연구가 활발히 진행되고 있다. 특히, ECR, ICP, Helicon plasma 등 고밀도 플라즈마 소스에 대한 관심이 높아지고 있다. 이에 따라, 여러 개의 ICP를 결합한 multiple ICP를 이용해 대면적 고밀도 플라즈마 소스 개발을 진행했다. Multiple ICP의 경우 각 ICP 소스에 같은 power (current)를 공급해야만 균일한 플라즈마 방전이 발생되어 균일도를 확보 할 수 있다. Current controller 같은 추가적인 장비를 설치하지 않고, power를 분배하는 transmission line을 coaxial 형태로 설계하고 같은 길이로 병렬 연결함으로써 각각의 ICP소스에서 균일한 플라즈마를 방전시킬 수 있었다. Power generator에서 보는 각 ICP의 total impedance는 각 ICP 소스의 impedance와 coaxial 형태의 transmission line의 characteristic impedance, frequency, 길이의 함수로 구할 수 있고, 이 total impedance가 일정하기 때문에 current가 균등하게 분배되어 각 ICP소스에 균등한 power 분배가 가능한 것이다. 실질적으로 ICP 소스의 impedance는 플라즈마 방전 유무에 따라 변화하기 때문에 일정하게 유지하는 것은 어렵다. Transmission line의 characteristic을 사용함으로써 ICP의 impedance의 변화에 상관없이 Total impedance를 일정하게 유지시킴으로써 균등한 power 분배가 가능하다는 것을 연구했다. Frequency는 13,56MHz, characteristic impedance를 $50{\Omega}$ (coaxial cable)으로 고정하고, ICP 소스의 플라즈마 방전 유무/antenna turn/소스 위치에 따른 total impedance를 transmission line의 길이에 따라 측정하고, 이를 이론값, 그래프와 비교하였다. 특정 length에서 플라즈마 방전 유무(ICP의 impedance 변화)와 상관없이 비교적 일정한 total impedance를 유지하는 것을 확인 했다. 이것은 특정 길이를 갖는 coaxial형태의 transmission line를 연결하면, total impedance는 플라즈마 방전 유무로 발생하는 ICP의 impedance 변화와 상관없이 일정하게 유지되어 각 ICP소스에 균등한 파워 분배가 가능하다는 것을 보여준 결과이다. 이것을 토대로 frequency에 따라(또는 characteristic impedance에 따라) 균등한 파워 분배가 가능한 coaxial 형태 transmission line의 특정 길이를 구할 수 있고, 대면적 소스에서 균등한 파워 분배를 위한 병렬연결에 적용할 수 있을 것이다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2002년도 추계학술대회논문집
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• pp.902-907
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• 2002

An equivalent electroacoustic circuit approach of estimating the sound absorption coefficient for parallel perforated plate system is proposed. The proposed approach is validated by comparing the calculated absorption coefficients of a parallel single layer perforated plate system with the values measured by the two-microphone impedance tube method for various porosity and the number of perforated plate. The sound absorbing performances of parallel and series perforated plate systems are compared and discussed from a standpoint of frequency bandwidth with sound absorption. The proposed approach is further extended to the parallel double layer perforated plate system.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2001년도 전력전자학술대회 논문집
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• pp.501-505
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• 2001

The parallel operation system of UPS is used to increase reliability of power source at critical load. But parallel UPS system has a few defects, impedance is different from each other and circulating current occurs between UPSs, due to line impedance and parameter variation, though controlled by the same synchronization signal. According to such characteristic of parallel UPS, balanced load-sharing control is the most important technique in parallel UPS operation. In this paper, a novel power deviation compensation algorithm is proposed. it is composed of voltage controller to compensate power deviation that be calculated by using active and reactive current deviation between inverters on synchronous d-q reference frame.

• Journal of Power Electronics
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• 제18권1호
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• pp.234-250
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• 2018

This paper presents a new load sharing control for use between paralleled three-phase inverters in an islanded microgrid based on the online line impedance estimation by the use of a Kalman filter. In this study, the mismatch of power sharing when the line impedance changes due to temperature, frequency, significant differences in line parameters and the requirements of the Plug-and-Play mode for inverters connected to a microgrid has been solved. In addition, this paper also presents a new droop control method working with the line impedance that is different from the traditional droop algorithm when the line impedance is assumed to be pure resistance or pure inductance. In this paper, the line impedance estimation for parallel inverters uses the minimum square method combined with a Kalman filter. In addition, the secondary control loops are designed to restore the voltage amplitude and frequency of a microgrid by using a combined nominal value SOGI-PLL with a generalized integral block and phase lock loop to monitor the exact voltage magnitude and frequency phase at the PCC. A control model has been simulated in Matlab/Simulink with three voltage source inverters connected in parallel for different ratios of power sharing. The simulation results demonstrate the accuracy of the proposed control method.

• Journal of Power Electronics
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• 제19권2호
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• pp.519-528
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• 2019

The unified power quality conditioner (UPQC) is an effective custom power device that is used at the point of common coupling to protect loads from voltage and current-related PQ issues. Currently, most researchers have studied series unit and parallel unit models and an idealized transformer model. However, the interactions of the series and parallel converters in AC-link are difficult to analyze. This study utilizes an equivalent transformer model to accomplish an electric connection of series and parallel converters in the AC-link and to establishes a precise unified mathematical model of the UPQC. The strong coupling interactions of series and parallel units are analyzed, and they show a remarkable dependence on the excitation impedance of transformers. Afterward, a feed-forward decoupling method based on a unified model that contains the uncertainty components of the load impedance is applied. Thus, this study presents an adaptive method to estimate load impedance. Furthermore, simulation and experimental results verify the accuracy of the proposed modeling and decoupling algorithm.

• 한국소음진동공학회논문집
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• 제15권9호
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• pp.1003-1008
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• 2005

The acoustic absorption of a multiple layer perforated plate system is very good near the resonance frequency region, while it has been regarded as a demerit that its frequency bandwidth is considerably narrow. In order to overcome such a demerit, the parallel perforated plates with different porosities are proposed. The sound absorption of such system composed of a parallel perforated plate is calculated by an equivalent electroatoustic circuit approach and validated by comparing the calculated absorption coefficients with those measured by the two-microphone impedance tube method. The sound absorptive characteristics and performance of parallel perforated plate systems are discussed from a standpoint of frequency bandwidth related with sound absorption.

• 대한전기학회논문지:전기기기및에너지변환시스템부문B
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• 제55권8호
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• pp.403-407
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• 2006

Standard capacitors, as like as Hamon resistor standards, of series connection/parallel connection ratio $10{\mu}F/1000{\mu}F\;and\;100{\mu}F/10000{\mu}F$ were fabricated for calibration of impedance bridges or analyzers with measuring ranges up to 1 F. The calculated correction terms to the ratio of one measured value in series connection to the value in parallel connection were evaluated to be $1.92{\times}10^{-7}$. These capacitors were designed to be used not only as 100:1 capacitance standards but also as single capacitors or decade capacitors with decade values at frequencies up to 1 kHz.

• 한국전자파학회:학술대회논문집
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• 한국전자파학회 2002년도 종합학술발표회 논문집 Vol.12 No.1
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• pp.169-172
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• 2002

In this paper, the design formulas for bandpass filters using parallel coupled stepped impedance resonators(SIR) are derived. General content about basic feature of stepped impedance resonators(SIR) is represented. The filters and duplexer using stepped impedance resonators(SIR) have been designed and realized with the presented design method at IMT-2000 frequency band Simulations have used serenade circuit simulation and HFSS EM-simulation. We were showed excellent agreements between SIR design theory and simulation results on the multi-layer filter/duplexer.

• Journal of Power Electronics
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• 제13권4호
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• pp.701-711
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• 2013

This paper takes into account the influence of the different impedances of distribution lines on power distribution among inverters when the inverters are paralleled with the droop control method. The impact of distribution lines on the power distribution of inverters can be divided into two aspects. Firstly, since the distributed generators are in low voltage grids, there is resistive impedance in the distribution lines, which will cause control coupling and reduce system stability. The virtual negative resistive impedance of inverters is adopted in this paper to neutralize the resistive element of distribution lines and thus make the distribution line impedance purely inductive. Secondly, after solving the resistive impedance problem, the difference in the inductive impedance value of distribution lines due to the low density of distributed generators will cause an unequal share of reactive power. With regards to this problem, modification is put forward for the droop control strategy to share the reactive power equally. The feasibility of the design is validated by simulation and experimental results.

• Journal of Power Electronics
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• 제15권2호
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• pp.399-410
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• 2015

A 6.5 V/50 kA high-frequency switching power supply (HSPS) system composed of 10 power modules is developed to meet the requirements of copper-foil electrolysis. The power module is composed of a two-leg pulse width modulation (PWM) rectifier and a DC/DC converter. The DC/DC converter adopts two full-wave rectifiers in parallel to enhance the output. For the two-leg PWM rectifier, the ripple of the DC-link voltage is derived. A composite control method with a ripple filter is then proposed to effectively improve the performance of the rectifier. To meet the process demand of copper-foil electrolysis, the virtual impedance-based current-sharing control method with load current full feedforward is proposed for n-parallel DC/DC converters. The roles of load current feedforward and virtual impedance are analyzed, and the current-sharing control model of the HSPS system is derived. Virtual impedance is used to adjust the current-sharing impedance without changing the equivalent output impedance, which can effectively reduce current-sharing errors. Finally, simulation and experimental results verify the structure and control method.